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21.发明授权公开(公告)号：US06912893B2
公开(公告)日：2005-07-05
申请号：US10417506
申请日：2003-04-17
CPC分类号： G01Q70/04 , Y10S977/873
摘要： A method of operating a probe-based instrument includes providing a probe assembly and a probe holder and oscillating a probe of the probe assembly with an actuator that generates oscillation energy. The method also includes mounting the probe assembly on the probe holder so as to lessen interference with the oscillation energy coupled to the tip of the probe. A corresponding probe assembly includes a base having two substantially opposed surfaces and a cantilever extending from the base and supporting a tip. The probe assembly is mounted in a probe holder such that a probe holder surface contacts one of the opposed surfaces. The one opposed surface preferably includes at least one opening such that the surface area of the one opposed surface is substantially less than the surface area of the probe holder surface.
摘要翻译： 操作基于探针的仪器的方法包括提供探针组件和探针保持器，并且用产生振荡能量的致动器振荡探针组件的探针。 该方法还包括将探针组件安装在探针支架上，以便减少与耦合到探针尖端的振荡能量的干扰。 相应的探针组件包括具有两个基本上相对的表面的基部和从基部延伸并支撑尖端的悬臂。 探针组件安装在探针保持器中，使得探针保持器表面接触相对表面之一。 一个相对表面优选地包括至少一个开口，使得一个相对表面的表面积基本上小于探针保持器表面的表面积。
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公开(公告)号：US06810720B2
公开(公告)日：2004-11-02
申请号：US10310546
申请日：2002-12-05
IPC分类号： G01B528
CPC分类号： G01Q60/34 , G01Q10/045 , G01Q10/065 , Y10S977/849 , Y10S977/851 , Y10S977/863 , Y10S977/869 , Y10S977/875 , Y10S977/881
摘要： An AFM that combines an AFM Z position actuator and a self-actuated Z position cantilever (both operable in cyclical mode and contact mode), with appropriate nested feedback control circuitry to achieve high-speed imaging and accurate Z position measurements. A preferred embodiment of an AFM for analyzing a surface of a sample in either ambient air or fluid includes a self-actuated cantilever having a Z-positioning element integrated therewith and an oscillator that oscillates the self-actuated cantilever at a frequency generally equal to a resonant frequency of the self-actuated cantilever and at an oscillation amplitude generally equal to a setpoint value. The AFM includes a first feedback circuit nested within a second feedback circuit, wherein the first feedback circuit generates a cantilever control signal in response to vertical displacement of the self-actuated cantilever during a scanning operation, and the second feedback circuit is responsive to the cantilever control signal to generate a position control signal. A Z position actuator is also included within the second feedback circuit and is responsive to the position control signal to position the sample. In operation, preferably, the cantilever control signal alone is indicative of the topography of the sample surface. In a further embodiment, the first feedback circuit includes an active damping circuit for modifying the quality factor (“Q”) of the cantilever resonance to optimize the bandwidth of the cantilever response.
摘要翻译： AFM将AFM Z位置执行器和自动Z位置悬臂（可循环模式和接触模式）两者兼容，并配有适当的嵌套反馈控制电路，实现高速成像和精确的Z位置测量。 用于在环境空气或流体中分析样品表面的AFM的优选实施例包括具有与其集成的Z定位元件的自动致动悬臂和振荡器，该振荡器以大致等于 自激式悬臂的谐振频率和大致等于设定值的振荡幅度。 AFM包括嵌套在第二反馈电路内的第一反馈电路，其中第一反馈电路在扫描操作期间响应于自致动悬臂的垂直位移而产生悬臂控制信号，并且第二反馈电路响应于悬臂 控制信号以产生位置控制信号。 Z位置致动器还包括在第二反馈电路内，并且响应于位置控制信号来定位样品。 在操作中，优选地，悬臂控制信号单独指示样品表面的形貌。 在另一实施例中，第一反馈电路包括用于修改悬臂谐振的质量因子（“Q”）的主动阻尼电路，以优化悬臂响应的带宽。
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公开(公告)号：US06530266B1
公开(公告)日：2003-03-11
申请号：US09476163
申请日：1999-12-30
IPC分类号： G01B528
CPC分类号： G01Q60/34 , G01Q10/045 , G01Q10/065 , Y10S977/849 , Y10S977/851 , Y10S977/863 , Y10S977/869 , Y10S977/875 , Y10S977/881
摘要： An AFM that combines an AFM Z position actuator and a self-actuated Z position cantilever (both operable in cyclical mode and contact mode), with appropriate nested feedback control circuitry to achieve high-speed imaging and accurate Z position measurements. A preferred embodiment of an AFM for analyzing a surface of a sample in either ambient air or fluid includes a self-actuated cantilever having a Z-positioning element integrated therewith and an oscillator that oscillates the self-actuated cantilever at a frequency generally equal to a resonant frequency of the self-actuated cantilever and at an oscillation amplitude generally equal to a setpoint value. The AFM includes a first feedback circuit nested within a second feedback circuit, wherein the first feedback circuit generates a cantilever control signal in response to vertical displacement of the self-actuated cantilever during a scanning operation, and the second feedback circuit is responsive to the cantilever control signal to generate a position control signal. A Z position actuator is also included within the second feedback circuit and is responsive to the position control signal to position the sample. In operation, preferably, the cantilever control signal alone is indicative of the topography of the sample surface. In a further embodiment, the first feedback circuit includes an active damping circuit for modifying the quality factor (“Q”) of the cantilever resonance to optimize the bandwidth of the cantilever response.
摘要翻译： AFM将AFM Z位置执行器和自动Z位置悬臂（可循环模式和接触模式）两者兼容，并配有适当的嵌套反馈控制电路，实现高速成像和精确的Z位置测量。 用于在环境空气或流体中分析样品表面的AFM的优选实施例包括具有与其集成的Z定位元件的自动致动悬臂和振荡器，该振荡器以大致等于 自激式悬臂的谐振频率和大致等于设定值的振荡幅度。 AFM包括嵌套在第二反馈电路内的第一反馈电路，其中第一反馈电路在扫描操作期间响应于自致动悬臂的垂直位移而产生悬臂控制信号，并且第二反馈电路响应于悬臂 控制信号以产生位置控制信号。 Z位置致动器还包括在第二反馈电路内，并且响应于位置控制信号来定位样品。 在操作中，优选地，悬臂控制信号单独指示样品表面的形貌。 在另一实施例中，第一反馈电路包括用于修改悬臂谐振的质量因子（“Q”）的主动阻尼电路，以优化悬臂响应的带宽。
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