公开(公告)号：US09818654B2

公开(公告)日：2017-11-14

申请号：US15171240

申请日：2016-06-02

Applicant: Tokyo Electron Limited

Inventor： Masato Hayashi ,  Kohei Noguchi ,  Kenji Iizuka ,  Naruaki Iida

IPC: H01L21/027 ,  H01L21/66 ,  H01L21/67 ,  G01N21/85 ,  G03F7/16

CPC classification number: H01L22/10 ,  G01N21/85 ,  G01N2021/8578 ,  G03F7/16 ,  G03F7/162 ,  H01L21/0273 ,  H01L21/67253

Abstract: An apparatus includes: measurement flow passage portions as part of a respective plurality of supply paths of fluids to be supplied to a substrate, the measurement flow passage portions constituting measurement regions for measurement of foreign matter in the fluids, and being disposed so as to form a row with each other; a light irradiating unit configured to form an optical path in one of the flow passage portions, the light irradiating unit being shared by the plurality of flow passage portions; a moving mechanism configured to move the light irradiating unit relatively along a direction of arrangement of the flow passage portions to form the optical path within the flow passage portion selected among the plurality of flow passage portions; a light receiving unit including a light receiving element, the light receiving element receiving light transmitted by the flow passage portion; and a detecting unit configured to detect foreign matter in the fluid on a basis of a signal output from the light receiving element. Consequently, the number of necessary light irradiating units can be reduced, and the apparatus can be miniaturized.

公开(公告)号：US20240125697A1

公开(公告)日：2024-04-18

申请号：US18535134

申请日：2023-12-11

Applicant: Tokyo Electron Limited

Inventor： Koudai Higashi ,  Masato Hayashi ,  Kohei Noguchi

IPC: G01N21/39 ,  G01N21/85

CPC classification number: G01N21/39 ,  G01N21/85 ,  G01N2021/392

Abstract: A substrate processing apparatus includes a supply channel through which a liquid to be supplied to a substrate flows; and a foreign substance detecting unit configured to detect a foreign substance in the liquid based on a signal obtained when light, which is near-infrared light, is radiated toward a flow path forming unit constituting a part of the supply channel by a light projector so that light is emitted from the flow path forming unit and a light receiver receives the light emitted from the flow path forming unit.

公开(公告)号：US11340152B2

公开(公告)日：2022-05-24

申请号：US17245220

申请日：2021-04-30

Applicant: TOKYO ELECTRON LIMITED

Inventor： Masato Hayashi ,  Kohei Noguchi ,  Koudai Higashi ,  Makoto Ogata

IPC: G03F7/20 ,  G01N15/02 ,  H01L21/67 ,  G01N15/00

Abstract: According to one embodiment of the present disclosure, there is provided a substrate processing apparatus comprising: a supply passage through which fluid supplied to a substrate flows; and a foreign substance detector including a channel forming part forming a portion of the supply passage, a light projector irradiating light to the channel forming part, and a light receiver receiving light emitted from the channel forming part as a result of irradiating light to the channel forming part by the light projector, the foreign substance detector being configured to detect a foreign substance in the fluid based on a signal obtained by the light that the light receiver receives, wherein the light projector and the light receiver in the foreign substance detector are disposed in areas that are not opposite to each other in areas in upper, lower, left, right, front and rear directions of the channel forming part.

公开(公告)号：US20220326133A1

公开(公告)日：2022-10-13

申请号：US17809365

申请日：2022-06-28

Applicant: Tokyo Electron Limited

Inventor： Masato Hayashi ,  Kohei Noguchi ,  Daisuke Kajiwara ,  Koudai Higashi

IPC: G01N15/06 ,  G01N21/51 ,  G01N21/53

Abstract: A foreign substance detection device includes a flow path unit through which a fluid is flown; an optical system configured to flatten a laser light from a laser source to be lengthened in a direction intersecting with a flow direction of the fluid; a laser light irradiation unit provided such that an optical path intersects with the flow direction and configured to irradiate the laser light into the flow path unit; a light detection unit which is provided on the optical path having passed through the flow path unit and includes light receiving elements arranged in a lengthwise direction of a transversal cross section of the optical path; a foreign substance detection unit configured to compare a signal level corresponding to intensity of light received by each light receiving element with a threshold value and configured to detect the foreign substances based on a comparison result.

公开(公告)号：US11002656B2

公开(公告)日：2021-05-11

申请号：US16746118

申请日：2020-01-17

Applicant: TOKYO ELECTRON LIMITED

Inventor： Masato Hayashi ,  Kohei Noguchi ,  Koudai Higashi ,  Makoto Ogata

IPC: B05D3/12 ,  G01N15/02 ,  H01L21/67 ,  G01N15/00

Abstract: According to one embodiment of the present disclosure, there is provided a substrate processing apparatus comprising: a supply passage through which fluid supplied to a substrate flows; and a foreign substance detector including a channel forming part forming a portion of the supply passage, a light projector irradiating light to the channel forming part, and a light receiver receiving light emitted from the channel forming part as a result of irradiating light to the channel forming part by the light projector, the foreign substance detector being configured to detect a foreign substance in the fluid based on a signal obtained by the light that the light receiver receives, wherein the light projector and the light receiver in the foreign substance detector are disposed in areas that are not opposite to each other in areas in upper, lower, left, right, front and rear directions of the channel forming part.

