公开(公告)号：US11086225B2

公开(公告)日：2021-08-10

申请号：US16887245

申请日：2020-05-29

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Wei-Shin Cheng ,  Hsin-Feng Chen ,  Cheng-Hao Lai ,  Shao-Hua Wang ,  Han-Lung Chang ,  Li-Jui Chen ,  Po-Chung Cheng

IPC: G03F1/58 ,  G03F1/24 ,  G03F1/52 ,  G03F7/20

Abstract: A method includes providing a plurality of fuel droplets into an EUV source vessel by a fuel droplet generator, in which the fuel droplet generator has a first portion inside the EUV source vessel and a second portion outside the EUV source vessel; generating a plurality of output signals respectively from a plurality of oscillation sensors on the fuel droplet generator; determining whether the output signals are acceptable; and determining whether an unwanted oscillation originates from the first portion of the fuel droplet generator or the second portion of the fuel droplet generator when the output signals is determined as unacceptable.