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公开(公告)号：US11037286B2
公开(公告)日：2021-06-15
申请号：US15719447
申请日：2017-09-28
Applicant: Applied Materials Israel Ltd.
Inventor： Assaf Asbag , Ohad Shaubi , Kirill Savchenko , Shiran Gan-Or , Boaz Cohen , Zeev Zohar
Abstract: There are provided a classifier and a method of classifying defects in a semiconductor specimen. The classifier enables assigning each class to a classification group among three or more classification groups with different priorities. Classifier further enables setting purity, accuracy and/or extraction requirements separately for each class, and optimizing the classification results in accordance with per-class requirements. During training, the classifier is configured to generate a classification rule enabling the highest possible contribution of automated classification while meeting per-class quality requirements defined for each class.
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Patent Agency Ranking
公开(公告)号：US20190121331A1
公开(公告)日：2019-04-25
申请号：US16174070
申请日：2018-10-29
Applicant: Applied Materials Israel Ltd.
Inventor： Gadi Greenberg , Idan Kaizerman , Zeev Zohar
IPC: G05B19/418 , H01J37/00 , G06T7/00
Abstract: Inspection apparatus includes an imaging module, which is configured to capture images of defects at different, respective locations on a sample. A processor is coupled to process the images so as to automatically assign respective classifications to the defects, and to autonomously control the imaging module to continue capturing the images responsively to the assigned classifications.
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公开(公告)号：US10901402B2
公开(公告)日：2021-01-26
申请号：US16174070
申请日：2018-10-29
Applicant: Applied Materials Israel Ltd.
Inventor： Gadi Greenberg , Idan Kaizerman , Zeev Zohar
IPC: G06T7/00 , G05B19/418 , H01J37/00 , H01L21/66
Abstract: Inspection apparatus includes an imaging module, which is configured to capture images of defects at different, respective locations on a sample. A processor is coupled to process the images so as to automatically assign respective classifications to the defects, and to autonomously control the imaging module to continue capturing the images responsively to the assigned classifications.
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公开(公告)号：US20190043688A1
公开(公告)日：2019-02-07
申请号：US16052094
申请日：2018-08-01
Applicant: Applied Materials Israel Ltd.
Inventor： Zeev Zohar
Abstract: A method for generating a synthetic image of a region of an object, includes: generating, by a charged particle microscope, a charged particle microscope image of the region of the object; calculating a sparse representation of the charged particle microscope image; wherein the sparse representation of the charged particle microscope image comprises multiple first atoms; generating the synthetic image of the region, wherein the synthetic image of the region is formed from multiple second atoms; wherein the generating of the synthetic image of the region is based on a mapping between the multiple first atoms and the multiple second atoms; wherein the charged particle microscope image and the multiple first atoms are of a first resolution; and wherein the synthetic image of the region and the multiple second atoms are of a second resolution that is finer than the first resolution.
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公开(公告)号：US10114368B2
公开(公告)日：2018-10-30
申请号：US13948118
申请日：2013-07-22
Applicant: Applied Materials Israel Ltd.
Inventor： Gadi Greenberg , Idan Kaizerman , Zeev Zohar
IPC: G06K9/00 , G05B19/418 , H01J37/00 , G06T7/00 , H01L21/66
Abstract: Inspection apparatus includes an imaging module, which is configured to capture images of defects at different, respective locations on a sample. A processor is coupled to process the images so as to automatically assign respective classifications to the defects, and to autonomously control the imaging module to continue capturing the images responsively to the assigned classifications.
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公开(公告)号：US20150022654A1
公开(公告)日：2015-01-22
申请号：US13948118
申请日：2013-07-22
Applicant: Applied Materials Israel Ltd.
Inventor： Gadi Greenberg , Idan Kaizerman , Zeev Zohar
CPC classification number: G05B19/41875 , G05B2219/45031 , G05B2219/50064 , G06T7/0004 , G06T2207/10061 , G06T2207/30148 , H01J37/00 , H01J2237/2817 , H01L22/20
Abstract: Inspection apparatus includes an imaging module, which is configured to capture images of defects at different, respective locations on a sample. A processor is coupled to process the images so as to automatically assign respective classifications to the defects, and to autonomously control the imaging module to continue capturing the images responsively to the assigned classifications.
Abstract translation: 检查装置包括成像模块，其被配置为在样本上的不同的相应位置捕获缺陷的图像。 耦合处理器以处理图像，以便自动分配对缺陷的分类，并且自动地控制成像模块以响应于所分配的分类继续捕获图像。
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