公开(公告)号：US20100146756A1

公开(公告)日：2010-06-17

申请号：US12712442

申请日：2010-02-25

申请人： Tae-kyung LEE ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

发明人： Tae-kyung LEE ,  Jae-woo Chung ,  Kyo-yeol Lee ,  Hwa-sun Lee ,  Seung-mo Lim ,  Jae-chang Lee

IPC分类号： H01L41/22

CPC分类号： B41J2/14233 ,  B41J2002/14491 ,  Y10T29/42 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/4908

摘要： A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.

摘要翻译： 喷墨头的压电致动器和形成压电致动器的方法。 压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。 压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端 并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。 上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。 压电层可以具有与压力室大致相同的长度。 支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。 上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。

公开(公告)号：US20080129799A1

公开(公告)日：2008-06-05

申请号：US11775424

申请日：2007-07-10

申请人： Tae-kyung Lee ,  Sang-kwon Wee ,  Jae-woo Chung ,  Tae-woon Cha ,  Jae-chang Lee

发明人： Tae-kyung Lee ,  Sang-kwon Wee ,  Jae-woo Chung ,  Tae-woon Cha ,  Jae-chang Lee

IPC分类号： B41J2/045

CPC分类号： B41J2/14233 ,  B41J2/1433 ,  B41J2002/14475

摘要： A piezoelectric type inkjet printhead includes an upper substrate including a pressure chamber to be filled with ink that is to be ejected, a reservoir to store ink that flowed in from an ink container, a restrictor connect the reservoir to one end of the pressure chamber, an intermediate substrate comprising a damper formed on a portion of the intermediate substrate, which corresponds to other end of the pressure chamber, a lower substrate comprising a nozzle to eject ink and formed in a portion of the lower substrate, which corresponds to the damper, a hydrophobic layer formed on a bottom of the lower substrate, and a piezoelectric actuator formed on the upper substrate to supply driving power to eject ink to the pressure chamber, wherein the nozzle is formed in the lower substrate at a predetermined depth from a bottom surface of the lower substrate.

摘要翻译： 压电型喷墨打印头包括：上部基板，其包括要填充要喷射的墨的压力室;存储器，用于存储从墨水容器流入的墨水;限制器将储存器连接到压力室的一端; 中间基板，包括形成在所述中间基板的与所述压力室的另一端相对应的部分上的阻尼器，下部基板，包括用于喷射墨水并形成在所述下部基板的对应于所述阻尼器的部分中的喷嘴， 形成在所述下基板的底部上的疏水层，以及形成在所述上基板上以提供驱动力以将油墨喷射到所述压力室的压电致动器，其中所述喷嘴形成在所述下基板中， 的下基板。

公开(公告)号：US07364275B2

公开(公告)日：2008-04-29

申请号：US10805430

申请日：2004-03-22

申请人： Seung-mo Lim ,  Jae-woo Chung ,  Jae-chang Lee

发明人： Seung-mo Lim ,  Jae-woo Chung ,  Jae-chang Lee

IPC分类号： B41J2/45 ,  H01L41/24 ,  H01L41/08

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1646 ,  H01L41/0973 ,  H01L41/314 ,  Y10T29/42

摘要： A piezoelectric actuator for providing a driving force to a pressure chamber of an ink-jet printhead for ejecting ink by deforming a vibration plate, the vibration plate forming an upper wall of the pressure chamber, the piezoelectric actuator including a lower electrode formed on the vibration plate, a piezoelectric film having either: (a) peripheral portions, the piezoelectric film formed on the lower electrode at a position that corresponds to the pressure chamber and having a space between the peripheral portions and the lower electrode, or (b) a lateral surface, the piezoelectric film formed on the lower electrode at a position that corresponds to the pressure chamber, the lateral surface of the piezoelectric film substantially forming a right angle with respect to a top surface of the lower electrode, and an upper electrode formed on the piezoelectric film for applying a voltage to the piezoelectric film.

