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    Method for making a microstructure by surface micromachining
    3.
    发明授权
    Method for making a microstructure by surface micromachining 有权
    通过表面微加工制造微结构的方法

    公开(公告)号：US06756317B2

    公开(公告)日：2004-06-29

    申请号：US09840716

    申请日：2001-04-23

    Applicant: Jeffry J. Sniegowski ,  M. Steven Rodgers

    Inventor： Jeffry J. Sniegowski ,  M. Steven Rodgers

    IPC: H01L21302

    CPC classification number: H01L21/302 ,  B81C1/00547

    Abstract: Various methods for forming surface micromachined microstructures are disclosed. One aspect relates to executing surface micromachining operation to structurally reinforce at least one structural layer in a microstructure. Another aspect relates to executing the surface micromachining operation to form a plurality of at least generally laterally extending etch release channels within a sacrificial material to facilitate the release of the corresponding microstructure.

    Abstract translation: 公开了用于形成表面微加工微结构的各种方法。 一个方面涉及执行表面微加工操作以结构地加强微结构中的至少一个结构层。 另一方面涉及执行表面微加工操作以在牺牲材料内形成多个至少大致横向延伸的蚀刻释放通道，以便于释放相应的微结构。

    Implant having MEMS Flow Module with Movable, Flow-Controlling Baffle
    4.
    发明申请
    Implant having MEMS Flow Module with Movable, Flow-Controlling Baffle 审中-公开
    具有可移动，流量控制挡板的MEMS流量模块的植入物

    公开(公告)号：US20080221500A1

    公开(公告)日：2008-09-11

    申请号：US12021420

    申请日：2008-01-29

    Applicant: Jeffry J. Sniegowski ,  Paul J. McWhorter ,  M. Steven Rodgers

    Inventor： Jeffry J. Sniegowski ,  Paul J. McWhorter ,  M. Steven Rodgers

    IPC: A61M5/00

    CPC classification number: A61F9/00781

    Abstract: Various embodiments of MEMS flow modules that may be disposed in a flow path (296) of a shunt (290) are disclosed, where the shunt (290) may be used to control a flow out of an anterior chamber (284) of an eye (266). One such MEMS flow module (58) has a tuning element (78) and a lower plate (70). A plurality of springs or spring-like structures (82) interconnect the tuning element (78) with the lower plate (70) in a manner that allows the tuning element (78) to move either toward or away from the lower plate (70), depending upon the pressure being exerted on the tuning element (78) by a flow through a lower flow port (74) on the lower plate (70). The tuning element (78) is disposed over this lower flow port (74) to induce a flow through the MEMS flow module (58) along a non-linear (geometrically) flow path.

    Abstract translation: 公开了可以设置在分流器（290）的流动路径（296）中的MEMS流动模块的各种实施例，其中分流器（290）可用于控制从眼睛的前房（284）流出 （266）。 一个这样的MEMS流量模块（58）具有调谐元件（78）和下板（70）。 多个弹簧或弹簧状结构（82）以使得调谐元件（78）朝向或远离下板（70）移动的方式将调谐元件（78）与下板（70）互连， 取决于通过下板（70）上的下流通口（74）的流动施加在调谐元件（78）上的压力。 调谐元件（78）设置在该下流动端口（74）上以引导沿着非线性（几何）流动路径流过MEMS流量模块（58）。

    Implant having MEMS flow module with movable, flow-controlling baffle
    6.
    发明授权
    Implant having MEMS flow module with movable, flow-controlling baffle 失效
    植入物具有可移动，流动控制挡板的MEMS流量模块

    公开(公告)号：US07364564B2

    公开(公告)日：2008-04-29

    申请号：US11023289

    申请日：2004-12-24

    Applicant: Jeffry J. Sniegowski ,  Paul J. McWhorter ,  M. Steven Rodgers

    Inventor： Jeffry J. Sniegowski ,  Paul J. McWhorter ,  M. Steven Rodgers

    IPC: A61M1/36 ,  C02F1/44

    CPC classification number: B82Y30/00 ,  B33Y80/00

    Abstract: Various embodiments of MEMS flow modules that may be disposed in a flow path (296) of a shunt (290) are disclosed, where the shunt (290) may be used to control a flow out of an anterior chamber (284) of an eye (266). One such MEMS flow module (58) has a tuning element (78) and a lower plate (70). A plurality of springs or spring-like structures (82) interconnect the tuning element (78) with the lower plate (70) in a manner that allows the tuning element (78) to move either toward or away from the lower plate (70), depending upon the pressure being exerted on the tuning element (78) by a flow through a lower flow port (74) on the lower plate (70). The tuning element (78) is disposed over this lower flow port (74) to induce a flow through the MEMS flow module (58) along a non-linear (geometrically) flow path.

