公开(公告)号：US12071338B2

公开(公告)日：2024-08-27

申请号：US17459073

申请日：2021-08-27

申请人： Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.

发明人： Christian Drabe ,  Bert Kaiser

IPC分类号： G02B26/08 ,  B81B3/00

CPC分类号： B81B3/0051 ,  G02B26/0833 ,  G02B26/0841 ,  B81B2201/033 ,  B81B2201/035 ,  B81B2201/037 ,  B81B2201/042 ,  B81B2203/0154 ,  B81B2203/04 ,  B81B2203/051 ,  B81B2203/053 ,  B81B2203/058

摘要： A micromechanical structure has a first micromechanical element, a second micromechanical element and a torsion spring arrangement having a first torsion spring element, having a first center line, mechanically connected to the first micromechanical element at a first contact region and to the second micromechanical element at a second contact region, and having a second torsion spring element, having a second center line, mechanically connected to the first micromechanical member at a third contact region and to the second micromechanical member at a fourth contact region in order to connect the first micromechanical member and the second micromechanical member to be movable relative to each other. A distance between the first and second center lines, starting from the first and third contact regions toward the second and fourth contact regions, decreases in a first portion and increases in a second portion. In a rest position of the micromechanical structure, the first and second torsion spring elements are arranged without contact to each other.

公开(公告)号：US10050155B2

公开(公告)日：2018-08-14

申请号：US15005783

申请日：2016-01-25

申请人： Fairchild Semiconductor Corporation

发明人： Cenk Acar

IPC分类号： G01P21/02 ,  H01L29/84 ,  G01C19/5755 ,  G01P15/125 ,  G01P15/18 ,  B81B7/04 ,  G01P15/08

CPC分类号： H01L29/84 ,  B81B7/04 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/051 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2203/056 ,  B81B2203/058 ,  B81B2207/094 ,  G01C19/5755 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0848

摘要： This document discusses, among other things, a cap wafer and a via wafer configured to encapsulate a single proof-mass 3-axis gyroscope formed in an x-y plane of a device layer. The single proof-mass 3-axis gyroscope can include a main proof-mass section suspended about a single, central anchor, the main proof-mass section including a radial portion extending outward towards an edge of the 3-axis gyroscope sensor, a central suspension system configured to suspend the 3-axis gyroscope from the single, central anchor, and a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion, wherein the drive electrode and the central suspension system are configured to oscillate the 3-axis gyroscope about a z-axis normal to the x-y plane at a drive frequency.

公开(公告)号：US20170343579A1

公开(公告)日：2017-11-30

申请号：US15541389

申请日：2016-01-04

申请人： NORTHROP GRUMMAN LITEF GMBH

发明人： PETER LEINFELDER

IPC分类号： G01P15/125 ,  G01P15/08

CPC分类号： G01P15/125 ,  B81B2201/0235 ,  B81B2203/051 ,  G01P15/0802 ,  G01P15/131 ,  G01P21/00 ,  G01P2015/0814

摘要： The invention relates to an acceleration sensor (400) comprising an excitation mass (420) having excitation electrodes (430), which excitation mass is movably mounted over a substrate (410) along a movement axis (x) and comprising detection electrodes (440) which are permanently connected to the substrate (410) and allocated to the excitation electrodes (430). A first group of pairings (450) of excitation electrode (430) and allocated detection electrodes (440) is suitable for deflecting the excitation mass (420) along the movement axis (x) in a first direction (460). A second group of pairings (450) of excitation electrodes (430) and allocated detection electrodes (440) is suitable for deflecting the excitation mass (420) along the movement axis (x) in a second direction (465), which is opposite the first direction (460). The number of pairings (450) in the first group is equal to the number of pairings (450) in the second group. The averaged distance between excitation electrodes (430) and detection electrodes (440) of the pairings (450) of the first group corresponds to the averaged distance between excitation electrodes (430) and detection electrodes (440) of the pairings (450) of the second group.

