公开(公告)号：US10775171B2

公开(公告)日：2020-09-15

申请号：US15956446

申请日：2018-04-18

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Luca Guerinoni ,  Luca Giuseppe Falorni ,  Damiano Milani ,  Francesco Braghin ,  Ferruccio Resta ,  Mohammad Izadi

IPC: G01C19/5712 ,  G01C19/574 ,  G01C19/5755

Abstract: A MEMS gyroscope is equipped with: at least a first mobile mass suspended from the top of a substrate by means of elastic suspension elements coupled to anchor points rigidly fixed to the substrate, in such a manner as to be actuated in an actuating movement along a first axis of a horizontal plane and to carry out a measurement movement along a vertical axis, transverse to the horizontal plane, in response to a first angular velocity acting about a second axis of the horizontal plane, transverse to the first axis. The elastic suspension elements are configured in such a manner as to internally compensate unwanted displacements out of the horizontal plane along the vertical axis originating from the actuating movement, such that the mobile mass remains in the horizontal plane during the actuating movement.

公开(公告)号：US20180306580A1

公开(公告)日：2018-10-25

申请号：US15956446

申请日：2018-04-18

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Luca Guerinoni ,  Luca Giuseppe Falorni ,  Damiano Milani ,  Francesco Braghin ,  Ferruccio Resta ,  Mohammad Izadi

IPC: G01C19/5712

CPC classification number: G01C19/5712 ,  B81B2201/0242 ,  G01C19/574 ,  G01C19/5755

Abstract: A MEMS gyroscope is equipped with: at least a first mobile mass suspended from the top of a substrate by means of elastic suspension elements coupled to anchor points rigidly fixed to the substrate, in such a manner as to be actuated in an actuating movement along a first axis of a horizontal plane and to carry out a measurement movement along a vertical axis, transverse to the horizontal plane, in response to a first angular velocity acting about a second axis of the horizontal plane, transverse to the first axis. The elastic suspension elements are configured in such a manner as to internally compensate unwanted displacements out of the horizontal plane along the vertical axis originating from the actuating movement, such that the mobile mass remains in the horizontal plane during the actuating movement.