    Abstract translation: 公开了可以设置在分流器（290）的流动路径（296）中的MEMS流动模块的各种实施例，其中分流器（290）可用于控制从眼睛的前房（284）流出 （266）。 一个这样的MEMS流量模块（58）具有调谐元件（78）和下板（70）。 多个弹簧或弹簧状结构（82）以使得调谐元件（78）朝向或远离下板（70）移动的方式将调谐元件（78）与下板（70）互连， 取决于通过下板（70）上的下流通口（74）的流动施加在调谐元件（78）上的压力。 调谐元件（78）设置在该下流动端口（74）上以引导沿着非线性（几何）流动路径流过MEMS流量模块（58）。

    MEMS filter module
    7.
    发明授权
    MEMS filter module 失效
    MEMS滤波模块

    公开(公告)号：US07226540B2

    公开(公告)日：2007-06-05

    申请号：US10911424

    申请日：2004-08-04

    Applicant: M. Steven Rodgers ,  Jeffry J. Sniegowski ,  Paul J. McWhorter

    Inventor： M. Steven Rodgers ,  Jeffry J. Sniegowski ,  Paul J. McWhorter

    IPC: B01D63/08 ,  A61M5/165 ,  A61M37/00 ,  B01D63/00

    CPC classification number: B01D61/18 ,  B01D63/081 ,  B01D63/088 ,  B01D67/0062 ,  B01D2313/08 ,  B01D2313/10 ,  B01D2313/12 ,  B01D2313/14 ,  B33Y80/00

    Abstract: Various MEMS filter elements or modules are disclosed. One such MEMS filter module (34) includes a first film (70) and a second film (46) that are spaced and interconnected by a plurality of supports (78). A plurality of first flow ports (74) extend through the first film (70), and a plurality of second flow ports (50) extend through the second film (46). A plurality of annular filter walls (54) extend from the second film (46) toward the first film (70), and are separated therefrom by a filter trap gap (58). A filter trap chamber (62) is disposed on each side of each filter trap gap (58). Therefore, fluid will flow into one filter trap chamber (62), through a filter trap gap (58), and into another filter trap chamber (62), whether the flow is introduced into the filter module (34) through the first flow ports (74) or the second flow ports (50).

    Abstract translation: 公开了各种MEMS滤波器元件或模块。 一个这样的MEMS滤波器模块（34）包括由多个支撑件（78）隔开并互连的第一膜（70）和第二膜（46）。 多个第一流动端口（74）延伸穿过第一膜（70），并且多个第二流动端口（50）延伸穿过第二膜（46）。 多个环形过滤器壁（54）从第二膜（46）朝向第一膜（70）延伸，并通过过滤器捕集器间隙（58）与其隔开。 过滤器捕集器室（62）设置在每个过滤器捕集器间隙（58）的每一侧。 因此，流体将通过过滤器捕集器间隙（58）流入一个过滤器收集室（62）并进入另一个过滤器收集室（62），无论流体是否通过第一流动端口 （74）或第二流动口（50）。

    Surface micromachined optical system with reinforced mirror microstructure
    8.
    发明授权
    Surface micromachined optical system with reinforced mirror microstructure 有权
    具有加强镜面微观结构的表面微加工光学系统

    公开(公告)号：US06791730B2

    公开(公告)日：2004-09-14

    申请号：US10409416

    申请日：2003-04-08

    Applicant: Jeffry J. Sniegowski ,  M. Steven Rodgers

    Inventor： Jeffry J. Sniegowski ,  M. Steven Rodgers

    IPC: G02B2600

    CPC classification number: G02B26/00 ,  B81B3/007 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/053 ,  B81B2203/058 ,  G02B26/0833

    Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

    Abstract translation: 公开了用于表面微加工光学系统的加强镜微结构的各种实施例。 公开了多层和结构加强的镜面微观结构，包括两层和三层微结构。 这些多层反射镜微结构中的相邻结构层可以通过多个垂直设置的柱，或多个至少大致横向延伸的轨道或肋或其某些组合在结构上加强和互连。 还公开了具有从其下表面悬臂的结构增强组件的单层反射镜微结构的各种实施例。

    Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement
    10.
    发明授权
    Very compact, high-stability electrostatic actuator featuring contact-free self-limiting displacement 有权
    非常紧凑，高稳定性的静电执行器，具有无接触自限位移

    公开(公告)号：US06507138B1

    公开(公告)日：2003-01-14

    申请号：US09615008

    申请日：2000-07-11

    Applicant: M. Steven Rodgers ,  Samuel L. Miller

    Inventor： M. Steven Rodgers ,  Samuel L. Miller

    IPC: H02N100

    CPC classification number: G01P15/125 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2203/051 ,  G01P2015/0814 ,  H02N1/008

    Abstract: A compact electrostatic actuator is disclosed for microelectromechanical (MEM) applications. The actuator utilizes stationary and moveable electrodes, with the stationary electrodes being formed on a substrate and the moveable electrodes being supported above the substrate on a frame. The frame provides a rigid structure which allows the electrostatic actuator to be operated at high voltages (up to 190 Volts) to provide a relatively large actuation force compared to conventional electrostatic comb actuators which are much larger in size. For operation at its maximum displacement, the electrostatic actuator is relatively insensitive to the exact value of the applied voltage and provides a self-limiting displacement.

    Abstract translation: 公开了用于微机电（MEM）应用的小型静电致动器。 致动器利用固定和可移动电极，其中固定电极形成在基板上，并且可移动电极被支撑在框架上的基板上。 框架提供刚性结构，其允许静电致动器在高电压（高达190伏特）下操作，以提供比现有尺寸更大的传统静电梳状致动器相对较大的致动力。 为了在其最大位移操作，静电致动器对施加电压的精确值相对不敏感，并提供自限位移。

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