Multi-chamber deposition of silicon oxynitride film for patterning
    22.
    发明授权
    Multi-chamber deposition of silicon oxynitride film for patterning 失效
    用于图案化的氮氧化硅膜的多室沉积

    公开(公告)号:US07033960B1

    公开(公告)日:2006-04-25

    申请号:US10918378

    申请日:2004-08-16

    IPC分类号: H01L21/31 H01L21/469

    摘要: Pinholes in a silicon oxynitride film are reduced by PECVD deposition of a plurality of silicon oxynitride sub-layers in a PECVD apparatus containing multiple chambers. Embodiments include forming a layer of amorphous carbon over a conductive layer, such as doped polycrystalline silicon, on a substrate, transferring the substrate to a multi-chamber PECVD tool and depositing 2 to 7, e.g., 5, sub-layers of dense silicon oxynitride at a total thickness of 300 to 700 Å.

    摘要翻译: 氧氮化硅膜中的针孔通过在包含多个室的PECVD装置中的多个氮氧化硅子层的PECVD沉积而减少。 实施例包括在衬底上的导电层(例如掺杂多晶硅)上形成无定形碳层,将衬底转移到多室PECVD工具,并沉积2至7个例如5个致密氮氧化硅的子层 总厚度为300至700埃。

    Multi-functional mortise lock
    23.
    发明申请
    Multi-functional mortise lock 有权
    多功能榫眼锁

    公开(公告)号:US20050212301A1

    公开(公告)日:2005-09-29

    申请号:US10811457

    申请日:2004-03-26

    申请人: Richard Huang

    发明人: Richard Huang

    IPC分类号: E05C1/08

    摘要: A multi-functional mortise lock that can be rapidly converted between different functions without opening the mortise lock case by installing blocking screws that extend through threaded blocking openings in a sidewall of the case and into blocking interference with moving components inside the case. The moving components include a lock/unlock lever, a latch retract lever and a spindle hub. The blocking screws are stored in threaded storage openings in the sidewall of the case. The sidewall of the case is marked adjacent to the threaded blocking openings and storage openings to identify functions that will be performed when the blocking screws are installed in one or more of the blocking openings.

    摘要翻译: 多功能的榫眼锁可以在不同功能之间快速转换,而不会通过安装阻挡螺钉来打开榫眼锁定壳体,该阻挡螺钉延伸穿过外壳侧壁中的螺纹堵塞开口,并阻挡壳体内移动部件的干扰。 移动部件包括锁定/解锁杆,闩锁缩回杆和主轴毂。 阻塞螺钉存储在外壳侧壁的螺纹存储开口中。 壳体的侧壁被标记为与螺纹堵塞开口和存储开口相邻,以识别当阻塞螺钉安装在一个或多个阻塞开口中时将执行的功能。

    Hardmask employing multiple layers of silicon oxynitride
    24.
    发明申请
    Hardmask employing multiple layers of silicon oxynitride 有权
    使用多层氮氧化硅的硬掩模

    公开(公告)号:US20050048771A1

    公开(公告)日:2005-03-03

    申请号:US10962907

    申请日:2004-10-12

    摘要: A bi-layer BARC/hardmask structure includes a layer of amorphous carbon and two or more distinct and independently formed layers of a PECVD material such as SiON formed on the amorphous carbon layer. By independently forming several layers of PECVD material, at least some pinholes that are present in the lowermost PECVD layer are closed by upper PECVD layers and therefore do not extend through all of the PECVD layers. As a result the upper surface of the uppermost PECVD layer has a lower pinhole density than the lower PECVD layer. This reduces photoresist poisoning by dopant in the amorphous carbon layer, and etching of the amorphous carbon layer by photoresist stripping chemistry.

    摘要翻译: 双层BARC /硬掩模结构包括非晶碳层和形成在无定形碳层上的诸如SiON的PECVD材料的两个或更多个不同且独立形成的层。 通过独立地形成多层PECVD材料,存在于最低PECVD层中的至少一些针孔由上PECVD层封闭,因此不延伸穿过所有PECVD层。 结果,最上面的PECVD层的上表面具有比下PECVD层更低的针孔密度。 这减少了无定形碳层中的掺杂剂的光致抗蚀剂中毒,以及通过光刻胶剥离化学法蚀刻无定形碳层。

    Minimum frequency shift telescoping antenna
    25.
    发明授权
    Minimum frequency shift telescoping antenna 有权
    最小频移伸缩天线

