Thermal microphotonic sensor and sensor array
    21.
    发明授权
    Thermal microphotonic sensor and sensor array 有权
    热敏微传感器和传感器阵列

    公开(公告)号:US07667200B1

    公开(公告)日:2010-02-23

    申请号:US11950821

    申请日:2007-12-05

    IPC分类号: G01J5/00

    CPC分类号: G01J5/44 G01J5/08 G01J5/0821

    摘要: A thermal microphotonic sensor is disclosed for detecting infrared radiation using heat generated by the infrared radiation to shift the resonant frequency of an optical resonator (e.g. a ring resonator) to which the heat is coupled. The shift in the resonant frequency can be determined from light in an optical waveguide which is evanescently coupled to the optical resonator. An infrared absorber can be provided on the optical waveguide either as a coating or as a plate to aid in absorption of the infrared radiation. In some cases, a vertical resonant cavity can be formed about the infrared absorber to further increase the absorption of the infrared radiation. The sensor can be formed as a single device, or as an array for imaging the infrared radiation.

    摘要翻译: 公开了一种用于利用由红外线辐射产生的热量来检测红外辐射的热微振子传感器,以移动热耦合到的光谐振器(例如,环形谐振器)的谐振频率。 谐振频率的偏移可以通过ev逝耦合到光学谐振器的光波导中的光来确定。 可以在光波导上设置红外线吸收器作为涂层或板,以帮助吸收红外辐射。 在一些情况下,可以围绕红外线吸收体形成垂直谐振腔,以进一步增加红外辐射的吸收。 传感器可以形成为单个装置,或者形成用于对红外线辐射进行成像的阵列。

    Low-voltage micro-switch actuation technique
    22.
    发明授权
    Low-voltage micro-switch actuation technique 有权
    低压微动开关技术

    公开(公告)号:US07486163B2

    公开(公告)日:2009-02-03

    申请号:US10979350

    申请日:2004-11-02

    IPC分类号: H01H51/22

    摘要: An electro-mechanical switch structure includes at least one fixed electrode and a free electrode which is movable in the structure with a voltage potential applied between each fixed electrode and the free, movable electrode. The voltage potentials applied between each fixed electrode and the movable electrode are modulated to actuate the electro-mechanical switch structure.

    摘要翻译: 机电开关结构包括至少一个固定电极和自由电极,其可在结构中移动,其中施加有电压电位在每个固定电极和自由的可动电极之间。 施加在每个固定电极和可动电极之间的电压被调制以致动机电开关结构。

    System and method for providing fast, low voltage integrated optical elements
    23.
    发明授权
    System and method for providing fast, low voltage integrated optical elements 有权
    用于提供快速,低电压集成光学元件的系统和方法

    公开(公告)号:US07477812B2

    公开(公告)日:2009-01-13

    申请号:US11110511

    申请日:2005-04-20

    IPC分类号: G02B6/26

    摘要: A switching system is disclosed for an optical signal. The switching system includes a first optical waveguide coupled to a first electrode, a second electrode, and a second optical waveguide. The second optical waveguide is coupled to a movable electrode. The movable electrode is supported by a support structure and is positioned with respect to the first and second electrodes so that the position of the movable electrode may be selectively placed in either a first closed state or a second open state defined by the first and second electrodes under application of a voltage with respect to one of the first and second electrodes. The first closed state provides that the first and second optical waveguides are sufficiently close to each other to provide optical coupling therebetween while the second open state provides that the first and second optical communication channels are not sufficiently close to each other to provide optical coupling therebetween, or provide some different amount of optical coupling than in the first closed state.

    摘要翻译: 公开了一种用于光信号的交换系统。 开关系统包括耦合到第一电极,第二电极和第二光波导的第一光波导。 第二光波导耦合到可动电极。 可移动电极由支撑结构支撑并且相对于第一和第二电极定位,使得可动电极的位置可以选择性地放置在由第一和第二电极限定的第一闭合状态或第二开放状态 在相对于所述第一和第二电极之一施加电压的情况下。 第一闭合状态规定,第一和第二光波导彼此充分接近以在其间提供光耦合,而第二开放状态规定第一和第二光通信通道彼此之间不足够靠近以提供光耦合, 或提供与第一关闭状态相比不同量的光耦合。

    Electro-mechanical micro-switch device
    24.
    发明授权
    Electro-mechanical micro-switch device 有权
    机电微动开关装置

    公开(公告)号:US07250837B2

    公开(公告)日:2007-07-31

    申请号:US10979706

    申请日:2004-11-02

    IPC分类号: H01H51/22

    摘要: The electro-mechanical micro-switch device includes first and second fixed electrodes. A movable electrode is positioned with respect to the first and second fixed electrodes so that the position of the movable electrode can be selectively placed in one of two opposing states defined by the fixed electrodes. The stored elastic potential energy of the movable electrode and its flexible supporting structure is used for switching between the two states. An electrostatic hold voltage is used to hold the movable electrode in the two switch states.

