公开(公告)号：US11287747B2

公开(公告)日：2022-03-29

申请号：US16983264

申请日：2020-08-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Andrey Nikipelov ,  Patrick Sebastian Uebel ,  Amir Abdolvand ,  Sebastian Thomas Bauerschmidt ,  Peter Maximilian Götz ,  Natallia Eduardauna Uzunbajakava

IPC: G03F7/20

Abstract: A system and method for providing a radiation source is disclosed. In one arrangement, the radiation source includes a gas cell having a window, an optical fiber that is hollow and has an axial direction, an end thereof being enclosed within the gas cell and optically coupled to the window via an optical path, and a surface, disposed around the end of the optical fiber, and extending past the end of the optical fiber in the axial direction towards the window so as to limit one or more selected from: the exchange of gas between the optical path and the remainder of the gas cell, ingress of plasma towards or into the optical fiber, and/or radical flux towards etch-susceptible surfaces.

公开(公告)号：US20210063893A1

公开(公告)日：2021-03-04

申请号：US16983264

申请日：2020-08-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Andrey NIKIPELOV ,  Patrick Sebastian Uebel ,  Amir Abdolvand ,  Sebastian Thomas Bauerschmidt ,  Peter Maximilian Götz ,  Natallia Eduardauna Uzunbajakava

IPC: G03F7/20

Abstract: A system and method for providing a radiation source is disclosed. In one arrangement, the radiation source includes a gas cell having a window, an optical fiber that is hollow and has an axial direction, an end thereof being enclosed within the gas cell and optically coupled to the window via an optical path, and a surface, disposed around the end of the optical fiber, and extending past the end of the optical fiber in the axial direction towards the window so as to limit one or more selected from: the exchange of gas between the optical path and the remainder of the gas cell, ingress of plasma towards or into the optical fiber, and/or radical flux towards etch-susceptible surfaces.

公开(公告)号：US12197001B2

公开(公告)日：2025-01-14

申请号：US18017059

申请日：2021-07-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Amir Abdolvand ,  Cristian Bogdan Craus ,  Sebastian Thomas Bauerschmidt

IPC: G02B6/032 ,  G02B6/02 ,  G02B6/25

Abstract: A method of processing an out-coupling end of a hollow core fiber including a plurality of anti-resonance elements surrounding a hollow core, and a hollow core fiber having been so processed. The method may include performing a tapering step to form a taper in the anti-resonance elements; performing a cleaving step at the taper to form at least one tapered out-coupling end of the hollow core fiber; and performing an end processing step including further heating the out-coupling end in a controlled manner to smoothen the out-coupling end.

公开(公告)号：US11999645B2

公开(公告)日：2024-06-04

申请号：US17287015

申请日：2019-10-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Robbert Edgar Van Leeuwen ,  Amir Abdolvand

IPC: C03B37/00 ,  C03B37/012 ,  C03B37/027 ,  C03C25/68 ,  G01N21/956 ,  G02F1/35 ,  G02F1/365 ,  G03F7/00

CPC classification number: C03B37/0122 ,  C03B37/01228 ,  C03B37/02781 ,  C03C25/68 ,  G01N21/956 ,  G02F1/3528 ,  G02F1/365 ,  G03F7/70316 ,  C03B2203/16 ,  C03B2203/42

Abstract: An optical fiber, manufacturing intermediate for forming an optical fiber and a method for forming an optical fiber. The method includes providing a manufacturing intermediate having an elongate body and having an aperture extending through the elongate body along an axial dimension of the elongate body, a boundary of the aperture defining an internal surface of the manufacturing intermediate. The method further includes etching the internal surface of the manufacturing intermediate using an etching substance, and drawing the manufacturing intermediate along the axial dimension so as to form the optical fiber.

公开(公告)号：US11699889B2

公开(公告)日：2023-07-11

申请号：US17621723

申请日：2020-06-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Amir Abdolvand

IPC: H01S3/067 ,  G02F1/365 ,  H01S3/094 ,  H01S3/30 ,  H01S3/00

CPC classification number: H01S3/06704 ,  G02F1/365 ,  H01S3/06741 ,  H01S3/094038 ,  H01S3/305 ,  H01S3/0092

Abstract: A broadband source device configured for generating broadband radiation or white light output. The broadband source device includes a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within the gas cell. A gas mixture is within the gas cell and the hollow-core photonic crystal fiber. The gas mixture includes at least one Raman active molecular gas constituting more than 2% of the gas mixture, such that the broadband source device operates in a balanced Kerr-Raman nonlinear interaction regime.