Micromirror array lens with fixed focal length
    21.
    发明授权
    Micromirror array lens with fixed focal length 有权
    具有固定焦距的微镜阵列透镜

    公开(公告)号:US07777959B2

    公开(公告)日:2010-08-17

    申请号:US11426565

    申请日:2006-06-26

    IPC分类号: G02B27/10

    CPC分类号: G02B26/0833

    摘要: The present invention provides a Micromirror Array Lens (MMAL) with fixed focal length to reproduce a designed surface having optical focusing power. The micro mechanical structures with surface profile shape memory are fabricated and released after fabrication. Each micromirror in the MMAL has its own motion by stiction force and/or electrostatic force while and/or after the releasing process. Once the designed surface is formed, the MMAL has an optical power as a lens.

    摘要翻译: 本发明提供一种具有固定焦距的微镜阵列透镜(MMAL),以再现具有光学聚焦能力的设计表面。 具有表面轮廓形状记忆的微机械结构在制造之后被制造和释放。 在释放过程中和/或之后,MMAL中的每个微反射镜都通过静力和/或静电力自身运动。 一旦形成了设计的表面,则MMAL具有作为透镜的光学功率。

    COMPACT IMAGE TAKING LENS SYSTEM WITH A LENS-SURFACED PRISM
    22.
    发明申请
    COMPACT IMAGE TAKING LENS SYSTEM WITH A LENS-SURFACED PRISM 有权
    具有镜头表面的PRISM的紧凑型图像采集镜头系统

    公开(公告)号:US20090027780A1

    公开(公告)日:2009-01-29

    申请号:US11781907

    申请日:2007-07-23

    IPC分类号: G02B17/08 G02B13/18

    CPC分类号: G02B17/086 G02B5/04 G02B13/18

    摘要: A compact image taking lens system with a lens-surfaced prism of the present invention comprises a prism, an aperture stop, a first lens element, a second lens element, reflecting mirror surface, and image surface, optionally an infrared cut-off filter. By introducing a lens-surfaced prism, the compact image taking lens system with a lens-surfaced prism of the present invention has many advantages over the prior arts in the field of invention, such as compactness in thickness, small number of optical elements, high performance of optical quality, enough space for optional elements such as an infrared cut-off filter and diversity in optical geometries.

    摘要翻译: 具有本发明的透镜表面棱镜的紧凑型摄像镜头系统包括棱镜,孔径光阑,第一透镜元件,第二透镜元件,反射镜表面和图像表面,可选地是红外截止滤光器。 通过引入透镜表面棱镜,本发明的具有透镜表面棱镜的紧凑型摄像透镜系统与现有技术领域相比具有许多优点,例如厚度紧凑,光学元件数量少,高 光学质量的表现,可选元件足够的空间,例如红外截止滤光片和光学几何形状的多样性。

    ARRAY OF MICROMIRRORS WITH NON-FIXED UNDERLYING STRUCTURES
    23.
    发明申请
    ARRAY OF MICROMIRRORS WITH NON-FIXED UNDERLYING STRUCTURES 有权
    具有非固定结构的微型扫描仪阵列

    公开(公告)号:US20080239442A1

    公开(公告)日:2008-10-02

    申请号:US11693698

    申请日:2007-03-29

    IPC分类号: G02B26/06 G02B26/08

    CPC分类号: G02B26/0841 G02B26/06

    摘要: The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference and with no electrical conflict. The micromirror array in the present invention can reproduce various surfaces including spherical, aspherical (e.g. parabolic, hyperbolic, elliptical, etc.), anamorphic, other than rotational symmetric profiles. With the newly introduced non-fixed underlying structure, the present invention makes possible for a micromirror array to generate a desired optical surface profile by simple motion controls and to improve structural stability, simplicity, flexibility, and efficiency in motion and motion control.

    摘要翻译: 本发明公开了一种具有非固定底层结构的微镜阵列,其可以被定向成具有不具有结构和机械干涉并且没有电冲突的主旋转轴线。 本发明中的微镜阵列可以再现除了旋转对称轮廓之外的包括球形,非球面(例如抛物线,双曲线,椭圆形等),变形的各种表面。 利用新引入的非固定底层结构,本发明使得微镜阵列能够通过简单的运动控制产生期望的光学表面轮廓并且提高运动和运动控制的结构稳定性,简单性,灵活性和效率。

    Micromirror array device comprising encapsulated reflective metal layer and method of making the same
    24.
    发明申请
    Micromirror array device comprising encapsulated reflective metal layer and method of making the same 有权
    包含反射金属层的微镜阵列器件及其制造方法

    公开(公告)号:US20080074727A1

    公开(公告)日:2008-03-27

    申请号:US11534620

    申请日:2006-09-22

    IPC分类号: G02B26/00

    CPC分类号: G02B26/0841

    摘要: The present invention provides an optical micromirror device and their array device and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the micromirror array device by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.