摘要翻译： 一种压电致动器，用于通过使振动板变形来向喷墨打印头的压力室提供驱动力，所述振动板形成所述压力室的上壁，所述压电致动器包括形成在所述振动上的下电极 压电薄膜具有：（a）周边部分，在与电解槽对应的位置处形成在下部电极上并且在周边部分和下部电极之间具有空间的压电薄膜，或者（b）横向 形成在下电极上的与压力室相对应的位置处的压电膜，压电膜的侧表面相对于下电极的上表面基本形成直角，以及上电极 用于向压电膜施加电压的压电膜。

公开(公告)号：US20070019042A1

公开(公告)日：2007-01-25

申请号：US11540541

申请日：2006-10-02

申请人： Jae-woo Chung ,  Jae-chang Lee ,  Seung-mo Lim

发明人： Jae-woo Chung ,  Jae-chang Lee ,  Seung-mo Lim

IPC分类号： B41J2/045

CPC分类号： B41J2/161 ,  B41J2/1618 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2002/14306 ,  B41J2002/14475

摘要： A piezoelectric ink-jet printhead and a method for manufacturing the same, wherein the piezoelectric ink-jet printhead is formed by stacking three monocrystalline silicon substrates on one another and adhering them to one another. The three substrates include an upper substrate, through which an ink supply hole is formed and a pressure chamber is formed on a bottom surface thereof; an intermediate substrate, in which an ink reservoir and a damper are formed; and a lower substrate, in which a nozzle is formed. A piezoelectric actuator is monolithically formed on the upper substrate. A restrictor, which connects the ink reservoir to the pressure chamber in flow communication, may be formed on the upper substrate or intermediate substrate.

摘要翻译： 一种压电喷墨打印头及其制造方法，其中压电喷墨打印头通过将三个单晶硅基板彼此堆叠并将它们彼此粘合而形成。 三个基板包括上基板，在其上形成有供墨孔，在其底面上形成有压力室; 中间基板，其中形成有墨水储存器和阻尼器; 以及形成有喷嘴的下基板。 压电致动器整体地形成在上基板上。 可以在上基板或中间基板上形成将油墨储存器与流动连通的压力室连接的限流器。

公开(公告)号：US20050190232A1

公开(公告)日：2005-09-01

申请号：US11064834

申请日：2005-02-25

申请人： Jae-chang Lee ,  Jung-min Oh ,  Jae-woo Chung ,  Jong-beom Kim ,  Seung-mo Lim

发明人： Jae-chang Lee ,  Jung-min Oh ,  Jae-woo Chung ,  Jong-beom Kim ,  Seung-mo Lim

IPC分类号： B41J2/045 ,  B41J2/055 ,  B41J2/135 ,  B41J2/14 ,  B41J2/16

CPC分类号： B41J2/161 ,  B41J2/14137 ,  B41J2/14233 ,  B41J2/162 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2/1643 ,  B41J2/1646

摘要： In a piezoelectric ink-jet printhead, and a method of manufacturing a nozzle plate, the piezoelectric ink-jet printhead includes a flow path plate having an ink flow path including pressure chambers to be filled with ink to be ejected, a piezoelectric actuator formed on an upper surface of the flow path plate and for supplying a driving force for ink ejection to the pressure chambers, and a nozzle plate bonded to a lower surface of the flow path plate including nozzles for ejecting ink from the pressure chambers bored through the nozzle plate. The printhead may further include a heater formed on a lower surface of the nozzle plate for heating ink in the ink flow path and/or a temperature detector formed on a lower surface of the nozzle plate or on an upper surface of the flow path plate.

摘要翻译： 在压电喷墨打印头和喷嘴板的制造方法中，压电喷墨打印头包括流路板，该流路板具有墨流路，该墨流路包括填充有要喷射的墨的压力室，形成在 流路板的上表面，并且用于向压力室供给用于喷墨的驱动力;以及喷嘴板，其结合到流路板的下表面，该喷嘴板包括用于从通过喷嘴板钻出的压力室喷射油墨的喷嘴 。 打印头还可以包括形成在喷嘴板的下表面上的加热器，用于加热油墨流路中的油墨和/或形成在喷嘴板的下表面上或在流路板的上表面上形成的温度检测器。