公开(公告)号：US11906414B2

公开(公告)日：2024-02-20

申请号：US17809365

申请日：2022-06-28

Applicant: Tokyo Electron Limited

Inventor： Masato Hayashi ,  Kohei Noguchi ,  Daisuke Kajiwara ,  Koudai Higashi

IPC: G01N15/06 ,  G01N21/51 ,  G01N21/53

CPC classification number: G01N15/06 ,  G01N21/51 ,  G01N21/53 ,  G01N2015/0687 ,  G01N2015/0693

Abstract: A foreign substance detection device includes a flow path unit through which a fluid is flown; an optical system configured to flatten a laser light from a laser source to be lengthened in a direction intersecting with a flow direction of the fluid; a laser light irradiation unit provided such that an optical path intersects with the flow direction and configured to irradiate the laser light into the flow path unit; a light detection unit which is provided on the optical path having passed through the flow path unit and includes light receiving elements arranged in a lengthwise direction of a transversal cross section of the optical path; a foreign substance detection unit configured to compare a signal level corresponding to intensity of light received by each light receiving element with a threshold value and configured to detect the foreign substances based on a comparison result.

公开(公告)号：US11879839B2

公开(公告)日：2024-01-23

申请号：US17386850

申请日：2021-07-28

Applicant: Tokyo Electron Limited

Inventor： Koudai Higashi ,  Masato Hayashi ,  Kohei Noguchi

IPC: G01N21/39 ,  G01N21/85

CPC classification number: G01N21/39 ,  G01N21/85 ,  G01N2021/392

Abstract: A substrate processing apparatus includes a supply channel through which a liquid to be supplied to a substrate flows; and a foreign substance detecting unit configured to detect a foreign substance in the liquid based on a signal obtained when light, which is near-infrared light, is radiated toward a flow path forming unit constituting a part of the supply channel by a light projector so that light is emitted from the flow path forming unit and a light receiver receives the light emitted from the flow path forming unit.

公开(公告)号：US20210190661A1

公开(公告)日：2021-06-24

申请号：US16071122

申请日：2017-01-10

Applicant: Tokyo Electron Limited

Inventor： Masato Hayashi ,  Kohei Noguchi ,  Daisuke Kajiwara ,  Koudai Higashi

IPC: G01N15/06 ,  G01N21/53 ,  G01N21/51

Abstract: A foreign substance detection device includes a flow path unit through which a fluid is flown; an optical system configured to flatten a laser light from a laser source to be lengthened in a direction intersecting with a flow direction of the fluid; a laser light irradiation unit provided such that an optical path intersects with the flow direction and configured to irradiate the laser light into the flow path unit; a light detection unit which is provided on the optical path having passed through the flow path unit and includes light receiving elements arranged in a lengthwise direction of a transversal cross section of the optical path; a foreign substance detection unit configured to compare a signal level corresponding to intensity of light received by each light receiving element with a threshold value and configured to detect the foreign substance based on a comparison result.

公开(公告)号：US20220034802A1

公开(公告)日：2022-02-03

申请号：US17386850

申请日：2021-07-28

Applicant: Tokyo Electron Limited

Inventor： Koudai Higashi ,  Masato Hayashi ,  Kohei Noguchi

IPC: G01N21/39 ,  G01N21/85

Abstract: A substrate processing apparatus includes a supply channel through which a liquid to be supplied to a substrate flows; and a foreign substance detecting unit configured to detect a foreign substance in the liquid based on a signal obtained when light, which is near-infrared light, is radiated toward a flow path forming unit constituting a part of the supply channel by a light projector so that light is emitted from the flow path forming unit and a light receiver receives the light emitted from the flow path forming unit.

公开(公告)号：US11048016B2

公开(公告)日：2021-06-29

申请号：US16478908

申请日：2018-01-16

Applicant: Tokyo Electron Limited

Inventor： Masato Hayashi ,  Kohei Noguchi ,  Daisuke Kajiwara ,  Koudai Higashi

IPC: G01V8/12 ,  G01N15/06 ,  G01N15/00

Abstract: An apparatus includes flow path units 15A to 15K configured to form flow paths 17A to 17K through which a fluid supplied to a target object W is flown; a laser light irradiator 51 configured to irradiate a laser light into the flow path units such that an optical path intersects with a flow direction of the fluid in the flow path units; light receiving elements 45A and 45B provided at the optical path having passed through the flow path units; a detector 6 configured to detect the foreign substance in the fluid based on a signal from the light receiving elements; and a filter unit 57 provided at the optical path between the light receiving elements and the flow path units, and configured to block a Raman scattered light and allow a Rayleigh scattered light to be transmitted to the light receiving elements.