公开(公告)号：US06853475B2

公开(公告)日：2005-02-08

申请号：US10617449

申请日：2003-07-11

申请人： Haim Feldman ,  Emanuel Elyasaf ,  Nissim Elmaliach ,  Ron Naftali ,  Boris Golberg ,  Silviu Reinhorn

发明人： Haim Feldman ,  Emanuel Elyasaf ,  Nissim Elmaliach ,  Ron Naftali ,  Boris Golberg ,  Silviu Reinhorn

IPC分类号： G01B11/30 ,  G01N21/89 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66 ,  G02F1/11

CPC分类号： G01N21/9501 ,  G01N21/8806 ,  G01N2021/8825 ,  G02B21/002 ,  G02B21/125

摘要： A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.

摘要翻译： 用于检查样本的系统，例如使用激光源提供光束的半导体晶片。 光束被施加到具有有源区域并且响应于RF输入信号的移动透镜声光器件，以在有源区域中选择性地生成多个行进透镜。 移动透镜声光装置可操作以在每个所生成的行进透镜的各个焦点处接收光束并产生多个飞点光束。 一种具有多个检测器部分的光检测器单元，每个检测器部分具有多个光检测器和用于并行接收来自多个光检测器的输入的至少一个多级存储装置，用于产生可用的扫描 数据。 存储在每个存储设备中的信息从多个阶段同时连续地读出。

公开(公告)号：US07053395B2

公开(公告)日：2006-05-30

申请号：US10617448

申请日：2003-07-11

申请人： Haim Feldman ,  Emanuel Elyasaf ,  Nissim Elmaliach ,  Ron Naftali ,  Boris Golberg ,  Silviu Reinhorn

发明人： Haim Feldman ,  Emanuel Elyasaf ,  Nissim Elmaliach ,  Ron Naftali ,  Boris Golberg ,  Silviu Reinhorn

IPC分类号： G01N21/88

CPC分类号： G01N21/9501 ,  G01N21/8806 ,  G01N2021/8825 ,  G02B21/002 ,  G02B21/125

摘要： A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.

公开(公告)号：US06809808B2

公开(公告)日：2004-10-26

申请号：US10103560

申请日：2002-03-22

申请人： Haim Feldman ,  Emanuel Elyasaf ,  Nissim Elmaliach ,  Ron Naftali ,  Boris Golberg ,  Silviu Reinhorn

发明人： Haim Feldman ,  Emanuel Elyasaf ,  Nissim Elmaliach ,  Ron Naftali ,  Boris Golberg ,  Silviu Reinhorn

IPC分类号： G01N2100

CPC分类号： G01N21/9501 ,  G01N21/8806 ,  G01N2021/8825 ,  G02B21/002 ,  G02B21/125

摘要： A system for inspecting a specimen, such as a semiconductor wafer that uses a laser light source for providing a beam of light. The beam is applied to a traveling lens acousto-optic device having an active region and responsive to an RF input signal to selectively generate plural traveling lenses in the active region. The traveling lens acousto-optic device is operative to receive the light beam and generate plural flying spot beams, at the respective focus of each of the generated traveling lenses. A light detector unit, having a plurality of detector sections, each detector section having a plurality of light detectors and at least one multi-stage storage device operative to receive in parallel an input from the plurality of light detectors, is used to generate useable scan data. Information stored in each of the storage devices is serially read out concurrently from the multiple stages.

公开(公告)号：US07468507B2

公开(公告)日：2008-12-23

申请号：US11339044

申请日：2006-01-25

申请人： Steven R. Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali ,  Doron Meshulach

发明人： Steven R. Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali ,  Doron Meshulach

IPC分类号： H01J3/14 ,  H01J5/16 ,  H01J40/14

CPC分类号： G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/10 ,  G01N2201/1042 ,  G01N2201/106

摘要： A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.

摘要翻译： 一种用于扫描表面的方法，其包括使用具有轴的光学器件聚焦光束阵列，以便照亮由所述轴线截取的表面的区域，使得每个光束照亮所述光束中的相应子区域的一部分 该区域。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上在相应的子区域上被扫描。

公开(公告)号：US20070133077A1

公开(公告)日：2007-06-14

申请号：US11339044

申请日：2006-01-25

申请人： Steven Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali ,  Doron Meshulach

发明人： Steven Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali ,  Doron Meshulach

IPC分类号： G02B26/08

CPC分类号： G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/10 ,  G01N2201/1042 ,  G01N2201/106

摘要： A method for scanning a surface, consisting of focusing an array of optical beams using optics having an axis, so as to illuminate a region of the surface intercepted by the axis, such that each optical beam illuminates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the optical beams is scanned over the respective sub-region in a second direction, which is different from the first direction.

