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公开(公告)号：US11906414B2
公开(公告)日：2024-02-20
申请号：US17809365
申请日：2022-06-28
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Kohei Noguchi , Daisuke Kajiwara , Koudai Higashi
CPC classification number: G01N15/06 , G01N21/51 , G01N21/53 , G01N2015/0687 , G01N2015/0693
Abstract: A foreign substance detection device includes a flow path unit through which a fluid is flown; an optical system configured to flatten a laser light from a laser source to be lengthened in a direction intersecting with a flow direction of the fluid; a laser light irradiation unit provided such that an optical path intersects with the flow direction and configured to irradiate the laser light into the flow path unit; a light detection unit which is provided on the optical path having passed through the flow path unit and includes light receiving elements arranged in a lengthwise direction of a transversal cross section of the optical path; a foreign substance detection unit configured to compare a signal level corresponding to intensity of light received by each light receiving element with a threshold value and configured to detect the foreign substances based on a comparison result.
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Patent Agency Ranking
公开(公告)号：US20210190661A1
公开(公告)日：2021-06-24
申请号：US16071122
申请日：2017-01-10
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Kohei Noguchi , Daisuke Kajiwara , Koudai Higashi
Abstract: A foreign substance detection device includes a flow path unit through which a fluid is flown; an optical system configured to flatten a laser light from a laser source to be lengthened in a direction intersecting with a flow direction of the fluid; a laser light irradiation unit provided such that an optical path intersects with the flow direction and configured to irradiate the laser light into the flow path unit; a light detection unit which is provided on the optical path having passed through the flow path unit and includes light receiving elements arranged in a lengthwise direction of a transversal cross section of the optical path; a foreign substance detection unit configured to compare a signal level corresponding to intensity of light received by each light receiving element with a threshold value and configured to detect the foreign substance based on a comparison result.
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公开(公告)号：US20230224559A1
公开(公告)日：2023-07-13
申请号：US18152887
申请日：2023-01-11
Applicant: Tokyo Electron Limited
Inventor： Daisuke Kajiwara , Tadashi Nishiyama , Hiroshi Tomita
CPC classification number: H04N23/13 , H04N23/56 , H04N23/45 , G06T7/0004 , G06T2207/10048 , G06T2207/10152 , G06T2207/10024 , G06T2207/20221 , G06T2207/30164 , G06T2207/30148
Abstract: A substrate inspection apparatus configured to inspect a substrate with an image obtained by imaging a surface of the substrate includes a holder 31 configured to hold the substrate; a first light source unit 51 configured to emit visible light to the substrate held by the holder 31; a second light source unit 52 configured to emit infrared light to the substrate held by the holder 31; a first imaging sensor configured to capture a visible light image of the surface of the substrate by receiving first reflected light emitted from the substrate as a result of radiating the visible light; and a second imaging sensor configured to capture an infrared light image of the surface of the substrate by receiving second reflected light emitted from the substrate as a result of radiating the infrared light.
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公开(公告)号：US20220326133A1
公开(公告)日：2022-10-13
申请号：US17809365
申请日：2022-06-28
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Kohei Noguchi , Daisuke Kajiwara , Koudai Higashi
Abstract: A foreign substance detection device includes a flow path unit through which a fluid is flown; an optical system configured to flatten a laser light from a laser source to be lengthened in a direction intersecting with a flow direction of the fluid; a laser light irradiation unit provided such that an optical path intersects with the flow direction and configured to irradiate the laser light into the flow path unit; a light detection unit which is provided on the optical path having passed through the flow path unit and includes light receiving elements arranged in a lengthwise direction of a transversal cross section of the optical path; a foreign substance detection unit configured to compare a signal level corresponding to intensity of light received by each light receiving element with a threshold value and configured to detect the foreign substances based on a comparison result.
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5.发明授权公开(公告)号：US11048016B2
公开(公告)日：2021-06-29
申请号：US16478908
申请日：2018-01-16
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Kohei Noguchi , Daisuke Kajiwara , Koudai Higashi
Abstract: An apparatus includes flow path units 15A to 15K configured to form flow paths 17A to 17K through which a fluid supplied to a target object W is flown; a laser light irradiator 51 configured to irradiate a laser light into the flow path units such that an optical path intersects with a flow direction of the fluid in the flow path units; light receiving elements 45A and 45B provided at the optical path having passed through the flow path units; a detector 6 configured to detect the foreign substance in the fluid based on a signal from the light receiving elements; and a filter unit 57 provided at the optical path between the light receiving elements and the flow path units, and configured to block a Raman scattered light and allow a Rayleigh scattered light to be transmitted to the light receiving elements.
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6.发明申请公开(公告)号：US20190383963A1
公开(公告)日：2019-12-19
申请号：US16478908
申请日：2018-01-16
Applicant: Tokyo Electron Limited
Inventor： Masato Hayashi , Kohei Noguchi , Daisuke Kajiwara , Koudai Higashi
Abstract: An apparatus includes flow path units 15A to 15K configured to form flow paths 17A to 17K through which a fluid supplied to a target object W is flown; a laser light irradiator 51 configured to irradiate a laser light into the flow path units such that an optical path intersects with a flow direction of the fluid in the flow path units; light receiving elements 45A and 45B provided at the optical path having passed through the flow path units; a detector 6 configured to detect the foreign substance in the fluid based on a signal from the light receiving elements; and a filter unit 57 provided at the optical path between the light receiving elements and the flow path units, and configured to block a Raman scattered light and allow a Rayleigh scattered light to be transmitted to the light receiving elements.
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