公开(公告)号：US07511890B2

公开(公告)日：2009-03-31

申请号：US11347316

申请日：2006-02-06

申请人： Wilhelm Ulrich ,  David Shafer ,  Dieter Bader ,  Alexander Epple

发明人： Wilhelm Ulrich ,  David Shafer ,  Dieter Bader ,  Alexander Epple

IPC分类号： G02B9/00

CPC分类号： G02B13/143 ,  G02B27/0025 ,  G03F7/703

摘要： A refractive optical imaging system for imaging an object field arranged in an object surface of the imaging system into an image field arranged in an image surface of the imaging system on a demagnifying imaging scale has a multiplicity of optical elements which are configured and arranged such that a defined finite field curvature of the imaging system is set such that an object surface concavely curved relative to the imaging system is imaged into a flat image surface.

摘要翻译： 一种用于将布置在成像系统的物体表面中的物体区域成像为在成像系统的图像表面上布置在缩小成像刻度上的图像场域的折射光学成像系统具有多个光学元件，其被构造和布置成使得 将成像系统的限定的有限场曲率设定为使得相对于成像系统凹入弯曲的物体表面成像为平坦的图像表面。

公开(公告)号：US20080151365A1

公开(公告)日：2008-06-26

申请号：US12046067

申请日：2008-03-11

申请人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf Von Buenau ,  Hans-Juergen Mann ,  Alexander Epple

发明人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf Von Buenau ,  Hans-Juergen Mann ,  Alexander Epple

IPC分类号： G02B27/18

CPC分类号： G02B17/0804 ,  G02B17/08 ,  G02B17/0812 ,  G02B17/0844 ,  G02B17/0856 ,  G02B17/0892 ,  G03F7/70225

摘要： A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption.

公开(公告)号：US20060198028A1

公开(公告)日：2006-09-07

申请号：US11347316

申请日：2006-02-06

申请人： Wilhelm Ulrich ,  David Shafer ,  Dieter Bader ,  Alexander Epple

发明人： Wilhelm Ulrich ,  David Shafer ,  Dieter Bader ,  Alexander Epple

IPC分类号： G02B3/00

CPC分类号： G02B13/143 ,  G02B27/0025 ,  G03F7/703

摘要： A refractive optical imaging system for imaging an object field arranged in an object surface of the imaging system into an image field arranged in an image surface of the imaging system on a demagnifying imaging scale has a multiplicity of optical elements which are configured and arranged such that a defined finite field curvature of the imaging system is set such that an object surface concavely curved relative to the imaging system is imaged into a flat image surface.

公开(公告)号：US20060082905A1

公开(公告)日：2006-04-20

申请号：US10965664

申请日：2004-10-14

申请人： David Shafer ,  Alexander Epple ,  Wilhelm Ulrich

发明人： David Shafer ,  Alexander Epple ,  Wilhelm Ulrich

IPC分类号： G02B17/00

CPC分类号： G03F7/70225 ,  G02B17/08 ,  G02B17/0808 ,  G02B17/0856 ,  G02B17/0892

摘要： A catadioptric objective for a microlithography projection system has an in-line single-axis arrangement of lenses and reflectors. The catadioptric portion of the objective includes a catadioptric lens element with at least one reflective surface or surface portion reflecting light back into the lens, so that the catadioptric lens element interacts with light rays through reflection as well as refraction.

摘要翻译： 用于微光刻投影系统的反射折射物镜具有透镜和反射器的直列单轴布置。 物镜的折反射部分包括具有至少一个将光反射回透镜的反射表面或反射面的反射折射透镜元件，使得反射折射透镜元件通过反射和折射与光线相互作用。

公开(公告)号：US20050117224A1

公开(公告)日：2005-06-02

申请号：US10734623

申请日：2003-12-15

申请人： David Shafer ,  Alexander Epple ,  Aurelian Dodoc ,  Helmut Beierl ,  Wilhelm Ulrich

发明人： David Shafer ,  Alexander Epple ,  Aurelian Dodoc ,  Helmut Beierl ,  Wilhelm Ulrich

IPC分类号： G02B13/14 ,  G02B13/18 ,  G02B17/08 ,  G03F7/20 ,  G02B3/00 ,  G02B9/00

CPC分类号： G02B13/143 ,  G02B13/18 ,  G02B13/22 ,  G02B17/08 ,  G02B17/0812 ,  G02B17/0892 ,  G03F7/70225 ,  G03F7/70241 ,  G03F7/70275 ,  G03F7/70341 ,  G03F7/70958 ,  G03F7/70966

摘要： A catadioptric projection objective is used to project a pattern arranged in an object plane of the projection objective into an image plane of the projection objective with the formation of at least one real intermediate image and has an image-side numerical aperture NA>0.7. The projection objective comprises an optical axis and at least one catadioptric objective part that comprises a concave mirror and a first folding mirror. There are a first beam section running from the object plane to the concave mirror and a second beam section running from the concave mirror to the image plane. The first folding mirror is arranged with reference to the concave mirror in such a way that one of the beam sections is folded at the first folding mirror and the other beam section passes the first folding mirror without vignetting, the first beam section and the second beam section crossing one another in a cross-over region.

