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21.发明授权公开(公告)号：US11556044B2
公开(公告)日：2023-01-17
申请号：US17485836
申请日：2021-09-27
Applicant: ASML Netherlands B.V.
Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.
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Patent Agency Ranking
22.发明授权公开(公告)号：US11287747B2
公开(公告)日：2022-03-29
申请号：US16983264
申请日：2020-08-03
Applicant: ASML NETHERLANDS B.V.
Inventor： Andrey Nikipelov , Patrick Sebastian Uebel , Amir Abdolvand , Sebastian Thomas Bauerschmidt , Peter Maximilian Götz , Natallia Eduardauna Uzunbajakava
IPC: G03F7/20
Abstract: A system and method for providing a radiation source is disclosed. In one arrangement, the radiation source includes a gas cell having a window, an optical fiber that is hollow and has an axial direction, an end thereof being enclosed within the gas cell and optically coupled to the window via an optical path, and a surface, disposed around the end of the optical fiber, and extending past the end of the optical fiber in the axial direction towards the window so as to limit one or more selected from: the exchange of gas between the optical path and the remainder of the gas cell, ingress of plasma towards or into the optical fiber, and/or radical flux towards etch-susceptible surfaces.
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公开(公告)号：US11237486B2
公开(公告)日：2022-02-01
申请号：US16932184
申请日：2020-07-17
Applicant: ASML NETHERLANDS B.V.
Inventor： Patrick Sebastian Uebel , Sebastian Thomas Bauerschmidt , Yongfeng Ni
Abstract: A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.
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24.发明授权公开(公告)号：US11163208B2
公开(公告)日：2021-11-02
申请号：US16808141
申请日：2020-03-03
Applicant: ASML Netherlands B.V.
Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.
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公开(公告)号：US11099319B2
公开(公告)日：2021-08-24
申请号：US16838400
申请日：2020-04-02
Applicant: ASML Netherlands B.V.
Abstract: An optical fiber, an apparatus for receiving input radiation and broadening a frequency range, a radiation source, a metrology arrangement and a lithographic apparatus are provided. The optical fiber comprises a hollow core, a cladding portion and a support portion. The cladding portion surrounds the hollow core and comprises a plurality of anti-resonance elements for guiding radiation through the hollow core. The support portion surrounds and supports the cladding portion and comprises an inner support portion, an outer support portion and a deformable connecting portion that connects the inner support portion to the outer support portion.
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26.发明授权公开(公告)号：US10969542B2
公开(公告)日：2021-04-06
申请号：US16925586
申请日：2020-07-10
Applicant: ASML NETHERLANDS B.V.
Inventor： Hendrik Sabert , Patrick Sebastian Uebel
IPC: G02B6/02 , G01K11/3206
Abstract: A system and method for providing a radiation source. In one arrangement, the radiation source includes an optical fiber that is hollow, and has an axial direction, a gas that fills the hollow of the optical fiber, and a plurality of temperature setting devices disposed at respective positions along the axial direction of the optical fiber, wherein the temperature setting devices are configured to control the temperature of the gas to locally control the density of the gas.
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