公开(公告)号：US20070222978A1

公开(公告)日：2007-09-27

申请号：US10987083

申请日：2004-11-12

申请人： Emanuel Elyasaf ,  Avishay Guetta

发明人： Emanuel Elyasaf ,  Avishay Guetta

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/9501

摘要： A method for imaging an article, the method includes: (i) providing short duration light pulses; (ii) directing the light pulses, by multiple optical heads, to illuminate multiple spaced apart areas of an article; and (iii) directing light from the multiple areas towards multiple two-dimensional light sensors; whereas (iv) imparting motion between the article and the multiple optical heads during the stages of providing and directing. An apparatus for inspecting an article that includes: (i) at least one pulsating source for providing short duration light pulses; (ii) multiple optical heads, adapted to direct the light pulses to illuminate multiple spaced apart areas of an article and to collect light from the multiple areas towards multiple two-dimensional light sensors; and (iii) a positioning device which is adapted to impart motion between the article and the multiple optical heads.

摘要翻译： 一种用于对物品成像的方法，所述方法包括：（i）提供短持续时间的光脉冲; （ii）通过多个光学头引导光脉冲以照亮物品的多个间隔开的区域; 和（iii）将来自多个区域的光引导到多个二维光传感器; 而（iv）在提供和指导的阶段期间在物品和多个光学头之间施加运动。 一种用于检查物品的装置，包括：（i）至少一个用于提供短持续时间的光脉冲的脉动源; （ii）多个光学头，适于引导光脉冲照亮物品的多个间隔开的区域并且将来自多个区域的光聚集到多个二维光传感器; 以及（iii）适于在所述制品和所述多个光学头之间施加运动的定位装置。

公开(公告)号：US20050270521A1

公开(公告)日：2005-12-08

申请号：US11127914

申请日：2005-05-11

申请人： Emanuel Elyasaf ,  Haim Feldman ,  Simon Yalov ,  Eitan Lahat

发明人： Emanuel Elyasaf ,  Haim Feldman ,  Simon Yalov ,  Eitan Lahat

IPC分类号： G01N21/88 ,  G01N21/956

CPC分类号： G01N21/8806 ,  G01N21/956

摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.

公开(公告)号：US20130334214A1

公开(公告)日：2013-12-19

申请号：US13885961

申请日：2011-11-17

申请人： Itzhak Yogev ,  Ginat Rachel Muginstein ,  Rony Krysler ,  Emanuel Elyasaf

发明人： Itzhak Yogev ,  Ginat Rachel Muginstein ,  Rony Krysler ,  Emanuel Elyasaf

IPC分类号： H05B6/64

CPC分类号： H05B6/6447 ,  H05B6/6441 ,  H05B6/645 ,  H05B6/6458

摘要： Apparatuses and methods are provided for a processing apparatus configured to authenticate an item based on at least one optical indicium associated with the item before processing the item. An interface may be configured to receive processing information from a machine readable element associated with an item to be processed. An image acquisition device may be configured to acquire image information relating to at least one optical indicium associated with an item. At least one processor may be configured to verify authentication of the item based upon the image information acquired by the image sensor unit. The processor may be further configured to receive processing information from the interface and to determine one or more instructions for processing the item based on the processing information. The apparatus may be further configured to processing the item in accordance with the instructions after the item has been verified as authentic.

