MEMS ACTUATORS AND SWITCHES
    21.
    发明申请
    MEMS ACTUATORS AND SWITCHES 失效
    MEMS执行器和开关

    公开(公告)号:US20080223699A1

    公开(公告)日:2008-09-18

    申请号:US11687572

    申请日:2007-03-16

    CPC classification number: H01H61/04 H01H2061/008

    Abstract: Microelectromechanical (MEMS) structures and switches employing movable actuators wherein particular ones of which move perpendicular to an underlying substrate and particular others move in a direction substantially parallel to the underlying substrate thereby providing more positive actuation.

    Abstract translation: 使用可移动致动器的微机电(MEMS)结构和开关,其中特定的其中一些垂直于下面的衬底移动,特别是其它致动器在基本上平行于下面的衬底的方向上移动,从而提供更多的正致动。

    INTEGRATED MEMS PACKAGING
    22.
    发明申请
    INTEGRATED MEMS PACKAGING 审中-公开
    集成MEMS封装

    公开(公告)号:US20080067652A1

    公开(公告)日:2008-03-20

    申请号:US11532676

    申请日:2006-09-18

    CPC classification number: B81C1/00269 B81C2203/019

    Abstract: A micro-electromechanical systems (MEMS) package that includes a substrate onto which is disposed or otherwise formed an active MEMS device, a first barrier wall for preventing sealant from contaminating the MEMS device, a second barrier wall for preventing sealant from contaminating unintended areas of the substrate, and a cap for hermetically sealing the MEMS package with a particular gas or mixtures thereof which enhance the MEMS performance.

    Abstract translation: 一种微机电系统(MEMS)封装,其包括其上设置或以其他方式形成有源MEMS器件的基板,用于防止密封剂污染MEMS器件的第一阻挡壁,用于防止密封剂污染非预期区域的第二阻挡壁 衬底和用于用增强MEMS性能的特定气体或其混合物气密密封MEMS封装的盖。

    MEMS actuators with even stress distribution
    25.
    发明申请
    MEMS actuators with even stress distribution 审中-公开
    具有均匀应力分布的MEMS致动器

    公开(公告)号:US20090033454A1

    公开(公告)日:2009-02-05

    申请号:US11882457

    申请日:2007-08-01

    CPC classification number: B81B3/0072 B81B2201/014 B81B2203/051 H01H2061/008

    Abstract: The micro-electromechanical (MEMS) switch comprises a first double-sided cantilever MEMS actuator attached to a substrate and movable in two opposite directions, and a second cantilever MEMS actuator attached to the substrate. In use, the first MEMS actuator is moved in either directions to distribute the stress more uniformly, thereby reducing the mechanical creep and improving its reliability as well as its operation life.

    Abstract translation: 微机电(MEMS)开关包括附接到基板并可在两个相反方向上移动的第一双边悬臂MEMS致动器和附接到基板的第二悬臂MEMS致动器。 在使用中,第一MEMS致动器在任一方向上移动以更均匀地分布应力,从而减少机械蠕变并提高其可靠性以及其使用寿命。

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