公开(公告)号：US20230062441A1

公开(公告)日：2023-03-02

申请号：US17680263

申请日：2022-02-24

申请人： KABUSHIKI KAISHA TOSHIBA

发明人： Kei MASUNISHI ,  Yasushi Tomizawa ,  Etsuji Ogawa ,  Ryunosuke Gando ,  Shiori Kaji ,  Hiroki Hiraga ,  Fumito Miyazaki ,  Daiki Ono ,  Kengo Uchida

IPC分类号： G01P15/097 ,  B81B3/00

摘要： According to one embodiment, a sensor a sensor includes a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion. The first movable portion includes first and second movable base portions, a connecting base portion, first and second movable beams, and first and second movable conductive portions. The first movable beam includes a first beam end portion, a first beam other end portion, and a first beam intermediate portion. The second movable beam includes a second beam end portion, a second beam other end portion, and a second beam intermediate portion. The first movable conductive portion includes a first crossing conductive portion, a first extending conductive portion, and a first other extending conductive portion. The second movable conductive portion includes a second crossing conductive portion, a second extending conductive portion, and a second other extending conductive portion.

公开(公告)号：US10401172B2

公开(公告)日：2019-09-03

申请号：US15243511

申请日：2016-08-22

申请人： KABUSHIKI KAISHA TOSHIBA

发明人： Haruka Yamamoto ,  Yasushi Tomizawa ,  Tamio Ikehashi

IPC分类号： G01C19/56 ,  B81B3/00 ,  G01C19/5762 ,  G01C19/5733

摘要： An angular velocity acquisition device includes a movable body, a drive electrode to which a drive voltage is applied to vibrate the movable body in a first direction, at least one stopper that stops the movable body at a predetermined position, a hold electrode which receives a hold voltage to hold the movable body at the predetermined position, a detection unit that detects a predetermined physical quantity depending on an amplitude of the vibration of the movable body in a second direction based on a Coriolis force acting on the movable body that vibrates in the first direction, and an angular velocity calculation unit that calculates an angular velocity of the movable body based on the predetermined physical quantity detected by the detection unit.

公开(公告)号：US10330472B2

公开(公告)日：2019-06-25

申请号：US15444272

申请日：2017-02-27

申请人： KABUSHIKI KAISHA TOSHIBA

发明人： Yasushi Tomizawa ,  Haruka Yamamoto ,  Tamio Ikehashi

IPC分类号： G01C19/56 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/5755 ,  G01C19/5762 ,  G01P15/125

摘要： According to one embodiment, an angular velocity acquisition device includes a movable body that vibrates in a first direction and in a second direction that is based on Coriolis force and includes a movable electrode portion extending in the second direction, a hold electrode that extends in the second direction and includes a fixed electrode portion opposite to the movable electrode portion across a gap, and a stopper that is provided between the fixed electrode portion and the movable electrode portion and includes an end portion closer to the movable electrode portion than a surface of the fixed electrode portion facing the movable electrode portion.