摘要翻译： 提供了一种用于处理装置的装置和方法，所述处理装置被配置为在处理所述物品之前基于与所述物品相关联的至少一个光学标记来认证物品。 接口可以被配置为从与要处理的项目相关联的机器可读元素接收处理信息。 图像获取装置可以被配置为获取与与项目相关联的至少一个光学标记相关的图像信息。 至少一个处理器可以被配置为基于由图像传感器单元获取的图像信息来验证物品的认证。 处理器可以被进一步配置为从接口接收处理信息，并且基于处理信息确定用于处理项目的一个或多个指令。 该装置还可以被配置为在项目被验证为真实之后根据指令来处理该项目。

公开(公告)号：US07841529B2

公开(公告)日：2010-11-30

申请号：US10987083

申请日：2004-11-12

申请人： Emanuel Elyasaf ,  Avishay Guetta

发明人： Emanuel Elyasaf ,  Avishay Guetta

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/9501

摘要： A method for imaging an article, the method includes: (i) providing short duration light pulses; (ii) directing the light pulses, by multiple optical heads, to illuminate multiple spaced apart areas of an article; and (iii) directing light from the multiple areas towards multiple two-dimensional light sensors; whereas (iv) imparting motion between the article and the multiple optical heads during the stages of providing and directing. An apparatus for inspecting an article that includes: (i) at least one pulsating source for providing short duration light pulses; (ii) multiple optical heads, adapted to direct the light pulses to illuminate multiple spaced apart areas of an article and to collect light from the multiple areas towards multiple two-dimensional light sensors; and (iii) a positioning device which is adapted to impart motion between the article and the multiple optical heads.

摘要翻译： 一种用于对物品成像的方法，所述方法包括：（i）提供短持续时间的光脉冲; （ii）通过多个光学头引导光脉冲以照亮物品的多个间隔开的区域; 和（iii）将来自多个区域的光引导到多个二维光传感器; 而（iv）在提供和指导的阶段期间在物品和多个光学头之间施加运动。 一种用于检查物品的装置，包括：（i）至少一个用于提供短持续时间的光脉冲的脉动源; （ii）多个光学头，适于引导光脉冲照亮物品的多个间隔开的区域并且将来自多个区域的光聚集到多个二维光传感器; 以及（iii）适于在所述制品和所述多个光学头之间施加运动的定位装置。

公开(公告)号：US07601944B2

公开(公告)日：2009-10-13

申请号：US11961983

申请日：2007-12-20

申请人： Emanuel Elyasaf ,  Steven R. Rogers

发明人： Emanuel Elyasaf ,  Steven R. Rogers

IPC分类号： H01J3/14

CPC分类号： G01N21/9501 ,  G01N21/8806

摘要： A system and method for inspecting an article, the system includes a spatial filter that is shaped such as to direct output beams towards predefined locations and an optical beam directing entity, for directing the multiple output beams toward multiple detector arrays. The method includes spatially filtering multiple input light beams to provide substantially aberration free output light beams; and directing the multiple output beams by an optical beam directing entity, toward multiple detector arrays.

公开(公告)号：US20070228274A1

公开(公告)日：2007-10-04

申请号：US11684965

申请日：2007-03-12

申请人： Emanuel Elyasaf ,  Nissim Elmaliah

发明人： Emanuel Elyasaf ,  Nissim Elmaliah

IPC分类号： G01N23/00

CPC分类号： G01N23/2251 ,  H01J37/244 ,  H01J37/29 ,  H01J2237/2446

摘要： A high-throughput inspection system and method. The system includes: (i) a charged particles to light converter adapted to convert a secondary array of charged particle beams to a first array of light beams; wherein the first array of light beams is characterized by a first ratio of an average first array light beam diameter to an average distance between adjacent first array light beams of the first array; (ii) first optics, positioned between the charged particles to light converter and between inputs of multiple fibers, wherein the first optics is adapted to provide a second array of light beams; wherein each second array light beam corresponds to a first array light beam; wherein the second array of light beams is characterized by a second ratio of an average second array light beam diameter to an average distance between adjacent second array light beams; wherein the second ratio is substantially smaller than the first ratio; (iii) multiple fibers that are adapted to direct second array light beams towards multiple detectors; wherein the inputs of the multiple fibers are positioned in response to an expected spatial disorder of the second array of light beams and to diameters of second array light beams; and (iv) multiple detectors, adapted to detect light from the multiple fibers.