公开(公告)号：US07926910B2

公开(公告)日：2011-04-19

申请号：US11764844

申请日：2007-06-19

申请人： Tae-woon Cha ,  Young-nam Kwon ,  Jae-chang Lee

发明人： Tae-woon Cha ,  Young-nam Kwon ,  Jae-chang Lee

IPC分类号： B41J2/135

CPC分类号： B41J2/1606 ,  B41J2/162 ,  B41J2/164

摘要： A nozzle plate for an inkjet head and a method of manufacturing the nozzle plate includes a silicon substrate having a nozzle, a thermally oxidized silicon layer formed on an outer surface of the silicon substrate and an inner wall of the nozzle, an adhesion layer deposited on the thermally oxidized silicon layer formed on the outer surface of the silicon substrate and formed of silicon oxide, and an ink-repellent coating layer deposited on the adhesion layer.

摘要翻译： 用于喷墨头的喷嘴板和喷嘴板的制造方法包括具有喷嘴的硅基板，形成在硅基板的外表面上的热氧化硅层和喷嘴的内壁，粘合层沉积在 形成在硅衬底的外表面上并由氧化硅形成的热氧化硅层和沉积在粘合层上的拒墨涂层。

公开(公告)号：US20100319195A1

公开(公告)日：2010-12-23

申请号：US12852613

申请日：2010-08-09

申请人： Jong-beom Kim ,  Jae-chang Lee

发明人： Jong-beom Kim ,  Jae-chang Lee

IPC分类号： B23P17/00

CPC分类号： B41J2/1628 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  Y10T29/49401

摘要： Provided are a piezoelectric inkjet printhead and a method of manufacturing the same. The piezoelectric inkjet printhead includes first and second single-crystalline silicon substrates. An ink flow path is disposed in a first surface of the first substrate. The ink flow path includes an ink introduction port, a manifold for supplying ink, a plurality of pressure chambers filled with ink to be ejected, a plurality of restrictors for connecting the manifold with the plurality of pressure chambers, respectively, and a plurality of nozzles for ejecting ink. The second substrate is bonded to the first substrate to thereby complete the ink flow path. A plurality of piezoelectric actuators are disposed on a second surface of the first substrate to correspond to each of the pressure chambers and provide drivability required for ejecting ink to the respective pressure chambers. In this construction, aligning the first and second substrates is unnecessary, so that the manufacturing process can be simplified, the manufacturing cost can be reduced, and ink ejecting performance can be improved.

摘要翻译： 提供一种压电喷墨打印头及其制造方法。 压电喷墨打印头包括第一和第二单晶硅衬底。 墨流路设置在第一基板的第一表面中。 墨水流路包括墨水引入口，用于供应墨水的歧管，填充有待喷射墨水的多个压力室，分别用于将歧管与多个压力室连接的多个限制器，以及多个喷嘴 用于喷墨。 第二基板结合到第一基板，从而完成油墨流动路径。 多个压电致动器设置在第一基板的第二表面上以对应于每个压力室，并提供将油墨喷射到各个压力室所需的驱动能力。 在这种结构中，不需要对准第一和第二基板，从而可以简化制造工艺，可以降低制造成本，并且可以提高喷墨性能。

公开(公告)号：US20090102895A1

公开(公告)日：2009-04-23

申请号：US12038170

申请日：2008-02-27

申请人： Jong-beom Kim ,  Jae-chang Lee

发明人： Jong-beom Kim ,  Jae-chang Lee

IPC分类号： B41J2/045 ,  H01L21/00

CPC分类号： B41J2/1628 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  Y10T29/49401

摘要： Provided are a piezoelectric inkjet printhead and a method of manufacturing the same. The piezoelectric inkjet printhead includes first and second single-crystalline silicon substrates. An ink flow path is disposed in a first surface of the first substrate. The ink flow path includes an ink introduction port, a manifold for supplying ink, a plurality of pressure chambers filled with ink to be ejected, a plurality of restrictors for connecting the manifold with the plurality of pressure chambers, respectively, and a plurality of nozzles for ejecting ink. The second substrate is bonded to the first substrate to thereby complete the ink flow path. A plurality of piezoelectric actuators are disposed on a second surface of the first substrate to correspond to each of the pressure chambers and provide drivability required for ejecting ink to the respective pressure chambers. In this construction, aligning the first and second substrates is unnecessary, so that the manufacturing process can be simplified, the manufacturing cost can be reduced, and ink ejecting performance can be improved.

