公开(公告)号：US4600934A

公开(公告)日：1986-07-15

申请号：US573693

申请日：1984-01-25

Applicant: Harry E. Aine ,  Barry Block

Inventor： Harry E. Aine ,  Barry Block

IPC: B81C1/00 ,  H01L21/306 ,  H01L21/308 ,  H01L29/84 ,  G01L1/22

CPC classification number: B81C1/0015 ,  H01L21/30608 ,  H01L21/30617 ,  H01L21/3083 ,  B81B2201/0235 ,  G01P15/00 ,  Y10T29/49103

Abstract: An etch stopped layer portion overlying a (100) or (110) major face of a diamond cubic semiconductor material is undercut anisotropically etched by orienting a side edge of the etch stopped layer portion which is to be undercut, at an angle to the most nearly parallel {111} trace on the (100) or (110) face. The etch time is further reduced by slotting through the etch stopped layer with slots oriented at an angle to the {111} traces on the underlying (100) or (110) face. Undercut bridge structures are formed by undercutting quadrilateral etch stopped layer portions from opposite sides of the quadrilateral or from the sides plus slots forming diagonals of {111} trace quadrilaterals having combined areas coextensive with the area to be undercut.

Abstract translation: 覆盖金刚石立方体半导体材料的（100）或（110）主面上的蚀刻停止层部分通过将要被切削的蚀刻停止层部分的侧边缘定向成最接近 （100）或（110）面平行{111}迹线。 蚀刻时间进一步减小，通过切槽穿过蚀刻停止层，其中槽以与底层（100）或（110）面上的{111}迹线成一定角度。 底切桥结构通过从四边形或从侧面的相对侧或从侧面加上形成具有与要切削的区域共同延伸的组合区域的{111}跟踪四边形的对角线的槽形成四边形蚀刻停止层部分而形成。

公开(公告)号：US4360955A

公开(公告)日：1982-11-30

申请号：US142236

申请日：1980-04-21

Applicant: Barry Block

Inventor： Barry Block

IPC: H04R19/00 ,  H04R19/06 ,  H01G4/00

CPC classification number: H04R19/005 ,  H04R19/06 ,  Y10T29/435 ,  Y10T29/49799

Abstract: A capacitive force transducer, particularly suited for use as a microphone or as a phonograph needle pick-up cartridge, comprises a diaphragm electrode insulatively held to a lip portion of a recess in a second electrode, thereby forming a capacitive detector. The lip structure of the second electrode structure has a capacitive face region diverging from a virtual pivot region at the lip where the diaphragm is pivotably affixed to the recessed electrode. In this manner, the quiescent capacitance is defined predominantly by the capacitance near the lip, which is relatively small and defined and the change in capacitance for a given deflection of the diaphragm is relatively large, thereby improving the sensitivity of the transducer. In the case of a phonographic pick-up cartridge, the pick-up needle is coupled to the diaphragm so that vibrations induced in the needle produce corresponding vibrations of the diaphragm. A batch method of fabricating the transducers comprises recessing a semiconductive wafer through a major face to define a plurality of capacitive regions around the margins of the recesses. The diaphragm is conveniently formed by a layer deposited over an insulative layer deposited on the non recessed face of the wafer. The wafer is diced to provide a batch of the transducers.

Abstract translation: 特别适合用作麦克风或作为留声机针拾取盒的电容式力传感器包括隔离电极，绝缘地保持在第二电极中的凹部的唇部，从而形成电容式检测器。 第二电极结构的唇缘结构具有从唇部处的虚拟枢转区域发散的电容面区域，其中隔膜可枢转地固定到凹陷电极。 以这种方式，静态电容主要由边缘附近的电容限定，其相对较小并被限定，并且隔膜的给定偏转的电容变化相对较大，从而提高了换能器的灵敏度。 在拾音卡盒的情况下，拾音针被连接到隔膜，使得在针中产生的振动产生相应的隔膜振动。 制造换能器的分批方法包括通过主面凹入半导体晶片以在凹部的边缘周围限定多个电容区域。 膜片方便地由沉积在晶片的非凹面上的绝缘层上沉积的层形成。 切片晶片以提供一批换能器。

公开(公告)号：US4293316A

公开(公告)日：1981-10-06

申请号：US838310

申请日：1977-09-30

Applicant: Barry Block

Inventor： Barry Block

IPC: G01N1/00 ,  G01N1/34 ,  G01N30/00 ,  G01N30/08 ,  G01N30/14 ,  G01N30/62 ,  G01N33/00 ,  B01D53/04 ,  B01D53/22 ,  G01N5/02

CPC classification number: G01N33/0011 ,  G01N1/34 ,  G01N30/00 ,  G01N30/08 ,  G01N1/405 ,  G01N2001/4016 ,  G01N2030/146 ,  G01N2030/623 ,  G01N2033/0019

Abstract: The detector region of a gas analyzer is interfaced to a source of gas under analysis, such as the atmosphere, by means of an adsorber type preconcentrator, which preferentially adsorbs the gaseous constituent of interest, such as relatively heavy hydrocarbons, while permitting the other lighter hydrocarbons, water vapor, and permanent gases to pass thereby without appreciable adsorption. After a substantial volume of gas to be analyzed has passed through the adsorber stage, the adsorbed materials are desorbed from the surface of the adsorber into the input stage of a membrane separator. As a consequence, the partial pressure of the constituent of interest is greatly increased at the input stage of the membrane separator. The gaseous constituent of interest is then passed through the membrane separator, and further separated therein from water vapor, the permanent gases and some of the lighter hydrocarbons and then passed into the detector region of the gas analyzer. In a preferred embodiment, the output stage of the membrane separator is connected to a second adsorber concentrator so that the partial pressure at the output of the membrane separator is reduced for the gaseous constituent of interest so as to facilitate flow of the gaseous constituent of interest through the membrane separator.