摘要翻译： 高通量检测系统及方法。 该系统包括：（i）带电粒子到光转换器，其适于将带电粒子束的二次阵列转换成第一阵列的光束; 其中所述第一光束阵列的特征在于平均第一阵列光束直径与所述第一阵列的相邻第一阵列光束之间的平均距离的第一比率; （ii）位于带电粒子与光转换器之间以及多个光纤的输入之间的第一光学器件，其中第一光学器件适于提供第二阵列的光束; 其中每个第二阵列光束对应于第一阵列光束; 其中所述第二阵列光束的特征在于平均第二阵列光束直径与相邻的第二阵列光束之间的平均距离的第二比率; 其中所述第二比例基本上小于所述第一比率; （iii）适于将第二阵列光束导向多个检测器的多个光纤; 其中所述多个光纤的输入响应于所述第二阵列阵列的预期空间紊乱和所述第二阵列光束的直径来定位; 和（iv）多个检测器，适于检测来自多根纤维的光。

公开(公告)号：US07187439B2

公开(公告)日：2007-03-06

申请号：US11127914

申请日：2005-05-11

申请人： Emanuel Elyasaf ,  Haim Feldman ,  Simon Yalov ,  Eitan Lahat

发明人： Emanuel Elyasaf ,  Haim Feldman ,  Simon Yalov ,  Eitan Lahat

IPC分类号： G01N21/88

CPC分类号： G01N21/8806 ,  G01N21/956

摘要： Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.

摘要翻译： 用于高通量检测的检测系统和方法，该系统和方法能够产生和感测传输和/或反射的短持续时间波束。 根据本发明的一个实施例，同时产生和感测发射和反射的短持续时间波束，同时提供反射图像和透射图像。 反射和发射的短持续时间的辐射束在频域中被操纵或被明显极化，使得它们被引导到适当的区域传感器。 根据本发明的另一方面，系统改变对短持续时间的射束的操纵，以选择性地将短持续时间的射束引导到不同的区域传感器。

公开(公告)号：US07053395B2

公开(公告)日：2006-05-30

申请号：US10617448

申请日：2003-07-11

申请人： Haim Feldman ,  Emanuel Elyasaf ,  Nissim Elmaliach ,  Ron Naftali ,  Boris Golberg ,  Silviu Reinhorn

发明人： Haim Feldman ,  Emanuel Elyasaf ,  Nissim Elmaliach ,  Ron Naftali ,  Boris Golberg ,  Silviu Reinhorn

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/8806 ,  G01N2021/8825 ,  G02B21/002 ,  G02B21/125

摘要： A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.

公开(公告)号：US20060023205A1

公开(公告)日：2006-02-02

申请号：US10910117

申请日：2004-08-02

申请人： Emanuel Elyasaf ,  Steven Rogers

发明人： Emanuel Elyasaf ,  Steven Rogers

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/8806

摘要： A system and method for inspecting an article, the system includes a spatial filter that is shaped such as to direct output beams towards predefined locations and an optical beam directing entity, for directing the multiple output beams toward multiple detector arrays. The method includes spatially filtering multiple input light beams to provide substantially aberration free output light beams; and directing the multiple output beams by an optical beam directing entity, toward multiple detector arrays.

公开(公告)号：US06809808B2

公开(公告)日：2004-10-26

申请号：US10103560

申请日：2002-03-22

申请人： Haim Feldman ,  Emanuel Elyasaf ,  Nissim Elmaliach ,  Ron Naftali ,  Boris Golberg ,  Silviu Reinhorn

发明人： Haim Feldman ,  Emanuel Elyasaf ,  Nissim Elmaliach ,  Ron Naftali ,  Boris Golberg ,  Silviu Reinhorn

IPC分类号： G01N2100

CPC分类号： G01N21/9501 ,  G01N21/8806 ,  G01N2021/8825 ,  G02B21/002 ,  G02B21/125

摘要： A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.