Configuration and process for testing a multiplicity of semiconductor chips on a wafer plane
    21.
    发明授权
    Configuration and process for testing a multiplicity of semiconductor chips on a wafer plane 有权
    用于在晶圆平面上测试多个半导体芯片的配置和处理

    公开(公告)号:US06549028B1

    公开(公告)日:2003-04-15

    申请号:US09630972

    申请日:2000-08-02

    申请人: Carsten Ohlhoff

    发明人: Carsten Ohlhoff

    IPC分类号: G01R3128

    摘要: Arrangement and method for testing a multiplicity of semiconductor chips at the wafer level The invention relates to an arrangement and a method for testing a multiplicity of semiconductor chips (7) at the wafer level, in which an intermediate wiring plane (10) with a global test bus (12) and test pads (11) is applied to the surface of the wafer (6).

    摘要翻译: 用于在晶片级测试多个半导体芯片的布置和方法本发明涉及一种用于在晶片级测试多个半导体芯片(7)的布置和方法,其中具有全局的中间布线平面(10) 测试总线(12)和测试焊盘(11)被施加到晶片(6)的表面。