公开(公告)号：US20170278646A1

公开(公告)日：2017-09-28

申请号：US15512285

申请日：2015-07-10

申请人： Sony Corporation

发明人： Shinya MORITA

IPC分类号： H01H1/00

CPC分类号： H01H1/0036 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/051 ,  H01H59/0009 ,  H01H2001/0042 ,  H01H2001/0063 ,  H01H2001/0078

摘要： [Object] To be capable of promptly performing a switching operation of a switch.[Solving Means] In a switching apparatus according to an embodiment of the present technology, a movable electrode includes a first movable electrode piece, a second movable electrode piece, and a movable contact point. A first fixed electrode includes first and second fixed electrode pieces, the first and second fixed electrode pieces facing each other with the first movable electrode piece disposed between the first and second fixed electrode pieces, the first fixed electrode piece facing the first movable electrode piece with a gap narrower than a gap between the second fixed electrode piece and the first movable electrode piece. A second fixed electrode includes third and fourth fixed electrode pieces, the third and fourth fixed electrode pieces facing each other with the second movable electrode piece disposed between the third and fourth fixed electrode pieces, the third fixed electrode piece facing the second movable electrode piece with a gap narrower than a gap between the fourth fixed electrode piece and the second movable electrode piece. A first fixed contact point is in contact with the movable contact point, the movable contact point moving in a first direction by an electrostatic attractive force between the movable electrode and the first fixed electrode. A second fixed contact point is in contact with the movable contact point, the movable contact point moving in a second direction opposite to the first direction by an electrostatic attractive force between the movable electrode and the second fixed electrode.

公开(公告)号：US20170183217A1

公开(公告)日：2017-06-29

申请号：US15300212

申请日：2015-03-24

申请人： Agiltron, Inc.

发明人： Luzhong Yin ,  Jing Zhao ,  Guanghai Jin

IPC分类号： B81B3/00 ,  G02B26/02 ,  H02N10/00

CPC分类号： B81B3/0037 ,  B81B3/0024 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81B2203/0384 ,  B81B2203/051 ,  G02B26/02 ,  G02B26/023 ,  G02B26/04 ,  H02N2/043 ,  H02N10/00

摘要： The present disclosure provides a displacement amplification structure and a method for controlling displacement. In one aspect, the displacement amplification structure of the present disclosure includes a first beam and a second beam substantially parallel to the first beam, an end of the first beam coupled to a fixture site, and an end of the second beam coupled to a motion actuator; and a motion shutter coupled to an opposing end of the first and second beams. In response to a displacement of the motion actuator along an axis direction of the second beam, the motion shutter displaces a distance along a transversal direction substantially perpendicular to the axis direction.

公开(公告)号：US20170038209A1

公开(公告)日：2017-02-09

申请号：US14460795

申请日：2014-08-15

申请人： PHILIP H. BOWLES ,  STEPHEN R. HOOPER

发明人： PHILIP H. BOWLES ,  STEPHEN R. HOOPER

IPC分类号： G01C19/5733 ,  G01P15/18 ,  G01P15/08 ,  G01P15/14 ,  B81B7/00 ,  B81C3/00

CPC分类号： G01P15/18 ,  B81B7/0074 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/0315 ,  B81B2203/051 ,  B81B2203/053 ,  B81C1/00269 ,  B81C3/001 ,  B81C2203/0109 ,  B81C2203/0118 ,  B81C2203/035 ,  G01C19/5783 ,  G01P15/0802

摘要： Methods for fabricating microelectronic packages and microelectronic packages having split gyroscope structures are provided. In one embodiment, the microelectronic package includes a first Microelectromechanical Systems (MEMS) die having a first MEMS gyroscope structure thereon. The microelectronic package further includes a second MEMS die, which has a second MEMS gyroscope structure thereon and which is positioned in a stacked relationship with the first MEMS die. The first and second MEMS gyroscope structures overlap as taken along a first axis orthogonal to a principal axis of the first MEMS die.

