公开(公告)号：US20160348240A1

公开(公告)日：2016-12-01

申请号：US15111541

申请日：2015-01-06

Applicant: APPLIED MATERIALS, INC

Inventor： Brian H. BURROWS ,  Lance A. SCUDDER ,  Kashif MAQSOOD ,  Roger N. ANDERSON ,  Sumedh Dattatraya ACHARYA

IPC: C23C16/458 ,  C23C16/48 ,  C23C16/24 ,  H01L21/677 ,  H01L21/67

CPC classification number: C23C16/4584 ,  C23C16/24 ,  C23C16/45502 ,  C23C16/45578 ,  C23C16/46 ,  C23C16/482 ,  H01L21/67115 ,  H01L21/6719 ,  H01L21/67757

Abstract: Embodiments described herein generally relate to a batch processing chamber. The batch processing chamber includes a lid, a chamber wall and a bottom that define a processing region. A cassette including a stack of susceptors for supporting substrates is disposed in the processing region. The edge of the cassette is coupled to a plurality of shafts and the shafts are coupled to a rotor. During operation, the rotor rotates the cassette to improve deposition uniformity. A heating element is disposed on the chamber wall and a plurality of gas inlets is disposed through the heating element on the chamber wall. Each gas inlet is substantially perpendicular to the chamber wall.

Abstract translation: 本文描述的实施例通常涉及批处理室。 批处理室包括盖，室壁和限定处理区域的底部。 包括用于支撑衬底的一堆基座的盒子被设置在处理区域中。 盒的边缘联接到多个轴，并且轴联接到转子。 在操作期间，转子旋转盒子以改善沉积均匀性。 加热元件设置在室壁上，并且多个气体入口通过加热元件设置在室壁上。 每个气体入口基本上垂直于室壁。