摘要翻译： 反射折射投影物镜用于将形成投影物镜的物平面中的图案投影到投影物镜的像平面中，形成至少一个实际中间像，并具有图像侧数值孔径NA> 0.7。 投影物镜包括光轴和包括凹面镜和第一折叠镜的至少一个反射折射物镜部分。 存在从物平面延伸到凹面镜的第一光束部分和从凹面镜向像面延伸的第二光束部分。 第一折叠镜相对于凹面镜布置成使得其中一个光束部分在第一折叠反射镜处被折叠，而另一个光束部分经过第一折叠镜而没有渐晕，第一光束部分和第二光束 横跨地区相互交叉。

公开(公告)号：US08355201B2

公开(公告)日：2013-01-15

申请号：US13081394

申请日：2011-04-06

申请人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf M. Von Buenau ,  Hans-Juergen Mann ,  Alexander Epple ,  Susanne Beder ,  Wolfgang Singer

发明人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf M. Von Buenau ,  Hans-Juergen Mann ,  Alexander Epple ,  Susanne Beder ,  Wolfgang Singer

IPC分类号： G02B17/00 ,  G02B21/00

CPC分类号： G02B17/0816 ,  G02B13/16 ,  G02B13/22 ,  G02B17/08 ,  G02B17/0804 ,  G02B17/0812 ,  G02B17/0892 ,  G02B21/02 ,  G02B21/33 ,  G03F7/70225 ,  G03F7/70275 ,  G03F7/70341 ,  G03F7/70958 ,  G03F7/70966

摘要： A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter Dmax, a maximum image field height Y′, and an image side numerical aperture NA; wherein COMP1=Dmax/(Y′·NA2) and wherein the condition COMP1

公开(公告)号：US08339701B2

公开(公告)日：2012-12-25

申请号：US12817628

申请日：2010-06-17

申请人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf Von Buenau ,  Hans-Juergen Mann ,  Alexander Epple

发明人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf Von Buenau ,  Hans-Juergen Mann ,  Alexander Epple

IPC分类号： G02B17/00 ,  G02B21/00

CPC分类号： G02B17/0804 ,  G02B17/08 ,  G02B17/0812 ,  G02B17/0844 ,  G02B17/0856 ,  G02B17/0892 ,  G03F7/70225

摘要： A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprises: a first objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part for imaging the first intermediate imaging into a second intermediate image; a third objective part for imaging the second intermediate imaging directly onto the image plane; wherein a first concave mirror having a first continuous mirror surface and at least one second concave mirror having a second continuous mirror surface are arranged upstream of the second intermediate image; pupil surfaces are formed between the object plane and the first intermediate image, between the first and the second intermediate image and between the second intermediate image and the image plane; and all concave mirrors are arranged optically remote from a pupil surface. The system has potential for very high numerical apertures at moderate lens material mass consumption.

摘要翻译： 用于将设置在投影物镜的物平面中的图案成像到投影物镜的像平面上的反射折射投射物镜包括：用于将设置在物平面中的图案成像为第一中间图像的第一物镜部分; 第二目标部分，用于将第一中间成像成像成第二中间图像; 用于将第二中间成像直接成像到图像平面上的第三目标部分; 其中具有第一连续镜面的第一凹面镜和具有第二连续镜面的至少一个第二凹面镜布置在所述第二中间图像的上游; 瞳孔表面形成在物平面与第一中间图像之间，第一和第二中间图像之间以及第二中间图像与图像平面之间; 并且所有凹面反射镜光学地远离光瞳表面布置。 该系统具有中等透镜材料质量消耗的非常高的数值孔径的潜力。

公开(公告)号：US08317345B2

公开(公告)日：2012-11-27

申请号：US13183823

申请日：2011-07-15

申请人： Hans-Juergen Mann ,  David Shafer ,  Wilhelm Ulrich

发明人： Hans-Juergen Mann ,  David Shafer ,  Wilhelm Ulrich

IPC分类号： G02B5/10

CPC分类号： G03F7/70233 ,  G02B13/143 ,  G02B17/061 ,  G02B17/0652 ,  G02B17/0657

摘要： In general, in one aspect, the invention features an objective arranged to image radiation from an object plane to an image plane, including a plurality of elements arranged to direct the radiation from the object plane to the image plane, wherein the objective has an image side numerical aperture of more than 0.55 and a maximum image side field dimension of more than 1 mm, and the objective is a catoptric objective.