摘要翻译： 提供了具有分裂陀螺仪结构的微电子封装和微电子封装的制造方法。 在一个实施例中，微电子封装包括其上具有第一MEMS陀螺仪结构的第一微机电系统（MEMS）管芯。 微电子封装还包括第二MEMS管芯，其上具有第二MEMS陀螺仪结构，并且与第一MEMS管芯成堆叠关系。 第一和第二MEMS陀螺仪结构沿着与第一MEMS管芯的主轴正交的第一轴线重叠。

公开(公告)号：US20160204716A1

公开(公告)日：2016-07-14

申请号：US14910622

申请日：2014-07-30

申请人： NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY ,  OMRON CORPORATION ,  KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO

发明人： Masato SUZUKI ,  Akito MORI ,  Gen HASHIGUCHI ,  Tatsuhiko SUGIYAMA ,  Hiroshi IMAMOTO ,  Masatoshi OBA ,  Hiroyuki MITSUYA ,  Hisayuki ASHIZAWA ,  Kazunori ISHIBASHI

IPC分类号： H02N1/00 ,  F16K31/02 ,  G02B26/02 ,  B81B3/00 ,  H01H59/00

CPC分类号： H02N1/008 ,  B81B3/0054 ,  B81B2201/018 ,  B81B2201/0292 ,  B81B2201/033 ,  B81B2201/036 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/0163 ,  B81B2203/051 ,  F16K31/02 ,  G02B26/02 ,  H01H59/00

摘要： An actuator includes: an electrostatic actuation mechanism including a stationary electrode and a movable electrode; a first movable part driven by the electrostatic actuation mechanism; a first elastic support part that elastically supports the first movable part; an electret formed in at least one of the stationary electrode and the movable electrode; and a drive control unit that controls application of voltage to the electrostatic actuation mechanism. In the actuator a plurality of stable states are set in which the first movable part is positioned at a stable position at which an electrostatic force generated by the electret matches with an elastic force exerted by the first elastic support part or at a stable position near such stable position. By applying a voltage to the electrostatic actuation mechanism, the first movable part may be displaced from any stable position to another stable position.

摘要翻译： 致动器包括：静电致动机构，包括固定电极和可动电极; 由静电致动机构驱动的第一可动部; 第一弹性支撑部，其弹性地支撑所述第一可动部; 在所述固定电极和所述可动电极中的至少一个上形成的驻极体; 以及驱动控制单元，其控制对静电致动机构施加电压。 在致动器中，设置多个稳定状态，其中第一可移动部件位于由驻极体产生的静电力与由第一弹性支撑部分施加的弹力相匹配的稳定位置处，或者靠近这样的稳定​​位置 稳定的位置。 通过向静电致动机构施加电压，第一可动部件可以从任何稳定位置移动到另一个稳定位置。

公开(公告)号：US20160195893A1

公开(公告)日：2016-07-07

申请号：US14978965

申请日：2015-12-22

申请人： Commissariat A L'Energie Atomique et aux Energies Alternatives

发明人： Thierry HILT

IPC分类号： G05G11/00 ,  H01L41/08

CPC分类号： G05G11/00 ,  B81B3/0051 ,  B81B2201/032 ,  B81B2201/037 ,  B81B2203/051 ,  H01H1/0036 ,  H01H2001/0078 ,  H01L41/08

摘要： An actuator comprising two devices each comprising an out-of-plane deformable element, said deformable element comprising a first fixed end anchored on a substrate and a second free end relative to the substrate, said device also comprising means to guide the second free end in in-plane translation along a first direction, the first deformable element being capable of deforming out-of-plane through application of a stimulus so that the second free end draws close to the first fixed end following in-plane translational movement. The actuator also comprises an element mobile in rotation about an axis orthogonal to the plane and mechanically linked to the free ends of the deformable elements, and a translationally mobile element mechanically linked to the rotationally mobile element.

