公开(公告)号：US07524072B2

公开(公告)日：2009-04-28

申请号：US11016059

申请日：2004-12-17

申请人： Timo Laufer ,  Johannes Zellner

发明人： Timo Laufer ,  Johannes Zellner

IPC分类号： G02B5/08 ,  G02B1/00

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G02B1/00 ,  G03F1/24 ,  G03F7/70858 ,  G03F7/70958 ,  G21K1/06 ,  G21K2201/065

摘要： There is provided an optical component. The optical component includes a material having a coefficient of thermal expansion α, where the coefficient of thermal expansion is dependent on location. The following applies to the location-dependent coefficient of thermal expansion: α= α±Δα, with Δα being the maximum deviation of the coefficient of thermal expansion from the mean value of the coefficient of thermal expansion α of the material. The following homogeneity condition applies to the material:  Δα  ≤ ( 0.14 + 0.1 · x + 390 x ) · ɛ _ Q .  with the progress of the lacation-dependent progress of the coefficient of thermal expansion being periodical with a wavelength x given in mm, and the thermal output which is absorbed by the optical component being designated by Q given in watts (W), the resulting emissivity being designated by ε, and |Δα|in units of ppb K .

公开(公告)号：US07557902B2

公开(公告)日：2009-07-07

申请号：US10577163

申请日：2003-09-27

申请人： Udo Dinger ,  Frank Eisert ,  Stefan Koehler ,  Andreas Ochse ,  Johannes Zellner ,  Martin Lowisch ,  Timo Laufer

发明人： Udo Dinger ,  Frank Eisert ,  Stefan Koehler ,  Andreas Ochse ,  Johannes Zellner ,  Martin Lowisch ,  Timo Laufer

IPC分类号： G03B27/54 ,  G06K7/10

CPC分类号： G03F7/70958 ,  B82Y10/00 ,  G02B1/00 ,  G02B5/0891 ,  G02B7/181 ,  G03F7/70891 ,  G21K1/062 ,  G21K2201/065

摘要： A projection objective 1 for short wavelengths, in particular for wavelengths λ

摘要翻译： 用于短波长的投影物镜1，特别是波长λ<157nm的投影物镜1设有多个相对于光轴5精确定位的镜子[M1，M2，M3，M4，M5和M6]。 镜子[M1，M2，M3，M4，M5和M6]具有多层涂层。 提供了至少两种不同的镜材料，其热膨胀系数的上升与热膨胀系数的过零区域中的温度的函数不同，特别是大小的符号。