Abstract translation: 气体分析仪的检测器区域通过吸附器型预浓缩器（如吸附器类型预浓缩器）与诸如气氛的分析气体源接口，该浓缩器优先吸附相关气体成分，例如相当重的烃，同时允许其它较轻的 碳氢化合物，水蒸气和永久气体通过，从而没有明显的吸附。 在大量待分析的气体通过吸附器阶段之后，吸附材料从吸附器的表面解吸到膜分离器的输入级。 因此，在膜分离器的输入阶段，感兴趣的成分的分压大大增加。 感兴趣的气体成分然后通过膜分离器，并进一步与水蒸汽分离，永久气体和一些较轻的烃，然后进入气体分析仪的检测器区域。 在优选实施例中，膜分离器的输出级连接到第二吸附器浓缩器，使得对于感兴趣的气体成分，膜分离器的输出处的分压降低，以促进感兴趣的气体成分的流动 通过膜分离器。

公开(公告)号：US4225755A

公开(公告)日：1980-09-30

申请号：US903827

申请日：1978-05-08

Applicant: Barry Block

Inventor： Barry Block

IPC: H04R19/00 ,  H04R19/06 ,  H04R7/18 ,  G11B3/44

CPC classification number: H04R19/06 ,  H04R19/005

Abstract: A capacitive force transducer, particularly suited for use as a microphone or as a phonograph needle pick-up cartridge, comprises a diaphragm electrode insulatively held to a lip portion of a recess in a second electrode, thereby forming a capacitive detector. The lip structure of the second electrode structure has a capacitive face region diverging from a virtual pivot region at the lip where the diaphragm is pivotably affixed to the recessed electrode. In this manner, the quiescent capacitance is defined predominantly by the capacitance near the lip, which is relatively small and defined and the change in capacitance for a given deflection of the diaphragm is relatively large, thereby improving the sensitivity of the transducer. In the case of a phonographic pick-up cartridge, the pick-up needle is coupled to the diaphragm so that vibrations induced in the needle produce corresponding vibrations of the diaphragm. A batch method of fabricating the transducers comprises recessing a semiconductive wafer through a major face to define a plurality of capacitive regions around the margins of the recesses. The diaphragm is conveniently formed by a layer deposited over an insulative layer deposited on the non recessed face of the wafer. The wafer is diced to provide a batch of the transducers.

Abstract translation: 特别适合用作麦克风或作为留声机针拾取盒的电容式力传感器包括隔离电极，绝缘地保持在第二电极中的凹部的唇部，由此形成电容式检测器。 第二电极结构的唇缘结构具有从唇部处的虚拟枢转区域发散的电容面区域，其中隔膜可枢转地固定到凹陷电极。 以这种方式，静态电容主要由边缘附近的电容限定，其相对较小并被限定，并且隔膜的给定偏转的电容变化相对较大，从而提高了换能器的灵敏度。 在拾音卡盒的情况下，拾音针被连接到隔膜，使得在针中产生的振动产生相应的隔膜振动。 制造换能器的分批方法包括通过主面凹入半导体晶片以在凹部的边缘周围限定多个电容区域。 膜片方便地由沉积在晶片的非凹面上的绝缘层上沉积的层形成。 切片晶片以提供一批换能器。

公开(公告)号：US4091680A

公开(公告)日：1978-05-30

申请号：US586892

申请日：1975-06-16

Applicant: Barry Block

Inventor： Barry Block

IPC: G01L1/04 ,  G01L1/14 ,  G01L1/18 ,  G01P15/12 ,  G01P15/08

CPC classification number: G01L1/142 ,  G01L1/044 ,  G01L1/18 ,  G01P15/123

Abstract: The force transducer includes a composite spring structure having first and second folded cantilever leaf spring portions coupled to the region to receive the force to be measured. The first and second leaf spring portions extend outwardly from, and are angularly displaced with respect to each other, around an axis of sensitivity. Each folded cantilever leaf spring portion includes first and second generally parallel elongated leg portions extending outwardly from the axis of sensitivity with each of said leg portions being coupled together at the outer end by a coupling structure which is free to move both parallel to and perpendicular to the axis of sensitivity in response to displacement of the inner end of one of said leg portions relative to the other along the axis of sensitivity in response to application of the force to be measured to the inner ends of the leg portions. The leg portions are dimensioned to have a higher compliance along the axis of sensitivity than the compliance thereof perpendicular to the axis of sensitivity. Differential capacitance or piezoresistance strain gauges are the preferred method for deriving an output which is proportional to the component of applied force tending to displace one of the leg portions relative to the other along the axis of sensitivity. Squeeze film damping is the preferred method of damping the composite spring structure.

Abstract translation: 力传感器包括复合弹簧结构，其具有联接到该区域的第一和第二折叠的悬臂板弹簧部分以接收待测量的力。 第一和第二板簧部分围绕感光轴线向外延伸并相对于彼此成角度地移位。 每个折叠的悬臂板弹簧部分包括第一和第二大致平行的细长腿部分，其从灵敏轴向外延伸，每个所述腿部部分在外端由联接结构联接在一起，所述联接结构平行于和垂直于 响应于将待测量的力施加到腿部的内端，响应于所述腿部中的一个的内端相对于另一个的灵敏度的轴的灵敏度轴沿灵敏度轴的位移。 腿部的尺寸被确定为具有比垂直于感光轴的顺从性更高的灵敏度的柔顺性。 差分电容或压阻应变计是用于导出输出的优选方法，该输出与施加的力的分量成正比，倾向于使一个腿部相对于另一个沿着灵敏度轴移位。 挤压膜阻尼是阻尼复合弹簧结构的首选方法。