摘要翻译： 一种致动器，包括两个装置，每个装置均包括一个面外可变形元件，所述可变形元件包括锚定在基板上的第一固定端和相对于基板的第二自由端，所述装置还包括将第二自由端引导到 沿着第一方向的平面内平移，第一可变形元件能够通过施加刺激而在平面外变形，使得第二自由端在平面内平移运动之后接近第一固定端。 所述致动器还包括可围绕垂直于所述平面的轴线旋转的元件，并机械地连接到所述可变形元件的自由端，以及与所述旋转移动元件机械连接的平移移动元件。

公开(公告)号：US09246018B2

公开(公告)日：2016-01-26

申请号：US13821842

申请日：2011-09-18

申请人： Cenk Acar

发明人： Cenk Acar

IPC分类号： G01P21/02 ,  H01L29/84 ,  G01C19/5755 ,  G01P15/125 ,  G01P15/18 ,  G01P15/08

CPC分类号： H01L29/84 ,  B81B7/04 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2203/051 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2203/056 ,  B81B2203/058 ,  B81B2207/094 ,  G01C19/5755 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0848

摘要： This document discusses, among other things, a cap wafer and a via wafer configured to encapsulate a single proof-mass 3-axis gyroscope formed in an x-y plane of a device layer. The single proof-mass 3-axis gyroscope can include a main proof-mass section suspended about a single, central anchor, the main proof-mass section including a radial portion extending outward towards an edge of the 3-axis gyroscope sensor, a central suspension system configured to suspend the 3-axis gyroscope from the single, central anchor, and a drive electrode including a moving portion and a stationary portion, the moving portion coupled to the radial portion, wherein the drive electrode and the central suspension system are configured to oscillate the 3-axis gyroscope about a z-axis normal to the x-y plane at a drive frequency.

摘要翻译： 本文件尤其讨论了盖晶片和通孔晶片，其被配置为封装形成在器件层的x-y平面中的单个校准质量3轴陀螺仪。 单个质量3轴陀螺仪可以包括悬挂在单个中心锚杆上的主要质量部分，主要质量部分包括朝向3轴陀螺仪传感器的边缘向外延伸的径向部分，中心 悬架系统，其构造成将三轴陀螺仪从单个中心锚固件悬挂起来;以及驱动电极，其包括移动部分和固定部分，所述移动部分联接到所述径向部分，其中所述驱动电极和所述中央悬挂系统被配置 以驱动频率使三轴陀螺仪围绕垂直于xy平面的z轴摆动。

公开(公告)号：US09090455B2

公开(公告)日：2015-07-28

申请号：US14450870

申请日：2014-08-04

申请人： FREESCALE SEMICONDUCTOR, INC.

发明人： Mark E. Schlarmann ,  Yizhen Lin

IPC分类号： B81B7/00 ,  B81C1/00 ,  G01L9/00 ,  G01L19/14 ,  B81B3/00

CPC分类号： B81B7/0048 ,  B81B3/0021 ,  B81B3/0072 ,  B81B7/0058 ,  B81B2203/0118 ,  B81B2203/0127 ,  B81B2203/051 ,  B81B2207/115 ,  B81C1/00309 ,  G01L9/0042 ,  G01L9/0052 ,  G01L19/147 ,  H01L2224/48137

摘要： An assembly (20) includes a MEMS die (22) having a pressure transducer device (40) formed on a substrate (44) and a cap layer (38). A packaging process (74) entails forming the device (40) on the substrate, creating an aperture (70) through a back side (58) of the substrate underlying a diaphragm (46) of the device (40), and coupling a cap layer (38) to the front side of the substrate overlying the device. A trench (54) is produced extending through both the cap layer and the substrate, and the trench surrounds a cantilevered platform (48) at which the diaphragm resides. The MEMS die is suspended above a substrate (26) so that a clearance space (60) is formed between the cantilevered platform and the substrate. The diaphragm is exposed to an external environment (68) via the aperture, the clearance space, and an external port.

摘要翻译： 组件（20）包括具有形成在基板（44）上的压力换能器装置（40）和盖层（38）的MEMS管芯（22）。 包装工艺（74）需要在基板上形成装置（40），通过装置（40）的隔膜（46）下面的基板的后侧（58）产生孔（70），并且将帽 层（38）到覆盖该器件的衬底的前侧。 产生延伸穿过盖层和衬底的沟槽（54），并且沟槽围绕隔膜所在的悬臂平台（48）。 MEMS模具悬挂在基板（26）上方，使得在悬臂平台和基板之间形成间隙空间（60）。 隔膜经由孔，间隙空间和外部端口暴露于外部环境（68）。