公开(公告)号：US20140238972A1

公开(公告)日：2014-08-28

申请号：US14270524

申请日：2014-05-06

Applicant: Tokyo Electron Limited

Inventor： Koji YOSHII ,  Tatsuya YAMAGUCHI ,  Wenling WANG ,  Takanori SAITO

IPC: H01L21/67

CPC classification number: H01L21/67115 ,  F27B17/0025 ,  F27D19/00 ,  F27D21/0014 ,  H01L21/67109 ,  H01L21/67248

Abstract: A control unit can select a large-number control zone model in which the number of control zones, which are independently controlled, is large, and a small-number control zone model in which the number of control zones, which are independently controlled, is small. When a temperature is increased or decreased, the control unit can select the small-number control zone model so as to control, based on signals from temperature sensors of the respective control zones C1 . . . C5 whose number is small, heaters located on the respective control zones C1 . . . C5. When a temperature is stabilized, the control unit can select the large-number control zone model so as to control, based on signals signals from the temperature sensors of the respective control zones C1 . . . C10 whose number is large, the heaters located on the respective control zones C1 . . . C10.

Abstract translation: 控制单元可以选择其中独立控制的控制区域的数量大的大量控制区域模型，以及独立控制的控制区域的数量为少数的控制区域模型 小。 当温度升高或降低时，控制单元可以根据来自相应控制区C1的温度传感器的信号，选择小数控制区模型，以便控制。 。 。 数量少的加热器位于相应控制区C1上。 。 。 C5。 当温度稳定时，控制单元可以根据来自各个控制区C1的温度传感器的信号信号来选择大数量的控制区域模型。 。 。 C10，其数量大，位于各个控制区C1上的加热器。 。 。 C10。