公开(公告)号：US20130168675A1

公开(公告)日：2013-07-04

申请号：US13775335

申请日：2013-02-25

申请人： Analog Devices, Inc.

发明人： Vineet Kumar ,  William A. Clark ,  John A. Geen ,  Edward Wolfe ,  Steven Sherman

IPC分类号： B81B7/00 ,  B81C1/00

CPC分类号： B81B7/0029 ,  B81C1/00333 ,  B81C99/0045 ,  G01C19/5776 ,  H01L22/14

摘要： Detecting and/or mitigating the presence of particle contaminants in a MEMS device involves including MEMS structures that in normal operation are robust against the presence of particles but which can be made sensitive to that presence during a test mode prior to use, e.g., by switching the impedance of sensitive structures between an exceptionally sensitive condition during test and a normal sensitivity during operation; surrounding sensitive nodes with guard elements that are at the same potential as those nodes during operation, thereby offering protection against bridging particles, but are at a very different potential during test and reveal the particles by their resulting leakage currents; extending the sensitive nodes to interdigitate with or otherwise extend adjacent to the guard structures, which neither contribute to nor detract from the device operation but cover otherwise open areas with detection means during test; and/or converting benign areas in which particles might become trapped undetectably by electric fields during test to field-free regions by extending otherwise non-functional conductive layers so that the particles can then be moved into detection locations by providing some mechanical disturbance.

摘要翻译： 检测和/或减轻MEMS器件中颗粒污染物的存在涉及包括在正常操作中抵抗颗粒的存在而鲁棒的MEMS结构，但是在使用之前的测试模式期间可以使其对该存在敏感，例如通过切换 在测试期间异常敏感的条件和操作期间的正常灵敏度之间的敏感结构的阻抗; 周围的敏感节点具有在运行期间与那些节点处于相同电位的保护元件，从而提供防止桥接颗粒的保护，但在测试期间处于非常不同的电位并且通过其产生的泄漏电流来显示颗粒; 将敏感节点延伸至与防护结构相邻或以其他方式延伸，其既不影响或不损害设备操作，也不包括在测试期间使用检测装置打开的区域; 和/或转换良性区域，其中在测试期间颗粒可能被电场不可见地捕获到无场区域，通过延伸另外的非功能性导电层，使得随后可以通过提供一些机械干扰将颗粒移动到检测位置。

公开(公告)号：US08598891B2

公开(公告)日：2013-12-03

申请号：US13775335

申请日：2013-02-25

申请人： Analog Devices, Inc.

发明人： Vineet Kumar ,  William A. Clark ,  John A. Geen ,  Edward Wolfe ,  Steven Sherman

IPC分类号： G01R27/28

CPC分类号： B81B7/0029 ,  B81C1/00333 ,  B81C99/0045 ,  G01C19/5776 ,  H01L22/14

摘要： Detecting and/or mitigating the presence of particle contaminants in a MEMS device involves converting benign areas in which particles might become trapped undetectably by electric fields during test to field-free regions by extending otherwise non-functional conductive shield and gate layers and placing the same electrical potential on the conductive shield and gate layers. Particle contaminants can then be moved into detection locations remote from the potential trap areas and having particle detection structures by providing some mechanical disturbance.

摘要翻译： 检测和/或减轻MEMS器件中颗粒污染物的存在涉及通过扩展其它非功能性导电屏蔽层和栅极层，并将其放置在相同的区域，转化良性区域，其中颗粒可能在测试期间被电场不可见地捕获到无场区域 导电屏蔽层和栅极层上的电位。 然后可以将颗粒污染物移动到远离潜在陷阱区域的检测位置，并通过提供一些机械扰动而具有颗粒检测结构。