MEMS GYROSCOPE WITH FREQUENCY REGULATION AND ELECTROSTATIC CANCELLATION OF THE QUADRATURE ERROR

    公开(公告)号:US20180038692A1

    公开(公告)日:2018-02-08

    申请号:US15458704

    申请日:2017-03-14

    CPC classification number: G01C19/5712 G01C19/574 G01C19/5776

    Abstract: A MEMS gyroscope, wherein a suspended mass is mobile with respect to a supporting structure. The mobile mass is affected by quadrature error caused by a quadrature moment; a driving structure is coupled to the suspended mass for controlling the movement of the mobile mass in a driving direction at a driving frequency. Motion-sensing electrodes, coupled to the mobile mass, detect the movement of the mobile mass in the sensing direction and quadrature-compensation electrodes are coupled to the mobile mass to generate a compensation moment opposite to the quadrature moment. The gyroscope is configured to bias the quadrature-compensation electrodes with a compensation voltage so that the difference between the resonance frequency of the mobile mass and the driving frequency has a preset frequency-mismatch value.

    Mems gyroscope with regulation of the mismatch between the driving and sensing frequencies

    公开(公告)号:US11002543B2

    公开(公告)日:2021-05-11

    申请号:US16116511

    申请日:2018-08-29

    Inventor: Daniele Prati

    Abstract: A MEMS gyroscope can include a supporting structure and a mobile mass elastically suspended from the supporting structure in a driving direction and in a sensing direction, mutually perpendicular. A driving structure is coupled to the mobile mass for controlling a driving movement of the mobile mass in the driving direction at a driving frequency. A driving-frequency tuning electrode, distinct from the driving structure, faces the mobile mass. A driving-frequency tuner electrically coupled to the driving-frequency tuning electrode for supplying a tuning voltage to the driving-frequency tuning electrode.

    MEMS gyroscope with frequency regulation and electrostatic cancellation of the quadrature error

    公开(公告)号:US10444013B2

    公开(公告)日:2019-10-15

    申请号:US15458704

    申请日:2017-03-14

    Abstract: A MEMS gyroscope, wherein a suspended mass is mobile with respect to a supporting structure. The mobile mass is affected by quadrature error caused by a quadrature moment; a driving structure is coupled to the suspended mass for controlling the movement of the mobile mass in a driving direction at a driving frequency. Motion-sensing electrodes, coupled to the mobile mass, detect the movement of the mobile mass in the sensing direction and quadrature-compensation electrodes are coupled to the mobile mass to generate a compensation moment opposite to the quadrature moment. The gyroscope is configured to bias the quadrature-compensation electrodes with a compensation voltage so that the difference between the resonance frequency of the mobile mass and the driving frequency has a preset frequency-mismatch value.

    MEMS GYROSCOPE WITH REGULATION OF THE MISMATCH BETWEEN THE DRIVING AND SENSING FREQUENCIES

    公开(公告)号:US20190072389A1

    公开(公告)日:2019-03-07

    申请号:US16116511

    申请日:2018-08-29

    Inventor: Daniele Prati

    Abstract: A MEMS gyroscope can include a supporting structure and a mobile mass elastically suspended from the supporting structure in a driving direction and in a sensing direction, mutually perpendicular. A driving structure is coupled to the mobile mass for controlling a driving movement of the mobile mass in the driving direction at a driving frequency. A driving-frequency tuning electrode, distinct from the driving structure, faces the mobile mass. A driving-frequency tuner electrically coupled to the driving-frequency tuning electrode for supplying a tuning voltage to the driving-frequency tuning electrode.

    Microfluidic die with multiple heaters in a chamber
    16.
    发明授权
    Microfluidic die with multiple heaters in a chamber 有权
    具有多个加热器的微流体模具在腔室中

    公开(公告)号:US09248648B2

    公开(公告)日:2016-02-02

    申请号:US14310898

    申请日:2014-06-20

    Abstract: The present disclosure is directed to a microfluidic die that includes a first larger heater and a second smaller heater is a single chamber. The first heater is configured to form a primary bubble that ejects fluid from a nozzle associated with the chamber. The second heater is configured to form a secondary bubble to prevent blow back caused when the primary bubble bursts and ejects fluid from the nozzle. The first and second heater may be coupled to a single input trace and a single ground trace.

    Abstract translation: 本公开涉及包括第一较大加热器并且第二较小加热器是单室的微流体管芯。 第一加热器被配置成形成从与腔室相关联的喷嘴喷出流体的初级气泡。 第二加热器构造成形成二次气泡,以防止当初级泡沫从喷嘴中喷出并喷射流体时引起的回吹。 第一和第二加热器可以耦合到单个输入迹线和单个接地迹线。

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