摘要翻译： 提供一种压电喷墨打印头及其制造方法。 压电喷墨打印头包括第一和第二单晶硅衬底。 墨流路设置在第一基板的第一表面中。 墨水流路包括墨水引入口，用于供应墨水的歧管，填充有待喷射墨水的多个压力室，分别用于将歧管与多个压力室连接的多个限制器，以及多个喷嘴 用于喷墨。 第二基板结合到第一基板，从而完成油墨流动路径。 多个压电致动器设置在第一基板的第二表面上以对应于每个压力室，并提供将油墨喷射到各个压力室所需的驱动能力。 在这种结构中，不需要对准第一和第二基板，从而可以简化制造工艺，可以降低制造成本，并且可以提高喷墨性能。

公开(公告)号：US07922289B2

公开(公告)日：2011-04-12

申请号：US12041018

申请日：2008-03-03

申请人： Jae-chang Lee ,  Tae-kyung Lee ,  Tae-woon Cha

发明人： Jae-chang Lee ,  Tae-kyung Lee ,  Tae-woon Cha

IPC分类号： B41J2/14

CPC分类号： B41J2/1433 ,  B41J2/1606 ,  B41J2/162 ,  B41J2/1626 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631

摘要： Provided are a nozzle plate of an inkjet printhead and a method of manufacturing the same. The nozzle plate includes: a substrate including a plurality of nozzles; and a plurality of first grooves formed on the surface of a substrate around the nozzles. In this structure, ink remaining on the surface of the nozzle plate can be efficiently removed.

摘要翻译： 提供一种喷墨打印头的喷嘴板及其制造方法。 喷嘴板包括：包括多个喷嘴的基板; 以及形成在所述喷嘴周围的基板的表面上的多个第一凹槽。 在这种结构中，可以有效地去除留在喷嘴板表面上的油墨。

公开(公告)号：US07789496B2

公开(公告)日：2010-09-07

申请号：US12038170

申请日：2008-02-27

申请人： Jong-beom Kim ,  Jae-chang Lee

发明人： Jong-beom Kim ,  Jae-chang Lee

IPC分类号： B41J2/045 ,  B41J2/05

CPC分类号： B41J2/1628 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1646 ,  Y10T29/49401

摘要： Provided are a piezoelectric inkjet printhead and a method of manufacturing the same. The piezoelectric inkjet printhead includes first and second single-crystalline silicon substrates. An ink flow path is disposed in a first surface of the first substrate. The ink flow path includes an ink introduction port, a manifold for supplying ink, a plurality of pressure chambers filled with ink to be ejected, a plurality of restrictors for connecting the manifold with the plurality of pressure chambers, respectively, and a plurality of nozzles for ejecting ink. The second substrate is bonded to the first substrate to thereby complete the ink flow path. A plurality of piezoelectric actuators are disposed on a second surface of the first substrate to correspond to each of the pressure chambers and provide drivability required for ejecting ink to the respective pressure chambers. In this construction, aligning the first and second substrates is unnecessary, so that the manufacturing process can be simplified, the manufacturing cost can be reduced, and ink ejecting performance can be improved.

摘要翻译： 提供一种压电喷墨打印头及其制造方法。 压电喷墨打印头包括第一和第二单晶硅衬底。 墨流路设置在第一基板的第一表面中。 墨水流路包括墨水引入口，用于供应墨水的歧管，填充有待喷射墨水的多个压力室，分别用于将歧管与多个压力室连接的多个限制器，以及多个喷嘴 用于喷墨。 第二基板结合到第一基板，从而完成油墨流动路径。 多个压电致动器设置在第一基板的第二表面上以对应于每个压力室，并提供将油墨喷射到各个压力室所需的驱动能力。 在这种结构中，不需要对准第一和第二基板，从而可以简化制造工艺，可以降低制造成本，并且可以提高喷墨性能。