公开(公告)号：US09300229B2

公开(公告)日：2016-03-29

申请号：US14021205

申请日：2013-09-09

Applicant: TOTO LTD.

Inventor： Kazuki Anada ,  Takuma Wada

IPC: H02N13/00 ,  H01L21/683

CPC classification number: H02N13/00 ,  H01L21/6833

Abstract: To provide an electrostatic chuck, including: a ceramic dielectric substrate having a first major surface on which an object to be processed is mounted, and a second major surface on a side opposite the first major surface, the ceramic dielectric substrate being a polycrystalline ceramic sintered body; and an electrode layer interposed between the first major surface and the second major surface of the ceramic dielectric substrate, the electrode layer being integrally sintered with the ceramic dielectric substrate, a temperature control plate provided on the second major surface side; and a heater provided between the electrode layer and the temperature control plate, and the first dielectric layer and the second dielectric layer of the ceramic dielectric substrate having an infrared spectral transmittance in terms of a thickness of 1 mm of not less than 20%.

Abstract translation: 为了提供一种静电卡盘，其特征在于，包括：陶瓷电介质基板，其具有安装有被加工物的第一主面和与所述第一主面相反的一侧的第二主面，所述陶瓷电介质基板为多晶陶瓷烧结体 身体; 以及插入在所述陶瓷电介质基板的所述第一主表面和所述第二主表面之间的电极层，所述电极层与所述陶瓷电介质基板一体烧结，设置在所述第二主表面侧的温度控制板; 以及设置在电极层和温度控制板之间的加热器，陶瓷电介质基板的第一介质层和第二电介质层的厚度为1mm以上，红外光谱透射率为20％以上。

公开(公告)号：US09042078B2

公开(公告)日：2015-05-26

申请号：US14345279

申请日：2012-09-27

Applicant: TOTO LTD.

Inventor： Takuma Wada ,  Kazuki Anada

IPC: H01T23/00 ,  H01L21/683 ,  B23Q3/154 ,  H01L21/67 ,  H01L21/687

CPC classification number: H01L21/6831 ,  B23Q3/1543 ,  H01L21/67109 ,  H01L21/6833 ,  H01L21/6875

Abstract: An electrostatic chuck includes: a ceramic dielectric substrate having a first major surface and a second major surface; an electrode interposed between the first and second major surfaces; and a connecting part connected to the electrode and including a first region in contact with the electrode, with a first direction being defined as a direction from the first major surface toward the second major surface, and a second direction being defined as a direction orthogonal to the first direction, the first region being configured so that in a cross section of the electrode and the connecting part as viewed in the second direction, an angle on a side of the connecting part between an extension line along outer shape on the side of second major surface of the electrode and a tangential line of outer shape of the connecting part gradually increases in the first direction.

Abstract translation: 静电卡盘包括：具有第一主表面和第二主表面的陶瓷电介质基片; 插入在第一和第二主表面之间的电极; 以及连接部，其与电极连接并且包括与电极接触的第一区域，第一方向被定义为从第一主表面朝向第二主表面的方向，第二方向被定义为与 所述第一方向，所述第一区域被构造为使得在所述电极和所述连接部分的横截面中沿着所述第二方向观察到所述连接部分的沿着外侧的延伸线在所述第二方向上的角度 电极的主表面和连接部的外形的切线在第一方向上逐渐增大。