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    Thin film transistor array arrangement, organic light emitting display device having the same, and manufacturing method thereof
    22.
    发明申请
    Thin film transistor array arrangement, organic light emitting display device having the same, and manufacturing method thereof 有权
    薄膜晶体管阵列布置，其有机发光显示装置及其制造方法

    公开(公告)号：US20090278131A1

    公开(公告)日：2009-11-12

    申请号：US12385792

    申请日：2009-04-20

    申请人： Do-Hyun Kwon ,  Choong-Youl Im ,  Dae-Hyun No ,  Il-Jeong Lee ,  Cheol-Ho Yu

    发明人： Do-Hyun Kwon ,  Choong-Youl Im ,  Dae-Hyun No ,  Il-Jeong Lee ,  Cheol-Ho Yu

    IPC分类号： H01L33/00 ,  H01L21/28

    CPC分类号： H01L27/1255 ,  H01L27/1288 ,  H01L2227/323

    摘要： A thin film transistor (TFT) array arrangement, an organic light emitting display device that includes the TFT array arrangement and a method of making the TFT array arrangement and the organic light emitting display device. The method seeks to reduce the number of masks used in the making of the TFT array arrangement by employing half-tone masks that are followed by a two step etching process and by forming layers of the capacitor simultaneous with the formation of layers of the source, drain and pixel electrodes. As a result, individual layers of the capacitor are on the same level and are made of the same material as ones of the layers of the source, drain and pixel electrodes. The capacitor has three electrodes spaced apart by two separate dielectric layers to result in an increased capacity capacitor without increasing the size of the capacitor.

    摘要翻译： 薄膜晶体管（TFT）阵列布置，包括TFT阵列布置的有机发光显示装置和制造TFT阵列布置的方法和有机发光显示装置。 该方法通过采用半色调掩模来减少用于制造TFT阵列布置的掩模的数量，其后面是两步蚀刻工艺，并且通过在形成层的同时形成电容层， 漏极和像素电极。 结果，电容器的各个层位于同一水平上，并且由与源极，漏极和像素电极的层相同的材料制成。 电容器具有通过两个单独的电介质层隔开的三个电极，从而在不增加电容器尺寸的情况下产生增加的容量电容器。