公开(公告)号：US20220390234A1

公开(公告)日：2022-12-08

申请号：US17750074

申请日：2022-05-20

申请人： STMicroelectronics S.r.l.

发明人： Giacomo Langfelder ,  Leonardo Gaffuri Pagani ,  Luca Guerinoni ,  Luca Giuseppe Falorni ,  Patrick Fedeli ,  Paola Carulli

IPC分类号： G01C19/5712 ,  G01C19/5776

摘要： In an embodiment a circuit includes an inertial measurement unit configured to be oscillated via a driving signal provided by driving circuitry, a lock-in amplifier configured to receive a sensing signal from the inertial measurement unit and a reference demodulation signal which is a function of the driving signal and provide an inertial measurement signal based on the sensing signal, wherein the reference demodulation signal is affected by a variable phase error, phase meter circuitry configured to receive the driving signal and the sensing signal and provide, as a function of a phase difference between the driving signal and the sensing signal, a phase correction signal for the reference demodulation signal and a correction node configured to apply the phase correction signal to the reference demodulation signal so that, in response to the phase correction signal being applied to the reference demodulation signal, the phase error is maintained in a vicinity of a reference value.

公开(公告)号：US20180306580A1

公开(公告)日：2018-10-25

申请号：US15956446

申请日：2018-04-18

申请人： STMicroelectronics S.r.l.

发明人： Gabriele Gattere ,  Luca Guerinoni ,  Luca Giuseppe Falorni ,  Damiano Milani ,  Francesco Braghin ,  Ferruccio Resta ,  Mohammad Izadi

IPC分类号： G01C19/5712

CPC分类号： G01C19/5712 ,  B81B2201/0242 ,  G01C19/574 ,  G01C19/5755

摘要： A MEMS gyroscope is equipped with: at least a first mobile mass suspended from the top of a substrate by means of elastic suspension elements coupled to anchor points rigidly fixed to the substrate, in such a manner as to be actuated in an actuating movement along a first axis of a horizontal plane and to carry out a measurement movement along a vertical axis, transverse to the horizontal plane, in response to a first angular velocity acting about a second axis of the horizontal plane, transverse to the first axis. The elastic suspension elements are configured in such a manner as to internally compensate unwanted displacements out of the horizontal plane along the vertical axis originating from the actuating movement, such that the mobile mass remains in the horizontal plane during the actuating movement.