    公开(公告)号:US06359592B1

    公开(公告)日:2002-03-19

    申请号:US09710292

    申请日:2000-11-10

    IPC分类号: H01Q124

    摘要: A telescoping antenna (102) has a mast element (200) with first and second ends (204, 222), the first end (204) being mounted on a cellular telephone housing (206) and establishing electrical connection with signal processing circuitry (210) within the cellular telephone (208). The telescoping antenna (102) also has a cylindrical radiating element (202) that slidably engages the mast element (200). In a retracted or stowed position first ends (204, 212) of the mast element (200) and the cylindrical radiating element (202) are substantially adjacent, and second ends (222, 216) of the mast element (200) and the cylindrical radiating element (202) are also substantially adjacent. A loading coil (214) has a first end (218) permanently connected to the second end (216) of the cylindrical radiating element (202) and has a second end (220) engageable with the second end (222) of the mast element (200). The loading coil (214) engages the mast element (200) when the antenna (102) is in a stowed position, and is disconnected from the mast element (200) when the antenna (102) is in the deployed position. The antenna (102) provides a substantially constant frequency of operation in both an extended and retracted orientation.

    摘要翻译: 伸缩天线(102)具有桅杆元件(200),其具有第一和第二端(204,222),第一端(204)安装在蜂窝电话外壳(206)上并与信号处理电路(210)建立电连接 )在蜂窝电话(208)内。 伸缩天线(102)还具有可滑动地接合桅杆元件(200)的圆柱形辐射元件(202)。 在缩回或收起位置中,桅杆元件(200)和圆柱形辐射元件(202)的第一端(204,212)基本相邻,桅杆元件(200)的第二端(222,216)和圆柱形 辐射元件(202)也基本相邻。 加载线圈(214)具有永久连接到圆柱形辐射元件(202)的第二端(216)的第一端(218),并且具有可与桅杆元件的第二端(222)接合的第二端(220) (200)。 当天线(102)处于收起位置时,加载线圈(214)接合桅杆元件(200),并且当天线(102)处于展开位置时与该桅杆元件(200)断开连接。 天线(102)在延伸方向和缩回方向都提供基本恒定的操作频率。

    Flexible board electrical connector with rotatable cover
    26.
    发明授权
    Flexible board electrical connector with rotatable cover 有权
    柔性电路板电连接器,可旋转盖

    公开(公告)号:US06254406B1

    公开(公告)日:2001-07-03

    申请号:US09477953

    申请日:2000-01-05

    IPC分类号: H01R1344

    CPC分类号: H01R12/79

    摘要: A flexible board electrical connector includes a housing with two integral lower barb elements, and a front cover, which rotates on the housing between open and closed positions. Each of the lower barb elements has a vertical plate portion, and a lateral projection that extends laterally from an upper end of the vertical plate portion. When the cover is at the closed position, two retaining projections of the cover engage the lateral projections of the housing, thereby preventing upward removal of the retaining projections of the cover from the housing. The cover has two integral pivot pins on two end portions thereof, which are mounted respectively and rotatably within two accommodating spaces in the housing. Preferably, the housing further includes two integral upper barb elements, each of which has a horizontal plate portion, and a downward projection that extends downwardly from a front end of the horizontal plate portion into an inlet of a pivot accommodating space in the housing. The downward projections are shaped and positioned so that the pivot pins can pass through the downward projections into the accommodating spaces, thereby subsequently preventing removal of the pivot pins from the accommodating spaces.

    摘要翻译: 柔性电路板电连接器包括具有两个整体的下倒钩元件的外壳和在外壳上打开和关闭位置之间旋转的前盖。 每个下倒钩元件具有垂直板部分和从垂直板部分的上端横向延伸的横向突起。 当盖处于关闭位置时,盖的两个保持突起与壳体的侧向突起接合,从而防止盖从壳体向上移除。 盖在其两个端部上具有两个整体的枢轴销,它们分别安装在壳体内的两个容置空间内。 优选地,壳体还包括两个整体的上倒钩元件,每个上部倒钩元件具有水平板部分和从水平板部分的前端向下延伸到壳体中的枢轴容纳空间的入口的向下突出部。 向下的突起被成形和定位成使得枢轴销能够穿过向下突出部进入容纳空间,从而随后阻止枢轴销从容纳空间中移除。