Substrate bonded MEMS sensor
    12.
    发明授权
    Substrate bonded MEMS sensor 有权
    基板结合MEMS传感器

    公开(公告)号:US08207586B2

    公开(公告)日:2012-06-26

    申请号:US12560645

    申请日:2009-09-16

    IPC分类号: H01L29/84

    CPC分类号: B81B7/007 B81B2207/097

    摘要: A MEMS sensor includes a first substrate; a second substrate; a movable electrode portion and a fixed electrode portion which are arranged between the first substrate and the second substrate, wherein: conductive supporting portions of the movable electrode portion and the fixed electrode portion are, respectively, fixedly secured to a surface of the first substrate via a first insulating layer; a second insulating layer, a lead layer buried into the second insulating layer, and connection electrode portions that are electrically connected to the lead layer to be individually connected to the conductive supporting portions are provided on a surface of the second substrate; a metallic connection layer is formed on the surface of one of the respective conductive supporting portions; one of the respective connection electrode portions and the metallic connection layer are bonded together by eutectic bonding or diffusion bonding; and, at least each of the connection electrode portions has a thickness of about 4 μm or smaller.

    摘要翻译: MEMS传感器包括第一基板; 第二基板; 布置在所述第一基板和所述第二基板之间的可移动电极部分和固定电极部分,其中:所述可动电极部分和所述固定电极部分的导电支撑部分分别固定地固定到所述第一基板的表面, 第一绝缘层; 第二绝缘层,埋入第二绝缘层中的引线层和与导电层电连接以连接到导电支撑部分的连接电极部分设置在第二基板的表面上; 在各个导电支撑部分之一的表面上形成金属连接层; 各个连接电极部分和金属连接层中的一个通过共晶接合或扩散接合结合在一起; 并且至少每个连接电极部分具有约4μm或更小的厚度。

    Magnetic head having toroidal coil layer and manufacturing method thereof
    13.
    发明授权
    Magnetic head having toroidal coil layer and manufacturing method thereof 有权
    具有环形线圈层的磁头及其制造方法

    公开(公告)号:US07667927B2

    公开(公告)日:2010-02-23

    申请号:US11296192

    申请日:2005-12-06

    IPC分类号: G11B5/17

    摘要: First and second magnetic layers of a magnetic head face each other. A toroidal coil layer having upper and lower layer coil pieces (ULCP and LLCP) is wound around one of the magnetic layers. The ULCP extend from a first insulating layer by downward steps to a top of a second insulating layer which is widened at ends of the first insulating layer. Side ends of the first insulating layer extend parallel to a height direction. The ULCP are orthogonal to the side ends. Each of the LLCP is formed on a third insulating layer and has a straight region extending in the same direction as the upper layer coil pieces and a curved region curved toward a facing surface or in a height direction on one end in the track width direction. An end of each of the straight and curved region is connected to an ULCP.

    摘要翻译: 磁头的第一和第二磁性层彼此面对。 具有上层和下层线圈片(ULCP和LLCP)的环形线圈层缠绕在一个磁性层上。 ULCP通过向下的台阶从第一绝缘层延伸到在第一绝缘层的端部处被加宽的第二绝缘层的顶部。 第一绝缘层的侧端部平行于高度方向延伸。 ULCP与侧端正交。 每个LLCP形成在第三绝缘层上,并且具有沿与上层线圈片相同的方向延伸的直线区域和在轨道宽度方向上的一端上朝向相对面或高度方向弯曲的弯曲区域。 每个直线和弯曲区域的端部连接到ULCP。

    Magnetic head having toroidal coil layer and manufacturing method thereof
    14.
    发明申请
    Magnetic head having toroidal coil layer and manufacturing method thereof 有权
    具有环形线圈层的磁头及其制造方法

    公开(公告)号:US20060126221A1

    公开(公告)日:2006-06-15

    申请号:US11296192

    申请日:2005-12-06

    IPC分类号: G11B5/17

    摘要: First and second magnetic layers of a magnetic head face each other. A toroidal coil layer having upper and lower layer coil pieces (ULCP and LLCP) is wound around one of the magnetic layers. The ULCP extend from a first insulating layer by downward steps to a top of a second insulating layer which is widened at ends of the first insulating layer. Side ends of the first insulating layer extend parallel to a height direction. The ULCP are orthogonal to the side ends. Each of the LLCP is formed on a third insulating layer and has a straight region extending in the same direction as the upper layer coil pieces and a curved region curved toward a facing surface or in a height direction on one end in the track width direction. An end of each of the straight and curved region is connected to an ULCP.

    摘要翻译: 磁头的第一和第二磁性层彼此面对。 具有上层和下层线圈片(ULCP和LLCP)的环形线圈层缠绕在一个磁性层上。 ULCP通过向下的台阶从第一绝缘层延伸到在第一绝缘层的端部处被加宽的第二绝缘层的顶部。 第一绝缘层的侧端部平行于高度方向延伸。 ULCP与侧端正交。 每个LLCP形成在第三绝缘层上,并且具有沿与上层线圈片相同的方向延伸的直线区域和在轨道宽度方向上的一端上朝向相对面或高度方向弯曲的弯曲区域。 每个直线和弯曲区域的端部连接到ULCP。

    Thin film magnetic head substrate with lapping process monitors for read and write elements with common electrode for the read and write elements
    20.
    发明授权
    Thin film magnetic head substrate with lapping process monitors for read and write elements with common electrode for the read and write elements 有权
    薄膜磁头基板,具有研磨过程监视器,用于读和写元件,具有用于读取和写入元件的公共电极

    公开(公告)号:US07821744B2

    公开(公告)日:2010-10-26

    申请号:US11697979

    申请日:2007-04-09

    IPC分类号: G11B5/29 H04F31/00

    摘要: A thin film magnetic head substrate includes a plurality of head element portions having read elements and write elements in rows. Adjacent head element portions interpose a read monitor element and a write monitor element that are used as element resistance monitors for the read element and the write element when a lapping process is performed to form a medium-facing surface on the head element portion. A common electrode terminal is connected with the read monitor element and the write monitor element. A pair of individual electrode terminals are each connected to the read monitor element and the write monitor element, respectively.

    摘要翻译: 薄膜磁头基板包括具有行的读取元件和写入元件的多个头元件部分。 当执行研磨处理以在头元件部分上形成中等的表面时,相邻头元件部分插入用作读元件和写元件的元件电阻监视器的读监视元件和写监视元件。 公共电极端子与读取监视器元件和写入监视器元件连接。 一对单独的电极端子分别连接到读取监视器元件和写入监视器元件。