公开(公告)号：US09534288B2

公开(公告)日：2017-01-03

申请号：US14012924

申请日：2013-08-28

Applicant: Samsung Display Co., Ltd.

Inventor： Young-Mook Choi ,  Jong-Won Hong

IPC: C23C14/56 ,  H01L21/677 ,  C23C14/04 ,  C23C14/50 ,  H01L51/56 ,  H01L51/00 ,  H01L21/673 ,  H01L21/67

CPC classification number: C23C14/56 ,  C23C14/042 ,  C23C14/50 ,  H01L21/67259 ,  H01L21/67309 ,  H01L21/67709 ,  H01L51/0001 ,  H01L51/56

Abstract: A deposition apparatus includes: a transfer unit including a first transfer unit and a second transfer unit, wherein the first transfer unit transfers, in a first direction, a moving unit to which a substrate is detachably fixed, and the second transfer unit transfers, in an opposite direction of the first direction, the moving unit from which the substrate is separated, and a deposition unit including a deposition assembly wherein the deposition assembly deposits a material on the substrate spaced apart from the deposition assembly while the first transfer unit transfers the substrate which is fixed to the moving unit, wherein the first transfer unit includes a first support unit that supports both ends of the moving unit in the first direction, and a second support unit that supports a side of the moving unit opposite to a side close to the deposition assembly.

Abstract translation: 一种沉积装置，包括：转印单元，包括第一转印单元和第二转印单元，其中第一转印单元沿第一方向转移基板可拆卸地固定到其上的移动单元，并且第二转印单元转移到 第一方向相反的方向，从基板分离的移动单元和包括沉积组件的沉积单元，其中沉积组件将材料沉积在与沉积组件间隔开的衬底上，同时第一转移单元转移衬底 其固定到所述移动单元，其中所述第一传送单元包括支撑所述移动单元的所述第一方向的两端的第一支撑单元和支撑所述移动单元的与所述移动单元的靠近的一侧相对的一侧的第二支撑单元 沉积组件。

公开(公告)号：US09496524B2

公开(公告)日：2016-11-15

申请号：US13938173

申请日：2013-07-09

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Su-Hwan Lee ,  Un-Cheol Sung ,  Chae-Woong Kim ,  Young-Mook Choi

IPC: C23C16/00 ,  H01L51/56 ,  H01L27/32 ,  H01L51/00 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24 ,  C23C14/56

CPC classification number: H01L51/56 ,  B05D1/60 ,  C23C14/04 ,  C23C14/12 ,  C23C14/24 ,  C23C14/243 ,  C23C14/56 ,  H01L27/32 ,  H01L27/326 ,  H01L51/0008 ,  H01L2227/323

Abstract: An organic layer deposition apparatus, a method of manufacturing an organic light-emitting display apparatus by using the same, and an organic light-emitting display apparatus manufactured using the method. The organic layer deposition apparatus includes a conveyer unit including first and second conveyer units, loading and unloading units, and a deposition unit. A transfer unit moves between the first and second conveyer units, and the substrate attached to the transfer unit is spaced from a plurality of organic layer deposition assemblies of the deposition unit while being transferred by the first conveyer unit. The organic layer deposition assemblies include common layer deposition assemblies and pattern layer deposition assemblies.

Abstract translation: 有机层沉积装置，使用该有机发光显示装置的有机发光显示装置的制造方法以及使用该方法制造的有机发光显示装置。 有机层沉积装置包括具有第一和第二输送单元，装卸单元和沉积单元的输送单元。 转印单元在第一和第二输送单元之间移动，并且附着到转印单元的基板与沉积单元的多个有机层沉积组件间隔开，同时由第一输送单元转印。 有机层沉积组件包括公共层沉积组件和图案层沉积组件。

公开(公告)号：US20160079534A1

公开(公告)日：2016-03-17

申请号：US14946686

申请日：2015-11-19

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Young-Mook Choi ,  Hee-Cheol Kang ,  Chae-Woong Kim ,  Mu-Hyun Kim ,  Dong-Kyu Lee

IPC: H01L51/00

CPC classification number: H01L51/0004 ,  C23C14/12 ,  C23C14/243 ,  H01L51/56

Abstract: A deposition source and an organic layer deposition apparatus that may be simply applied to the manufacture of large-sized display apparatuses on a mass scale and may prevent or substantially prevent deposition source nozzles from being blocked during deposition of a deposition material, thereby improving manufacturing yield and deposition efficiency. A deposition source includes a first deposition source including a plurality of first deposition source nozzles, and a second deposition source including a plurality of second deposition source nozzles wherein the plurality of first deposition source nozzles and the plurality of second deposition source nozzles are tilted toward each other.

Abstract translation: 沉积源和有机层沉积设备可以简单地应用于大规模的大型显示设备的制造，并且可以防止或基本上防止沉积源喷嘴在沉积材料沉积期间被阻挡，从而提高制造产量 和沉积效率。 沉积源包括包括多个第一沉积源喷嘴的第一沉积源和包括多个第二沉积源喷嘴的第二沉积源，其中多个第一沉积源喷嘴和多个第二沉积源喷嘴朝向每个 其他。