    摘要翻译: 本发明提供了一种光学微镜器件及其阵列器件及其制造方法。 通过引入具有高反射金属层的次涂层和涂层,微镜的反射层被保护免受环境的影响,微机械结构的氧化,降解,酸,碱和电偶腐蚀。 此外,新的涂层结构通过减少金属层的反射率的降低,通过在光学非有效区域中提供抗反射以及通过保护微机械结构来增强微镜阵列器件的性能。

    Compact image taking lens system with a lens-surfaced prism
    25.
    发明授权
    Compact image taking lens system with a lens-surfaced prism 有权
    紧凑型摄像镜头系统,带透镜表面棱镜

    公开(公告)号:US07605988B2

    公开(公告)日:2009-10-20

    申请号:US11781907

    申请日:2007-07-23

    IPC分类号: G02B17/00 G02B3/00

    CPC分类号: G02B17/086 G02B5/04 G02B13/18

    摘要: A compact image taking lens system with a lens-surfaced prism of the present invention comprises a prism, an aperture stop, a first lens element, a second lens element, reflecting mirror surface, and image surface, optionally an infrared cut-off filter. By introducing a lens-surfaced prism, the compact image taking lens system with a lens-surfaced prism of the present invention has many advantages over the prior arts in the field of invention, such as compactness in thickness, small number of optical elements, high performance of optical quality, enough space for optional elements such as an infrared cut-off filter and diversity in optical geometries.

    摘要翻译: 具有本发明的透镜表面棱镜的紧凑型摄像镜头系统包括棱镜,孔径光阑,第一透镜元件,第二透镜元件,反射镜表面和图像表面,可选地是红外截止滤光器。 通过引入透镜表面棱镜,本发明的具有透镜表面棱镜的紧凑型摄像透镜系统与现有技术领域相比具有许多优点,例如厚度紧凑,光学元件数量少,高 光学质量的表现,可选元件足够的空间,例如红外截止滤光片和光学几何形状的多样性。

    Array of micromirrors with non-fixed underlying structures
    26.
    发明授权
    Array of micromirrors with non-fixed underlying structures 有权
    具有非固定底层结构的微镜阵列

    公开(公告)号:US07605964B2

    公开(公告)日:2009-10-20

    申请号:US11693698

    申请日:2007-03-29

    IPC分类号: G02B26/08

    CPC分类号: G02B26/0841 G02B26/06

    摘要: The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference and with no electrical conflict. The micromirror array in the present invention can reproduce various surfaces including spherical, aspherical (e.g. parabolic, hyperbolic, elliptical, etc.), anamorphic, other than rotational symmetric profiles. With the newly introduced non-fixed underlying structure, the present invention makes possible for a micromirror array to generate a desired optical surface profile by simple motion controls and to improve structural stability, simplicity, flexibility, and efficiency in motion and motion control.

    摘要翻译: 本发明公开了一种具有非固定底层结构的微镜阵列,其可以被定向成具有不具有结构和机械干涉并且没有电冲突的主旋转轴线。 本发明中的微镜阵列可以再现除了旋转对称轮廓之外的包括球形,非球面(例如抛物线,双曲线,椭圆形等),变形的各种表面。 利用新引入的非固定底层结构,本发明使得微镜阵列能够通过简单的运动控制产生期望的光学表面轮廓并且提高运动和运动控制的结构稳定性,简单性,灵活性和效率。

    Micromirror array lens with encapsulation of reflective metal layer and method of making the same
    27.
    发明授权
    Micromirror array lens with encapsulation of reflective metal layer and method of making the same 有权
    具有反射金属层封装的微镜阵列透镜及其制造方法

    公开(公告)号:US07589884B2

    公开(公告)日:2009-09-15

    申请号:US11534613

    申请日:2006-09-22

    IPC分类号: G02B26/00 G02F1/00 G02B7/182

    CPC分类号: G02B26/0841

    摘要: The present invention provides a micromirror array device specially Micromirror Array Lens device structure and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the Micromirror Array Lens by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.

