公开(公告)号：US06325573B1

公开(公告)日：2001-12-04

申请号：US09471216

申请日：1999-12-23

Applicant: Wolfgang Carmincke ,  Christian Davids ,  Andreas Ebert ,  Jürgen Hinzpeter ,  Werner Kölker ,  Wolfram Lämmerhirt ,  Ansgar Pleus ,  Meinhard Schadowski ,  Wolfgang Soltau ,  Gerhard Steffen

Inventor： Wolfgang Carmincke ,  Christian Davids ,  Andreas Ebert ,  Jürgen Hinzpeter ,  Werner Kölker ,  Wolfram Lämmerhirt ,  Ansgar Pleus ,  Meinhard Schadowski ,  Wolfgang Soltau ,  Gerhard Steffen

IPC: B26D112

CPC classification number: B23F23/1243 ,  Y10T82/2585 ,  Y10T407/1715 ,  Y10T407/1725 ,  Y10T407/19

Abstract: An arrangement comprising a bore-type hobbing cutter and a holding arbor wherein the bore of the hobbing cutter has ground cylindrical centering surfaces at its ends and the arbor has complementary seating surfaces and wherein the hobbing cutter is axially chucked on the holding arbor by means of axial chucking means, where a preferably sleeve-shaped cage is disposed between centering surfaces and has a thickness which is smaller than the radial distance between centering and seating surfaces, and has an outside diameter which is smaller than the inside diameter of centering surfaces, the cage supports, in a circumferential direction, at least a number of prechucking elements, which are preferably metallic and are in contact with the associated centering surface and the seating surface, and said diameter and the distance between the contacting points or contacting lines of prechucking members are slightly larger than the radial distance between centering and seating surfaces.

Abstract translation: 一种包括钻孔滚齿刀和保持柄的装置，其中滚齿刀具的孔在其端部具有磨削的圆柱形定心表面，并且心轴具有互补的就座表面，并且其中滚齿刀被轴向夹持在保持轴上，借助于 轴向夹紧装置，其中优选的套筒形保持架设置在定心表面之间，并且具有小于定中心和就座表面之间的径向距离的厚度，并且具有小于定心表面的内径的外径， 保持架在圆周方向上支撑至少多个预先夹紧元件，其优选地是金属的，并且与相关联的定心表面和就座表面接触，并且所述直径和预压接构件的接触点或接触线之间的距离 略大于定中心和座位表面之间的径向距离。

公开(公告)号：US5916368A

公开(公告)日：1999-06-29

申请号：US807680

申请日：1997-02-27

Applicant: Andreas Ebert

Inventor： Andreas Ebert

IPC: B05C11/08 ,  B05C11/10 ,  G03F7/16 ,  B05C21/00 ,  B05B11/00 ,  B23B5/22

CPC classification number: G03F7/162 ,  B05C11/08 ,  B05C11/1042 ,  Y10T279/11

Abstract: Disclosed is method and apparatus for distributing a chemical over the surface of a substrate. The method includes depositing the chemical on a portion of the surface of a substrate near the center of the substrate. The method further includes controlling the temperature of the surface of a substrate so that the viscosity of the chemical is calibrated to cause the chemical to be deposited on the surface of the substrate in a substantially uniform manner.

Abstract translation: 公开了用于在基板的表面上分配化学品的方法和装置。 该方法包括将化学品沉积在衬底的靠近衬底中心的一部分表面上。 该方法还包括控制衬底表面的温度，使得校准化学品的粘度以使化学品以基本上均匀的方式沉积在衬底的表面上。

公开(公告)号：US5840365A

公开(公告)日：1998-11-24

申请号：US797819

申请日：1997-02-07

Applicant: Andreas Ebert ,  Abdul Ghafar

Inventor： Andreas Ebert ,  Abdul Ghafar

IPC: B05C11/08 ,  G11B7/26 ,  B05D5/12

CPC classification number: B05C11/08 ,  G11B7/26

Abstract: Disclosed is a spinning chemical applicator for spin coating a work piece. The spinning chemical applicator includes a bowl having a base region and substantially curved walls. A chuck base having a chuck plate for holding the work piece, the chuck base and the chuck plate contained within an inner region of the bowl. A bowl covering lid being mounted on a top surface of the substantially curved walls. A plurality of upper venting holes being defined in the substantially curved walls, the plurality of upper venting holes defining a venting path to the inner region of the bowl. And plurality of venting drain holes defined in the substantially curved walls at an edge location that is substantially below each of the plurality of upper venting holes. The plurality of venting drain holes providing a venting and drain path for the inner region of the bowl.

Abstract translation: 公开了用于旋涂工件的纺丝化学施加器。 纺丝化学施加器包括具有基部区域和基本上弯曲的壁的碗。 具有用于保持工件的卡盘盘，卡盘基座和卡盘盘夹在碗的内部区域内的卡盘基座。 覆盖盖的碗安装在基本上弯曲的壁的顶表面上。 多个上通气孔限定在基本上弯曲的壁中，多个上通气孔限定到碗的内部区域的通气路径。 以及多个通气排放孔，其限定在基本上弯曲的壁中，在大致低于多个上排气孔中的每一个的边缘位置处。 多个通气排放孔为碗的内部区域提供通气和排放路径。