摘要翻译： 通常，在一个方面，本发明的特征在于设置成将从物体平面到图像平面的辐射成像的目标，包括布置成将来自物体平面的辐射引导到图像平面的多个元件，其中物镜具有图像 侧面数值孔径大于0.55，最大像侧场尺寸大于1 mm，目标是一个反射目标。

公开(公告)号：US20120274919A1

公开(公告)日：2012-11-01

申请号：US13532282

申请日：2012-06-25

申请人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf Von Buenau ,  Hans-Juergen Mann ,  Alexander Epple

发明人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf Von Buenau ,  Hans-Juergen Mann ,  Alexander Epple

IPC分类号： G02B17/08 ,  G03B27/70 ,  G03F7/20 ,  G02B17/06

CPC分类号： G02B17/0804 ,  G02B17/08 ,  G02B17/0812 ,  G02B17/0844 ,  G02B17/0856 ,  G02B17/0892 ,  G03F7/70225

摘要： A reflection mirror assembly for use in a catadioptric imaging optical system includes two curved reflection mirrors, each including a reflection surface expressed by equation (a), where y represents height in a direction perpendicular to the optical axis, z represents distance (sag amount) along the optical axis from a tangent plane at a vertex of the reflection surface to a position on the reflection surface at height y, r represents a vertex curvature radius, and R represents a conical coefficient; z=(y2/r)/[1+{1−(1+κ)·y2/r2}1/2]  (a), wherein −1

摘要翻译： 用于反折射成像光学系统的反射镜组件包括两个弯曲反射镜，每个反射镜包括由等式（a）表示的反射表面，其中y表示垂直于光轴的方向的高度，z表示距离（下垂量） 沿着光轴从反射面的顶点处的切线平面到高度y处的反射面上的位置，r表示顶点曲率半径，R表示圆锥系数; z =（y2 / r）/ [1+ {1-（1 +＆kgr;）·y2 / r2} 1/2]（a），其中-1

公开(公告)号：US20120274918A1

公开(公告)日：2012-11-01

申请号：US13495763

申请日：2012-06-13

申请人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf Von Buenau ,  Hans-Juergen Mann ,  Alexander Epple

发明人： David Shafer ,  Wilhelm Ulrich ,  Aurelian Dodoc ,  Rudolf Von Buenau ,  Hans-Juergen Mann ,  Alexander Epple

IPC分类号： G02B17/08 ,  G03F7/20 ,  G03B27/70

CPC分类号： G02B17/0804 ,  G02B17/08 ,  G02B17/0812 ,  G02B17/0844 ,  G02B17/0856 ,  G02B17/0892 ,  G03F7/70225

摘要： A catadioptric projection objective for imaging a pattern onto an image plane includes: a first objective part for imaging the pattern into a first intermediate image; a second objective part for imaging the first intermediate image into a second intermediate image; and a third objective part for imaging the second intermediate image onto the image plane. A first concave mirror having a continuous mirror surface and a second concave mirror having a continuous mirror surface are upstream of the second intermediate image. A pupil surface is formed between the object plane and the first intermediate image, between the first and the second intermediate image, and between the second intermediate image and the image plane. A plate having essentially parallel plate surfaces is positioned in the first objective part near the pupil surface. At least one plate surface is aspherized to correct for aberrations.

摘要翻译： 用于将图案成像到图像平面上的反射折射投射物镜包括：用于将图案成像为第一中间图像的第一物镜部分; 第二目标部分，用于将第一中间图像成像为第二中间图像; 以及用于将第二中间图像成像到图像平面上的第三目标部分。 具有连续镜面的第一凹面镜和具有连续镜面的第二凹面镜位于第二中间图像的上游。 在物平面和第一中间图像之间，在第一和第二中间图像之间以及在第二中间图像和图像平面之间形成瞳孔表面。 具有基本上平行的板表面的板被定位在瞳孔表面附近的第一物镜部分中。 至少一个板表面被挤压以校正像差。