公开(公告)号：US10360669B2

公开(公告)日：2019-07-23

申请号：US15685974

申请日：2017-08-24

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Ohad Shaubi ,  Assaf Asbag ,  Idan Kaizerman

IPC: G06K9/00 ,  G06T7/00 ,  G06K9/62 ,  G06N20/00

Abstract: There are provided a system, computer software product and method of generating a training set for a classifier using a processor. The method comprises: receiving a training set comprising training defects each having assigned attribute values, the training defects externally classified into classes comprising first and second major classes and a minor class; training a classifier upon the training set; receiving results of automatic classification of the training defects; automatically identifying a first defect that was externally classified into the first major class and automatically classified into the second major class; automatically identifying by the processor a second defect from the multiplicity of training defects that was externally classified into the minor class and automatically classified to the first or second major classes; and correcting the training set to include the first defect into the second major class, or to include the second defect into the first or the second major class.

公开(公告)号：US10114368B2

公开(公告)日：2018-10-30

申请号：US13948118

申请日：2013-07-22

Applicant: Applied Materials Israel Ltd.

Inventor： Gadi Greenberg ,  Idan Kaizerman ,  Zeev Zohar

IPC: G06K9/00 ,  G05B19/418 ,  H01J37/00 ,  G06T7/00 ,  H01L21/66

Abstract: Inspection apparatus includes an imaging module, which is configured to capture images of defects at different, respective locations on a sample. A processor is coupled to process the images so as to automatically assign respective classifications to the defects, and to autonomously control the imaging module to continue capturing the images responsively to the assigned classifications.

公开(公告)号：US20150022654A1

公开(公告)日：2015-01-22

申请号：US13948118

申请日：2013-07-22

Applicant: Applied Materials Israel Ltd.

Inventor： Gadi Greenberg ,  Idan Kaizerman ,  Zeev Zohar

IPC: G01N21/95 ,  G02B21/00 ,  G06T7/00

CPC classification number: G05B19/41875 ,  G05B2219/45031 ,  G05B2219/50064 ,  G06T7/0004 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/00 ,  H01J2237/2817 ,  H01L22/20

Abstract: Inspection apparatus includes an imaging module, which is configured to capture images of defects at different, respective locations on a sample. A processor is coupled to process the images so as to automatically assign respective classifications to the defects, and to autonomously control the imaging module to continue capturing the images responsively to the assigned classifications.

Abstract translation: 检查装置包括成像模块，其被配置为在样本上的不同的相应位置捕获缺陷的图像。 耦合处理器以处理图像，以便自动分配对缺陷的分类，并且自动地控制成像模块以响应于所分配的分类继续捕获图像。