公开(公告)号：US09268327B2

公开(公告)日：2016-02-23

申请号：US13759515

申请日：2013-02-05

Applicant: Tokyo Electron Limited

Inventor： Akihiro Teramoto ,  Tokutarou Hayashi

IPC: G05B19/418 ,  B25J9/16

CPC classification number: G05B19/4189 ,  B25J9/1612 ,  G05B2219/39479 ,  G05B2219/39508

Abstract: A technique which, when transporting a substrate from one module to another, detects a displacement of the substrate on a holding member and transfers the substrate to another module with the displacement within an acceptable range. Displacement of a wafer on a fork of a transport arm from a reference position is determined when the fork has received the wafer from one module and, when the displacement is within an acceptable range, the wafer is transported by the transport arm to another module. When the displacement is out of the acceptable range, the wafer is transported by the transport arm to a wafer stage module, and then the transport arm receives the wafer from the wafer stage module so that the displacement comes to fall within the acceptable range. The wafer can therefore be transferred to another module with the displacement within the acceptable range.

Abstract translation: 一种将基板从一个模块传送到另一个模块的技术是检测基板在保持部件上的位移，并且将该基板转移到另一个位移在可接受范围内的模块。 当叉子从一个模块接收到晶片时，确定了从基准位置移动臂的叉子上的晶片的位移，并且当位移在可接受的范围内时，晶片被传送臂传送到另一个模块。 当位移超出可接受范围时，晶片由传送臂传送到晶片台模块，然后传输臂从晶片台模块接收晶片，使得位移落入可接受的范围内。 因此，晶片可以被转移到具有在可接受范围内的位移的另一个模块。

公开(公告)号：US09214370B2

公开(公告)日：2015-12-15

申请号：US13859822

申请日：2013-04-10

Applicant: TOKYO ELECTRON LIMITED

Inventor： Naruaki Iida ,  Akihiro Teramoto

IPC: H01L21/677 ,  H01L21/67

CPC classification number: H01L21/677 ,  H01L21/67265 ,  H01L21/67772 ,  H01L21/67775 ,  H01L21/67778

Abstract: A substrate transfer device that transfers a substrate by allowing a substrate opening formed on a front surface of a substrate transfer vessel to face an opening formed on a partition wall from one side of the partition wall and separating a cover body of the substrate transfer vessel from the other side of the partition wall includes a door configured to open and close the opening from the other side of the partition wall; a reciprocating unit configured to straightly move the door back and forth between a first position where the opening is closed and a second position away from the first position toward the other side of the partition wall; and a rotating unit configured to rotate the door around a rotation axis in a straightly moving direction of the door between the second position and a third position deviated from a region facing the opening.

Abstract translation: 一种基板转印装置，其通过使形成在基板转印容器的前表面上的基板开口面对从分隔壁的一侧形成在隔壁上的开口并将基板转印容器的盖体从 所述分隔壁的另一侧包括构造成从所述隔壁的另一侧打开和关闭所述开口的门; 往复运动单元，其构造成在所述开口关闭的第一位置和远离所述第一位置的所述隔壁的另一侧之间前后移动所述门; 以及旋转单元，其构造成使门围绕旋转轴线在第二位置和偏离面向开口的区域的第三位置之间沿门的直线移动方向旋转。

公开(公告)号：US20130272824A1

公开(公告)日：2013-10-17

申请号：US13859822

申请日：2013-04-10

Applicant: TOKYO ELECTRON LIMITED

Inventor： Naruaki Iida ,  Akihiro Teramoto

IPC: H01L21/677

CPC classification number: H01L21/677 ,  H01L21/67265 ,  H01L21/67772 ,  H01L21/67775 ,  H01L21/67778

Abstract: A substrate transfer device that transfers a substrate by allowing a substrate opening formed on a front surface of a substrate transfer vessel to face an opening formed on a partition wall from one side of the partition wall and separating a cover body of the substrate transfer vessel from the other side of the partition wall includes a door configured to open and close the opening from the other side of the partition wall; a reciprocating unit configured to straightly move the door back and forth between a first position where the opening is closed and a second position away from the first position toward the other side of the partition wall; and a rotating unit configured to rotate the door around a rotation axis in a straightly moving direction of the door between the second position and a third position deviated from a region facing the opening.

Abstract translation: 一种基板转印装置，其通过使形成在基板转印容器的前表面上的基板开口面对从分隔壁的一侧形成在隔壁上的开口并将基板转印容器的盖体从 所述分隔壁的另一侧包括构造成从所述隔壁的另一侧打开和关闭所述开口的门; 往复运动单元，其构造成在所述开口关闭的第一位置和远离所述第一位置的所述隔壁的另一侧之间前后移动所述门; 以及旋转单元，其构造成使门围绕旋转轴线在第二位置和偏离面向开口的区域的第三位置之间沿门的直线移动方向旋转。