摘要翻译： 一种用于扫描表面的方法，其包括使用具有轴的光学器件聚焦光束阵列，以便照亮由所述轴线截取的表面的区域，使得每个光束照亮所述光束中的相应子区域的一部分 该区域。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上在相应的子区域上被扫描。

公开(公告)号：US07468506B2

公开(公告)日：2008-12-23

申请号：US11334963

申请日：2006-01-19

申请人： Steven R. Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali

发明人： Steven R. Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali

IPC分类号： H01J3/14 ,  H01J5/16 ,  H01J40/14

CPC分类号： G01N21/8851 ,  G01N21/9501 ,  G03F7/70275 ,  G03F7/70358

摘要： A method for scanning a surface, consisting of focusing an array of beams using optics having an axis, so as to irradiate a region of the surface intercepted by the axis, such that each beam irradiates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the beams is scanned over the respective sub-region in a second direction, which is different from the first direction.

摘要翻译： 一种用于扫描表面的方法，包括使用具有轴的光学器件聚焦光束阵列，以便照射由所述轴线截取的表面的区域，使得每个光束照射所述区域内的相应子区域的一部分 。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上扫描相应的子区域。

公开(公告)号：US20060261261A1

公开(公告)日：2006-11-23

申请号：US11334963

申请日：2006-01-19

申请人： Steven Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali

发明人： Steven Rogers ,  Nissim Elmaliach ,  Emanuel Elyasef ,  Alon Litman ,  Ron Naftali

IPC分类号： H01J40/14

CPC分类号： G01N21/8851 ,  G01N21/9501 ,  G03F7/70275 ,  G03F7/70358

摘要： A method for scanning a surface, consisting of focusing an array of beams using optics having an axis, so as to irradiate a region of the surface intercepted by the axis, such that each beam irradiates a portion of a respective sub-region within the region. The method further includes moving at least one of the array and the surface so as to cause a translation of the surface relative to the axis in a first direction. During the translation in the first direction, each of the beams is scanned over the respective sub-region in a second direction, which is different from the first direction.

摘要翻译： 一种用于扫描表面的方法，包括使用具有轴的光学器件聚焦光束阵列，以便照射由所述轴线截取的表面的区域，使得每个光束照射所述区域内的相应子区域的一部分 。 所述方法还包括移动所述阵列和所述表面中的至少一个，以使所述表面相对于所述轴线在第一方向上平移。 在第一方向的平移期间，每个光束在与第一方向不同的第二方向上扫描相应的子区域。

公开(公告)号：US09702983B2

公开(公告)日：2017-07-11

申请号：US14115326

申请日：2012-05-02

申请人： Haim Eder ,  Nissim Elmaliach ,  Igor Krayvitz (Krivts) ,  Mario Mützel

发明人： Haim Eder ,  Nissim Elmaliach ,  Igor Krayvitz (Krivts) ,  Mario Mützel

IPC分类号： G01T1/20 ,  G01N21/62 ,  H01J37/244 ,  H01J37/28 ,  G01J1/04 ,  G01N21/25 ,  G01N21/64

CPC分类号： G01T1/2002 ,  G01J1/0425 ,  G01N21/253 ,  G01N21/62 ,  G01N21/6452 ,  G01N2201/0833 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2445 ,  H01J2237/2446

摘要： Apparatus for detecting optical radiation emitted from an array of spots on an object. The apparatus includes a plurality of light guides having respective input ends and output ends, with the input ends ordered in a geometrical arrangement corresponding to the array of the spots. Relay optics collect and focus the optical radiation from the object onto the input ends such that each input end receives the optical radiation from a corresponding one of the spots. Multiple detectors and each coupled to receive the optical radiation from an output end of a respective one of the light guides.

公开(公告)号：US06366687B1

公开(公告)日：2002-04-02

申请号：US09029625

申请日：1998-08-10

申请人： Meir Aloni ,  Nissim Elmaliach ,  Mula Friedman ,  Yonatan Lehman

发明人： Meir Aloni ,  Nissim Elmaliach ,  Mula Friedman ,  Yonatan Lehman

IPC分类号： G06K903

CPC分类号： G06T7/001 ,  G06T2207/30148

摘要： Data converter apparatus for converting in real time data stored in an input compact format into an output expanded real time format. The data including a plurality of groups and repetition of the groups. The groups including, each, many basic geometric figures (BGF). The data converter includes a processor adapted to selecting data relating to a predetermined division, dividing and processing the data into consecutive bins according to scan order, which bins have structural correspondence to the input format. The data converter is further capable of sub-dividing the division into sub-divisions which have structural correspondence to the output format. The data processor is further capable of processing and allocating the BGFs in the bins to sub-divisions to thereby produce a division data stream in the output expanded real time format.

摘要翻译： 数据转换装置，用于将以输入的小型格式存储的实时数据转换为输出扩展的实时格式。 数据包括多个组和组的重复。 这些组包括每个基本几何图形（BGF）。 数据转换器包括处理器，其适于选择与预定分区相关的数据，根据扫描顺序将数据划分和处理成连续的存储区，该存储单元与输入格式具有结构对应关系。 数据转换器还能够将分割划分成与输出格式具有结构对应关系的子分割。 数据处理器还能够处理并将分组中的BGF分配给子部分，从而以输出扩展的实时格式产生分割数据流。