公开(公告)号：US20230366093A1

公开(公告)日：2023-11-16

申请号：US18221302

申请日：2023-07-12

Applicant: Xerox Corporation

Inventor： Yunda Wang ,  Sourobh Raychaudhuri ,  JengPing Lu ,  Eugene M. Chow ,  Julie A. Bert ,  David Biegelsen ,  George A. Gibson ,  Jamie Kalb

IPC: C23C16/50 ,  B81B3/00 ,  H01L23/00 ,  H01L21/67

CPC classification number: C23C16/50 ,  B81B3/0018 ,  H01L24/95 ,  H01L24/75 ,  H01L21/67271 ,  H01L21/67294 ,  H01L21/67282 ,  H01L2224/95115 ,  H01L2224/95145 ,  H01L2224/95144 ,  H01L2924/1434 ,  H01L2224/95001 ,  H01L2224/95101 ,  H01L2924/1461 ,  H01L2924/10253

Abstract: Disclosed herein are techniques for transferring particles in a pattern. In one implementation, a particle-transferring system includes a first substrate comprising a first surface configured to support a plurality of particles in a non-uniform pattern, and a particle transfer unit configured to remove the plurality of particles from the first surface in response to the plurality of particles being within a first gap. The system also includes a second substrate configured to remove the plurality of particles from the particle transfer unit and secure the plurality of particles to the second surface in response to the plurality of particles being within a second gap. The particle transfer unit is configured to transfer the plurality of particles and maintain the non-uniform pattern regardless of the positions of the plurality of particles, which are not predefined to fit features of the particle transfer unit.