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公开(公告)号：US20250093276A1
公开(公告)日：2025-03-20
申请号：US18724335
申请日：2022-12-13
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Koudai Higashi
Abstract: A foreign substance detection device configured to detect a foreign substance contained in a processing liquid configured to process a substrate includes multiple processing liquid flow path forming mechanisms configured to form multiple processing liquid flow paths through which the processing liquid to be supplied to the substrate flows; a radiator configured to radiate radiation light from a light source toward each of the multiple processing liquid flow paths; and a light receiver configured to receive light emitted from the processing liquid flow paths by radiating the radiation light. The radiator includes a light adjuster configured to adjust a light amount of the radiation light radiated to the multiple processing liquid flow paths.
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公开(公告)号：US20220034802A1
公开(公告)日：2022-02-03
申请号：US17386850
申请日：2021-07-28
Applicant: Tokyo Electron Limited
Inventor： Koudai Higashi , Masato Hayashi , Kohei Noguchi
Abstract: A substrate processing apparatus includes a supply channel through which a liquid to be supplied to a substrate flows; and a foreign substance detecting unit configured to detect a foreign substance in the liquid based on a signal obtained when light, which is near-infrared light, is radiated toward a flow path forming unit constituting a part of the supply channel by a light projector so that light is emitted from the flow path forming unit and a light receiver receives the light emitted from the flow path forming unit.
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13.发明授权公开(公告)号：US11048016B2
公开(公告)日：2021-06-29
申请号：US16478908
申请日：2018-01-16
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Kohei Noguchi , Daisuke Kajiwara , Koudai Higashi
Abstract: An apparatus includes flow path units 15A to 15K configured to form flow paths 17A to 17K through which a fluid supplied to a target object W is flown; a laser light irradiator 51 configured to irradiate a laser light into the flow path units such that an optical path intersects with a flow direction of the fluid in the flow path units; light receiving elements 45A and 45B provided at the optical path having passed through the flow path units; a detector 6 configured to detect the foreign substance in the fluid based on a signal from the light receiving elements; and a filter unit 57 provided at the optical path between the light receiving elements and the flow path units, and configured to block a Raman scattered light and allow a Rayleigh scattered light to be transmitted to the light receiving elements.
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14.发明申请公开(公告)号：US20190383963A1
公开(公告)日：2019-12-19
申请号：US16478908
申请日：2018-01-16
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Kohei Noguchi , Daisuke Kajiwara , Koudai Higashi
Abstract: An apparatus includes flow path units 15A to 15K configured to form flow paths 17A to 17K through which a fluid supplied to a target object W is flown; a laser light irradiator 51 configured to irradiate a laser light into the flow path units such that an optical path intersects with a flow direction of the fluid in the flow path units; light receiving elements 45A and 45B provided at the optical path having passed through the flow path units; a detector 6 configured to detect the foreign substance in the fluid based on a signal from the light receiving elements; and a filter unit 57 provided at the optical path between the light receiving elements and the flow path units, and configured to block a Raman scattered light and allow a Rayleigh scattered light to be transmitted to the light receiving elements.
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