公开(公告)号：US11237486B2

公开(公告)日：2022-02-01

申请号：US16932184

申请日：2020-07-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Patrick Sebastian Uebel ,  Sebastian Thomas Bauerschmidt ,  Yongfeng Ni

IPC: G03F7/20 ,  G02B6/02 ,  G02F1/365 ,  G02F1/35 ,  G03F9/00

Abstract: A radiation source includes: a hollow core optical fiber, a working medium; and a pulsed pump radiation source. The hollow core optical fiber has a body and has a hollow core. The working medium is disposed within the hollow core. The pulsed pump radiation source is arranged to produce pulsed pump radiation that is received by, and propagates through, the hollow core from an input end to an output end. One or more parameters of the pulsed pump radiation, the optical fiber and the working medium are configured to allow soliton self-compression of the pulsed pump radiation so as to change a spectrum of the pulsed pump radiation so as to form output radiation. In some embodiments, a length of the optical fiber is such that the output end substantially coincides with a position at which a temporal extent of the pulsed pump radiation is minimal.

公开(公告)号：US11163208B2

公开(公告)日：2021-11-02

申请号：US16808141

申请日：2020-03-03

Applicant: ASML Netherlands B.V.

Inventor： Patrick Sebastian Uebel ,  Sebastian Thomas Bauerschmidt ,  Peter Maximilian Götz

IPC: G02F1/35 ,  G02F1/365

Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.

公开(公告)号：US11099319B2

公开(公告)日：2021-08-24

申请号：US16838400

申请日：2020-04-02

Applicant: ASML Netherlands B.V.

Inventor： Patrick Sebastian Uebel ,  Sebastian Thomas Bauerschmidt ,  Peter Maximilian Götz

IPC: G02B6/02 ,  G02B6/44

Abstract: An optical fiber, an apparatus for receiving input radiation and broadening a frequency range, a radiation source, a metrology arrangement and a lithographic apparatus are provided. The optical fiber comprises a hollow core, a cladding portion and a support portion. The cladding portion surrounds the hollow core and comprises a plurality of anti-resonance elements for guiding radiation through the hollow core. The support portion surrounds and supports the cladding portion and comprises an inner support portion, an outer support portion and a deformable connecting portion that connects the inner support portion to the outer support portion.

公开(公告)号：US20210163338A1

公开(公告)日：2021-06-03

申请号：US17096278

申请日：2020-11-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Sebastian Thomas Bauerschmidt ,  Mingli Niu

IPC: C03B37/027

Abstract: A device for connecting a fiber preform including a plurality of elongate holes extending substantially parallel to a longitudinal axis of the fiber preform to a pressure supply system, the device including a first surface to be connected to an end face of the fiber preform where the plurality of elongate holes end, a second surface including at least two ports configured to be in fluid connection with the pressure supply system, and a channel system within the device connecting the plurality of elongate holes at the first surface to the at least two ports, wherein a density of the at least two ports at the second surface is smaller than a density of the plurality of corresponding elongate holes at the first surface.