摘要:
The present invention provides a Micromirror Array Lens (MMAL) with fixed focal length to reproduce a designed surface having optical focusing power. The micro mechanical structures with surface profile shape memory are fabricated and released after fabrication. Each micromirror in the MMAL has its own motion by stiction force and/or electrostatic force while and/or after the releasing process. Once the designed surface is formed, the MMAL has an optical power as a lens.
摘要:
A compact image taking lens system with a lens-surfaced prism of the present invention comprises a prism, an aperture stop, a first lens element, a second lens element, reflecting mirror surface, and image surface, optionally an infrared cut-off filter. By introducing a lens-surfaced prism, the compact image taking lens system with a lens-surfaced prism of the present invention has many advantages over the prior arts in the field of invention, such as compactness in thickness, small number of optical elements, high performance of optical quality, enough space for optional elements such as an infrared cut-off filter and diversity in optical geometries.
摘要:
The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference and with no electrical conflict. The micromirror array in the present invention can reproduce various surfaces including spherical, aspherical (e.g. parabolic, hyperbolic, elliptical, etc.), anamorphic, other than rotational symmetric profiles. With the newly introduced non-fixed underlying structure, the present invention makes possible for a micromirror array to generate a desired optical surface profile by simple motion controls and to improve structural stability, simplicity, flexibility, and efficiency in motion and motion control.
摘要:
The present invention provides an optical micromirror device and their array device and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the micromirror array device by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.
摘要:
A compact image taking lens system with a lens-surfaced prism of the present invention comprises a prism, an aperture stop, a first lens element, a second lens element, reflecting mirror surface, and image surface, optionally an infrared cut-off filter. By introducing a lens-surfaced prism, the compact image taking lens system with a lens-surfaced prism of the present invention has many advantages over the prior arts in the field of invention, such as compactness in thickness, small number of optical elements, high performance of optical quality, enough space for optional elements such as an infrared cut-off filter and diversity in optical geometries.
摘要:
The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference and with no electrical conflict. The micromirror array in the present invention can reproduce various surfaces including spherical, aspherical (e.g. parabolic, hyperbolic, elliptical, etc.), anamorphic, other than rotational symmetric profiles. With the newly introduced non-fixed underlying structure, the present invention makes possible for a micromirror array to generate a desired optical surface profile by simple motion controls and to improve structural stability, simplicity, flexibility, and efficiency in motion and motion control.
摘要:
The present invention provides a micromirror array device specially Micromirror Array Lens device structure and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the Micromirror Array Lens by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.
摘要:
A MEMS (micro electro mechanical system) actuator with discretely controlled multiple motions comprises bottom layer, stepper plate, support, and motion plate. The multiple motion of the motion plate is generated by the electrostatically actuated stepper plates and geometrically predetermined supports. By introducing the MEMS actuator with discretely controlled multiple motions, simple motion control can be achieved by digital controlling and only single voltage is needed for motion control of the motion plate.
摘要:
The present invention provides a micromirror array device specially Micromirror Array Lens device structure and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the Micromirror Array Lens by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.
摘要:
The present invention provides an automatic focus imaging system comprising a lens unit, an image sensor, and a Micro-Electro-Mechanical System (MEMS) unit fabricated by microfabrication technology to improve the portability and focusing speed of the automatic focus imaging system. The MEMS unit for automatic focusing comprises a substrate having a control circuitry, at least one reflective surface movably connected to the substrate, and at least one actuation unit comprising a micro-actuator having a large in-plane translation and at least one micro-converter configured to convert the large in-plane translation of the micro-actuator to the large out-of-plane translation of the reflective surface. The MEMS unit changes a distance between lens unit and the image sensor by controlling the out-of-plane translation of the reflective surface in order to form an in-focus image on the image sensor.