公开(公告)号：US11557465B2

公开(公告)日：2023-01-17

申请号：US17009265

申请日：2020-09-01

Applicant: TOTO LTD.

Inventor： Yutaka Momiyama ,  Minoru Suzuki ,  Hitoshi Sasaki ,  Tsukasa Shigezumi

IPC: H01L21/683 ,  H01T23/00 ,  H01J37/32

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. The third surface is positioned between the first surface and the second electrode layer. An electrical resistance of the first surface is less than an average electrical resistance of the first portion.

公开(公告)号：US11410867B2

公开(公告)日：2022-08-09

申请号：US16523634

申请日：2019-07-26

Applicant: TOTO LTD.

Inventor： Yutaka Momiyama ,  Hitoshi Sasaki

IPC: H01L21/683 ,  B23Q3/15 ,  H02N13/00 ,  H01L21/687

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric, a base plate, a first electrode layer, and a second electrode layer. The ceramic dielectric substrate has a first major surface and a second major surface. The first electrode layer is provided between the first major surface and the second major surface. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer has a first surface and a second surface. A distance between the first surface and the first major surface is constant. A distance between the second surface and the first surface at an end portion of the first electrode layer is shorter than a distance between the second surface and the first surface at a central portion of the first electrode layer.

公开(公告)号：US11328907B2

公开(公告)日：2022-05-10

申请号：US16523745

申请日：2019-07-26

Applicant: TOTO LTD.

Inventor： Yutaka Momiyama ,  Hitoshi Sasaki

IPC: H01J37/32 ,  H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a first electrode layer. The ceramic dielectric substrate has a first major surface and a second major surface. The first electrode layer is provided inside the ceramic dielectric substrate and connected to a high frequency power supply. The first electrode layer is provided between the first major surface and the second major surface. The first electrode layer has a first surface and a second surface. A surface roughness of the second surface is larger than a surface roughness of the first surface.

公开(公告)号：US10923382B2

公开(公告)日：2021-02-16

申请号：US16131245

申请日：2018-09-14

Applicant: TOTO LTD.

Inventor： Jumpei Uefuji ,  Hitoshi Sasaki ,  Kosuke Yamaguchi ,  Kengo Maehata ,  Yuichi Yoshii

IPC: H01L21/683 ,  B32B18/00 ,  H01L21/67

Abstract: An electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a heater plate. The heater plate is provided between the ceramic dielectric substrate and the base plate. The heater plate includes first and second support plates, first and second resin layers, and a heater element. Each of the first and second resin layers is provided between the first support plate and the second support plate. The heater element includes first and second electrically conductive portions. The first electrically conductive portion is provided between the first resin layer and the second resin layer. The second electrically conductive portion is separated from the first electrically conductive portion in an in-plane direction. The first resin layer contacts the second resin layer between the first electrically conductive portion and the second electrically conductive portion.