    摘要翻译: 本发明提供一种微镜阵列器件,特别是微镜阵列透镜器件的结构及其制造方法。 通过引入具有高反射金属层的次涂层和涂层,微镜的反射层被保护免受环境的影响,微机械结构的氧化,降解,酸,碱和电偶腐蚀。 此外,新的涂层结构通过减少金属层的反射率的降低,通过在光学无效区域中提供抗反射以及通过保护微机械结构来增强微镜阵列透镜的性能。

    MEMS ACTUATOR WITH DISCRETELY CONTROLLED MULTIPLE MOTIONS
    28.
    发明申请
    MEMS ACTUATOR WITH DISCRETELY CONTROLLED MULTIPLE MOTIONS 有权
    具有异步控制的多动作的MEMS执行器

    公开(公告)号:US20080309190A1

    公开(公告)日:2008-12-18

    申请号:US11762683

    申请日:2007-06-13

    IPC分类号: H02N1/00 G05B19/19

    摘要: A MEMS (micro electro mechanical system) actuator with discretely controlled multiple motions comprises bottom layer, stepper plate, support, and motion plate. The multiple motion of the motion plate is generated by the electrostatically actuated stepper plates and geometrically predetermined supports. By introducing the MEMS actuator with discretely controlled multiple motions, simple motion control can be achieved by digital controlling and only single voltage is needed for motion control of the motion plate.

    摘要翻译: 具有离散控制的多个运动的MEMS(微机电系统)致动器包括底层,步进板,支撑和运动板。 运动板的多重运动由静电驱动的步进板和几何预定的支撑件产生。 通过引入具有离散控制的多个运动的MEMS致动器,可以通过数字控制实现简单的运动控制,并且仅需要运动控制板的单个电压。

    Micromirror array lens with encapsulation of reflective metal layer and method of making the same
    29.
    发明申请
    Micromirror array lens with encapsulation of reflective metal layer and method of making the same 有权
    具有反射金属层封装的微镜阵列透镜及其制造方法

    公开(公告)号:US20080074726A1

    公开(公告)日:2008-03-27

    申请号:US11534613

    申请日:2006-09-22

    IPC分类号: G02B26/00

    CPC分类号: G02B26/0841

    摘要: The present invention provides a micromirror array device specially Micromirror Array Lens device structure and method for making the same. By introducing a sub coating layer and an over coating layer with a high reflective metal layer, the reflective layer of the micromirrors is protected from environmental circumstances, oxidation, degradation, acid, base, and galvanic corrosion of the micro-mechanical structures. Also the new coating structure enhances the performance of the Micromirror Array Lens by reducing degradation of the reflectivity of the metal layer, by providing anti-reflection in the optically non-effective area, and by protecting the micro-mechanical structures.

    摘要翻译: 本发明提供一种微镜阵列器件,特别是微镜阵列透镜器件的结构及其制造方法。 通过引入具有高反射金属层的次涂层和涂层,微镜的反射层被保护免受环境的影响,微机械结构的氧化,降解,酸,碱和电偶腐蚀。 此外,新的涂层结构通过减少金属层的反射率的降低,通过在光学无效区域中提供抗反射以及通过保护微机械结构来增强微镜阵列透镜的性能。

    Automatic focus imaging system using out-of-plane translation of an MEMS reflective surface
    30.
    发明授权
    Automatic focus imaging system using out-of-plane translation of an MEMS reflective surface 有权
    使用MEMS反射表面的平面外平移的自动对焦成像系统

    公开(公告)号:US08345146B2

    公开(公告)日:2013-01-01

    申请号:US12569864

    申请日:2009-09-29

    IPC分类号: H04N5/232 G03B13/00

    摘要: The present invention provides an automatic focus imaging system comprising a lens unit, an image sensor, and a Micro-Electro-Mechanical System (MEMS) unit fabricated by microfabrication technology to improve the portability and focusing speed of the automatic focus imaging system. The MEMS unit for automatic focusing comprises a substrate having a control circuitry, at least one reflective surface movably connected to the substrate, and at least one actuation unit comprising a micro-actuator having a large in-plane translation and at least one micro-converter configured to convert the large in-plane translation of the micro-actuator to the large out-of-plane translation of the reflective surface. The MEMS unit changes a distance between lens unit and the image sensor by controlling the out-of-plane translation of the reflective surface in order to form an in-focus image on the image sensor.

    摘要翻译: 本发明提供了一种自动对焦成像系统,其包括透镜单元,图像传感器和通过微细加工技术制造的微机电系统(MEMS)单元,以改善自动聚焦成像系统的便携性和聚焦速度。 用于自动聚焦的MEMS单元包括具有控制电路的基板,至少一个可移动地连接到基板的反射表面,以及至少一个致动单元,其包括具有大的平面内平移的微致动器和至少一个微转换器 被配置为将微致动器的大的平面内平移转换成反射表面的大的平面外平面。 MEMS单元通过控制反射表面的平面外平面来改变透镜单元和图像传感器之间的距离,以便在图像传感器上形成对焦图像。