公开(公告)号：US20050194303A1

公开(公告)日：2005-09-08

申请号：US10791396

申请日：2004-03-02

Applicant: Jeffry Sniegowski ,  Paul McWhorter ,  M. Steven Rodgers

Inventor： Jeffry Sniegowski ,  Paul McWhorter ,  M. Steven Rodgers

IPC: A61K9/22 ,  B01D63/00

CPC classification number: A61F9/00781

Abstract: Various embodiments of MEMS flow modules that both filter and regulate pressure are disclosed. One such MEMS flow module (58) has a tuning element (78) and a lower plate (70). A plurality of springs or spring-like structures (82) interconnect the tuning element (78) with the lower plate (70) in a manner that allows the tuning element (78) to move either toward or away from the lower plate (70), depending upon the pressure being exerted on the tuning element (78) by a flow through a lower flow port (74) on the lower plate (70). The tuning element (78) is disposed over this lower flow port (74) to induce a flow through the MEMS flow module (58) along a non-linear (geometrically) flow path. Preferably, a relatively small change in the pressure exerted by this flow on the tuning element (78) produces greater than a linear change in the flow rate out of the MEMS flow module (58).

Abstract translation: 公开了过滤和调节压力的MEMS流量模块的各种实施例。 一个这样的MEMS流量模块（58）具有调谐元件（78）和下板（70）。 多个弹簧或弹簧状结构（82）以使得调谐元件（78）朝向或远离下板（70）移动的方式将调谐元件（78）与下板（70）互连， 取决于通过下板（70）上的下流通口（74）的流动施加在调谐元件（78）上的压力。 调谐元件（78）设置在该下流动端口（74）上以引导沿着非线性（几何）流动路径流过MEMS流量模块（58）。 优选地，由该流量对调谐元件（78）施加的压力的相对小的变化产生大于MEMS流量模块（58）外的流速的线性变化。

公开(公告)号：US06649947B2

公开(公告)日：2003-11-18

申请号：US10098214

申请日：2002-03-18

Applicant: M. Steven Rodgers ,  Jeffry J. Sniegowski ,  Thomas W. Krygowski

Inventor： M. Steven Rodgers ,  Jeffry J. Sniegowski ,  Thomas W. Krygowski

IPC: H01L2714

CPC classification number: B81B5/00 ,  B81B2201/034 ,  Y10T74/19651

Abstract: A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 &mgr;m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.