公开(公告)号：US08598891B2

公开(公告)日：2013-12-03

申请号：US13775335

申请日：2013-02-25

Applicant: Analog Devices, Inc.

Inventor： Vineet Kumar ,  William A. Clark ,  John A. Geen ,  Edward Wolfe ,  Steven Sherman

IPC: G01R27/28

CPC classification number: B81B7/0029 ,  B81C1/00333 ,  B81C99/0045 ,  G01C19/5776 ,  H01L22/14

Abstract: Detecting and/or mitigating the presence of particle contaminants in a MEMS device involves converting benign areas in which particles might become trapped undetectably by electric fields during test to field-free regions by extending otherwise non-functional conductive shield and gate layers and placing the same electrical potential on the conductive shield and gate layers. Particle contaminants can then be moved into detection locations remote from the potential trap areas and having particle detection structures by providing some mechanical disturbance.

Abstract translation: 检测和/或减轻MEMS器件中颗粒污染物的存在涉及通过扩展其它非功能性导电屏蔽层和栅极层，并将其放置在相同的区域，转化良性区域，其中颗粒可能在测试期间被电场不可见地捕获到无场区域 导电屏蔽层和栅极层上的电位。 然后可以将颗粒污染物移动到远离潜在陷阱区域的检测位置，并通过提供一些机械扰动而具有颗粒检测结构。