公开(公告)号：US20220157574A1

公开(公告)日：2022-05-19

申请号：US17455197

申请日：2021-11-16

Applicant: Applied Materials, Inc.

Inventor： Benjamin SCHWARZ ,  Michael D. WILLWERTH ,  Aditi MITHUN ,  Prabhat KUMAR ,  Grace MATHEW ,  Andreas SCHMID

IPC: H01J37/32

Abstract: Embodiments of the present disclosure provide a method and an apparatus for processing a substrate. The apparatus has a ring assembly. The ring assembly has an edge ring and a shadow ring. The edge ring has a ring shaped body. The edge ring body has a top surface and a bottom surface. Pin holes extend through the edge ring body from the top surface to the bottom surface. The shadow ring has a ring shaped body. The shadow ring body has an upper surface and a lower surface. Sockets are formed on the lower surface, wherein the sockets in the shadow ring body align with the pin holes in the edge ring body.

公开(公告)号：US20210375599A1

公开(公告)日：2021-12-02

申请号：US16887596

申请日：2020-05-29

Applicant: Applied Materials, Inc.

Inventor： Andrew Antoine NOUJAIM ,  Álvaro GARCÍA DE GORORDO ,  Andreas SCHMID ,  Stephen Donald PROUTY

IPC: H01J37/32 ,  H01L21/683 ,  H01L21/67

Abstract: An electrical connector for a substrate support assembly is disclosed herein. The electrical connector includes a first interface body, and a second interface body coupled to the first interface body and to a third interface body. The second interface body is circumscribed by the third interface body. The first interface body and the second interface body each comprise a plurality of electrical terminals disposed in sockets formed in the respective first and second interface bodies, each electrical terminal disposed in sockets of the first interface body coupled to a respective one of the electrical terminals disposed in sockets of the second interface body to form a plurality of isolated conductive electrical unions, wherein the second interface body includes a plurality of protruding sidewalls that extend into the first interface body between each of the electrical terminals of the first interface body.