公开(公告)号：US12084341B2

公开(公告)日：2024-09-10

申请号：US17499297

申请日：2021-10-12

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' Boni ,  Lorenzo Vinciguerra ,  Roberto Carminati ,  Massimiliano Merli

IPC: B81C1/00 ,  B81B3/00

CPC classification number: B81B3/0072 ,  B81C1/00182 ,  B81C1/00198 ,  B81B2203/033 ,  B81C2201/019

Abstract: A MEMS device is formed by a body of semiconductor material which defines a support structure. A pass-through cavity in the body is surrounded by the support structure. A movable structure is suspended in the pass-through cavity. An elastic structure extends in the pass-through cavity between the support structure and the movable structure. The elastic structure has a first and second portions and is subject, in use, to mechanical stress. The MEMS device is further formed by a metal region, which extends on the first portion of the elastic structure, and by a buried cavity in the elastic structure. The buried cavity extends between the first and the second portions of the elastic structure.

公开(公告)号：US12043540B2

公开(公告)日：2024-07-23

申请号：US18134381

申请日：2023-04-13

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' Boni ,  Roberto Carminati ,  Massimiliano Merli

IPC: B81B3/00 ,  G02B26/08 ,  G03B21/00 ,  H04N9/31 ,  H10N30/20

CPC classification number: B81B3/0072 ,  B81B3/0021 ,  G02B26/0858 ,  G03B21/008 ,  H04N9/3152 ,  H10N30/20 ,  B81B2201/042

Abstract: This disclosure pertains to a microelectromechanical systems (MEMS) device with a tiltable structure, a fixed supporting structure, and an actuation structure with driving arms connected to the tiltable structure by elastic decoupling elements. Described herein, particularly, is a planar stop structure between the driving arms and the tiltable structure, which functions to limit movement in the tiltable plane. This stop structure includes a first projection/abutment surface pair formed by a projection extending from a driving arm and an abutment surface formed by a recess in the tiltable structure. The projection and abutment surface are adjacent and spaced apart in the device's rest condition.

公开(公告)号：US11953813B2

公开(公告)日：2024-04-09

申请号：US18134671

申请日：2023-04-14

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' Boni ,  Roberto Carminati ,  Massimiliano Merli

IPC: G02B26/08 ,  B81B3/00 ,  G02B26/10 ,  G03B21/00 ,  G03B21/28

CPC classification number: G03B21/008 ,  B81B3/0021 ,  G02B26/0858 ,  G02B26/105 ,  G03B21/28 ,  B81B2201/032 ,  B81B2201/042 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81B2203/04 ,  B81B2203/058

Abstract: Disclosed herein is a microelectromechanical device that features a fixed structure defining a cavity, a tiltable structure elastically suspended within the cavity, and a piezoelectrically driven actuation structure that rotates the tiltable structure about a first rotation axis. The actuation structure includes driving arms with piezoelectric material, elastically coupled to the tiltable structure by decoupling elastic elements that are stiff to out-of-plane movements but compliant to torsional movements. The tiltable structure is elastically coupled to the fixed structure at the first rotation axis using elastic suspension elements, while the fixed structure forms a frame surrounding the cavity with supporting elements. A lever mechanism is coupled between a supporting element and a driving arm.

公开(公告)号：US11353694B2

公开(公告)日：2022-06-07

申请号：US17121961

申请日：2020-12-15

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' Boni ,  Roberto Carminati ,  Massimiliano Merli

IPC: G03B21/28 ,  G02B26/08 ,  B81B3/00 ,  G02B26/10 ,  G03B21/00

Abstract: A microelectromechanical mirror device has a fixed structure defining a cavity. A tiltable structure carrying a reflecting surface is elastically suspended above the cavity with a main extension in a horizontal plane. Elastic elements are coupled to the tiltable structure and at least one first pair of driving arms, which carry respective regions of piezoelectric material, are biasable to cause rotation of the tiltable structure about at least one first axis of rotation parallel to a first horizontal axis of the horizontal plane. The driving arms are elastically coupled to the tiltable structure on opposite sides of the first axis of rotation and are interposed between the tiltable structure and the fixed structure. The driving arms have a thickness, along an orthogonal axis transverse to the horizontal plane, smaller than a thickness of at least some of the elastic elements coupled to the tiltable structure.