    摘要翻译: 机电微开关装置包括第一和第二固定电极。 可移动电极相对于第一固定电极和第二固定电极定位,使得可动电极的位置可以选择性地放置在由固定电极限定的两个相对状态之一中。 可动电极及其柔性支撑结构的储能弹性势能用于两种状态之间的切换。 静电保持电压用于将可动电极保持在两个开关状态。

    Athermalization of resonant optical devices via thermo-mechanical feedback
    25.
    发明授权
    Athermalization of resonant optical devices via thermo-mechanical feedback 有权
    通过热机械反馈对谐振光学器件进行热化

    公开(公告)号:US09239431B1

    公开(公告)日:2016-01-19

    申请号:US13306453

    申请日:2011-11-29

    IPC分类号: G02B6/26 G02B6/293 G02B6/12

    摘要: A passively athermal photonic system including a photonic circuit having a substrate and an optical cavity defined on the substrate, and passive temperature-responsive provisions for inducing strain in the optical cavity of the photonic circuit to compensate for a thermo-optic effect resulting from a temperature change in the optical cavity of the photonic circuit. Also disclosed is a method of passively compensating for a temperature dependent thermo-optic effect resulting on an optical cavity of a photonic circuit including the step of passively inducing strain in the optical cavity as a function of a temperature change of the optical cavity thereby producing an elasto-optic effect in the optical cavity to compensate for the thermo-optic effect resulting on an optical cavity due to the temperature change.

    摘要翻译: 一种被动无热光子系统,包括具有衬底和限定在衬底上的光学腔的光子电路,以及用于在光子电路的光学腔中诱发应变的被动温度响应性设备,以补偿由温度导致的热光效应 改变光子电路的光腔。 还公开了一种被动地补偿导致光子电路的光腔的温度依赖性热光效应的方法,包括被动地在光腔中引起应变的步骤,作为光学腔的温度变化的函数,从而产生 在光腔中的弹性光学效应以补偿由于温度变化导致光腔的热光效应。

    Adjustable focusing composite for use in an optical profilometer system and method
    26.
    发明授权
    Adjustable focusing composite for use in an optical profilometer system and method 有权
    可调聚焦复合材料用于光学轮廓仪系统和方法

    公开(公告)号:US06943968B2

    公开(公告)日:2005-09-13

    申请号:US10423670

    申请日:2003-04-25

    IPC分类号: G01B11/24 G01B11/30 G02B7/02

    CPC分类号: G01B11/303 G01B11/24

    摘要: An adjustable lens is disclosed for use in an optical profilometer system. The adjustable lens includes a plurality of elements that are mutually spaced from another in a first position and provides a first focal point for an incident electromagnetic field having a first frequency incident at a first angle with respect to the plurality of elements. The adjustable lens also includes an actuation unit for changing the focal point of the plurality of elements to provide a second focal point for the incident electromagnetic field having the first frequency incident at the first angle with respect to the plurality of elements.

    摘要翻译: 公开了用于光学轮廓仪系统中的可调透镜。 可调节透镜包括多个元件,其在第一位置与另一个相互间隔开并且提供用于入射电磁场的第一焦点,该第一焦点具有相对于多个元件以第一角入射的第一频率。 可调透镜还包括用于改变多个元件的焦点的致动单元,以提供具有相对于多个元件以第一角入射的第一频率的入射电磁场的第二焦点。

    Optically transduced MEMS magnetometer
    27.
    发明授权
    Optically transduced MEMS magnetometer 有权
    光学传感MEMS磁强计

    公开(公告)号:US08674689B1

    公开(公告)日:2014-03-18

    申请号:US13326139

    申请日:2011-12-14

    IPC分类号: G01R33/02

    CPC分类号: G01R33/0286 G01R33/032

    摘要: MEMS magnetometers with optically transduced resonator displacement are described herein. Improved sensitivity, crosstalk reduction, and extended dynamic range may be achieved with devices including a deflectable resonator suspended from the support, a first grating extending from the support and disposed over the resonator, a pair of drive electrodes to drive an alternating current through the resonator, and a second grating in the resonator overlapping the first grating to form a multi-layer grating having apertures that vary dimensionally in response to deflection occurring as the resonator mechanically resonates in a plane parallel to the first grating in the presence of a magnetic field as a function of the Lorentz force resulting from the alternating current. A plurality of such multi-layer gratings may be disposed across a length of the resonator to provide greater dynamic range and/or accommodate fabrication tolerances.

    摘要翻译: 这里描述了具有光学转换的谐振器位移的MEMS磁力计。 可以使用包括从支撑件悬挂的可偏转共振器的装置,从支撑件延伸并设置在谐振器上方的第一光栅,用于驱动通过谐振器的交流电流的一对驱动电极来实现灵敏度提高,串扰减小和扩展动态范围 ,并且谐振器中的第二光栅与第一光栅重叠以形成具有孔的多层光栅,其具有响应于在存在磁场的情况下谐振器在与第一光栅平行的平面中机械谐振时发生的偏转而尺寸变化的孔 由交流电产生的洛伦兹力的函数。 多个这样的多层光栅可以跨过谐振器的长度设置,以提供更大的动态范围和/或适应制造公差。