公开(公告)号：US06955974B2

公开(公告)日：2005-10-18

申请号：US10877714

申请日：2004-06-25

Applicant: Tae Hyeok Lee ,  Cheol Hwan Park ,  Dong Su Park ,  Ho Jin Cho ,  Eun A Lee

Inventor： Tae Hyeok Lee ,  Cheol Hwan Park ,  Dong Su Park ,  Ho Jin Cho ,  Eun A Lee

IPC: H01L21/76 ,  H01L21/762 ,  H01L21/8242

CPC classification number: H01L21/76224 ,  H01L27/10894

Abstract: A method for forming an isolation layer of a semiconductor device, which comprises the steps of: a) sequentially forming a pad oxide layer and a pad nitride layer on a silicon substrate; b) etching the pad nitride layer, the pad oxide layer, and the silicon substrate, thereby forming a trench; c) thermal-oxidizing the resultant substrate to form a sidewall oxide layer on a surface of the trench; d) nitrifying the sidewall oxide layer through the use of NH3 annealing; e) depositing a liner aluminum nitride layer on an entire surface of the silicon substrate inclusive of the nitrated sidewall oxide layer; f) depositing a buried oxide layer on the liner aluminum nitride layer to fill the trench; g) performing a chemical mechanical polishing process with respect to the buried oxide layer; and h) eliminating the pad nitride layer.

Abstract translation: 一种用于形成半导体器件的隔离层的方法，包括以下步骤：a）在硅衬底上依次形成焊盘氧化物层和衬垫氮化物层; b）蚀刻衬垫氮化物层，衬垫氧化物层和硅衬底，从而形成沟槽; c）热氧化所得衬底以在沟槽的表面上形成侧壁氧化物层; d）通过使用NH 3退火对侧壁氧化物层进行硝化; e）在包括所述硝化侧壁氧化物层的所述硅衬底的整个表面上沉积衬里氮化铝层; f）在衬里氮化铝层上沉积掩埋氧化物层以填充沟槽; g）对所述掩埋氧化物层进行化学机械抛光工艺; 以及h）消除所述衬垫氮化物层。

公开(公告)号：US06685522B2

公开(公告)日：2004-02-03

申请号：US09877864

申请日：2001-06-08

Applicant: In Jung Yun ,  Ho Jin Cho ,  Bong Woo Lee ,  Byung Hoon Kang ,  Kwang Yun Choi

Inventor： In Jung Yun ,  Ho Jin Cho ,  Bong Woo Lee ,  Byung Hoon Kang ,  Kwang Yun Choi

IPC: H01J942

CPC classification number: H01J9/42 ,  H01J29/76

Abstract: Disclosed is a product quality test in a winding step of the entire manufacturing process of a deflection yoke, which is a core part of a display device employing a cathode ray tube such as a color TV or a monitor, and in particular, a winding zig for measuring magnetic fields of a deflection yoke and a magnetic field measuring system of a deflection yoke using the winding zig. The winding zig and the system according to the invention include a plurality of magnetic field sensors mounted inside of the A-shaped winding zig, a digital signal generator for receiving output signals from the magnetic field sensors that sense magnetic field characteristics of a deflection coil wound around the A-shaped winding zig, amplifying the received signals, and converting the amplified signals to digital signals, a digital signal interface for converting the data outputted from the digital signal generator to serial data, and a transmitter for receiving signals processed as serial data by the digital signal interface, and transmitting the received signals.

Abstract translation: 公开了作为使用诸如彩色电视或监视器的阴极射线管的显示装置的核心部分的偏转线圈的整个制造过程中的卷绕步骤中的产品质量测试，特别地，绕组Zig 用于测量偏转线圈的磁场和使用绕组曲线的偏转线圈的磁场测量系统。 根据本发明的绕组Zig和系统包括安装在A形绕组Zig内部的多个磁场传感器，一个数字信号发生器，用于接收来自磁场传感器的输出信号，该磁场传感器感测绕组的偏转线圈的磁场特性 围绕A形绕组Zig放大接收到的信号，并将放大的信号转换成数字信号，用于将从数字信号发生器输出的数据转换为串行数据的数字信号接口，以及用于接收作为串行数据处理的信号的发送器 通过数字信号接口，并发送接收到的信号。

公开(公告)号：US06437522B1

公开(公告)日：2002-08-20

申请号：US09865749

申请日：2001-05-25

Applicant: Bong Mo Moon ,  Ho Jin Cho ,  Ick Chan Shim

Inventor： Bong Mo Moon ,  Ho Jin Cho ,  Ick Chan Shim

IPC: H01J2951

CPC classification number: H04N17/04 ,  H04N5/68 ,  H04N9/28

Abstract: The invention and method enable the astigmatism correction at each crossing point of a cross hatch pattern, thereby making high-resolution display possible. An appropriate voltage or current for controlling the magnetic field adjusting coils are generated from the correction data stored in a memory. The voltage or current generated are then applied to two poles, four poles or six poles during scanning of the screen.

Abstract translation: 本发明和方法能够在交叉阴影图案的每个交叉点处进行像散校正，从而使得高分辨率显示成为可能。 从存储在存储器中的校正数据产生用于控制磁场调节线圈的适当电压或电流。 所产生的电压或电流在屏幕扫描期间被施加到两极，四极或六极。