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公开(公告)号：US10763815B2
公开(公告)日：2020-09-01
申请号：US16351844
申请日：2019-03-13
发明人： Tamio Ikehashi , Hiroaki Yamazaki
摘要： According to one embodiment, an IC chip includes a plurality of fuse elements including a plurality of fuse portions each of which is to be cut off by a stress, and a plurality of actuator portions provided for the plurality of fuse portions, respectively, and each of which applies a stress to corresponding one of fuse portions, and a control circuit supplying a control signal for cutting off desired one of the fuse portions to corresponding one of the actuator portions.
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公开(公告)号：US10598647B2
公开(公告)日：2020-03-24
申请号：US15914828
申请日：2018-03-07
发明人： Tamio Ikehashi , Hiroaki Yamazaki
摘要： According to one embodiment, a gas sensor is disclosed. The gas sensor includes a substrate region, a first electrode provided on the substrate region, and a movable structure above the first electrode. The movable structure includes a deformable member which deforms by absorbing or adsorbing a predetermined gas, a heat member which heats the deformable member, and a second electrode. The gas sensor further includes a first cavity region which is provided between the first electrode and the second electrode.
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公开(公告)号：US20200076394A1
公开(公告)日：2020-03-05
申请号：US16351844
申请日：2019-03-13
发明人： Tamio Ikehashi , Hiroaki Yamazaki
摘要： According to one embodiment, an IC chip includes a plurality of fuse elements including a plurality of fuse portions each of which is to be cut off by a stress, and a plurality of actuator portions provided for the plurality of fuse portions, respectively, and each of which applies a stress to corresponding one of fuse portions, and a control circuit supplying a control signal for cutting off desired one of the fuse portions to corresponding one of the actuator portions.
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4.发明授权公开(公告)号：US10401172B2
公开(公告)日：2019-09-03
申请号：US15243511
申请日：2016-08-22
IPC分类号： G01C19/56 , B81B3/00 , G01C19/5762 , G01C19/5733
摘要： An angular velocity acquisition device includes a movable body, a drive electrode to which a drive voltage is applied to vibrate the movable body in a first direction, at least one stopper that stops the movable body at a predetermined position, a hold electrode which receives a hold voltage to hold the movable body at the predetermined position, a detection unit that detects a predetermined physical quantity depending on an amplitude of the vibration of the movable body in a second direction based on a Coriolis force acting on the movable body that vibrates in the first direction, and an angular velocity calculation unit that calculates an angular velocity of the movable body based on the predetermined physical quantity detected by the detection unit.
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公开(公告)号：US10330472B2
公开(公告)日：2019-06-25
申请号：US15444272
申请日：2017-02-27
IPC分类号： G01C19/56 , G01C19/5712 , G01C19/5719 , G01C19/5755 , G01C19/5762 , G01P15/125
摘要： According to one embodiment, an angular velocity acquisition device includes a movable body that vibrates in a first direction and in a second direction that is based on Coriolis force and includes a movable electrode portion extending in the second direction, a hold electrode that extends in the second direction and includes a fixed electrode portion opposite to the movable electrode portion across a gap, and a stopper that is provided between the fixed electrode portion and the movable electrode portion and includes an end portion closer to the movable electrode portion than a surface of the fixed electrode portion facing the movable electrode portion.
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公开(公告)号：US11092440B2
公开(公告)日：2021-08-17
申请号：US16112961
申请日：2018-08-27
发明人： Ryunosuke Gando , Tamio Ikehashi , Etsuji Ogawa , Tetsuro Itakura , Yohei Hatakeyama , Yasushi Tomizawa
IPC分类号： G01C19/5719 , B81C1/00 , B81B3/00 , G01C19/5726 , G01C19/5755
摘要： According to one embodiment, a method for controlling a vibration device includes a movable body capable of vibrating in a first direction, and a catch and release mechanism capable of catching the movable body that freely vibrates in the first direction, by an electrostatic attractive force, and releasing the caught movable body to freely vibrate the movable body in the first direction, wherein in a condition that tc is a time from a rise start time point to a rise end time point of an applied voltage for catching the movable body that freely vibrates in the first direction, by the electrostatic attractive force, and td is a period of the free vibration in the first direction of the movable body, the time tc is longer than the time td.
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公开(公告)号：US10281444B2
公开(公告)日：2019-05-07
申请号：US15243611
申请日：2016-08-22
发明人： Tamio Ikehashi , Hiroaki Yamazaki
摘要： A gas detection device includes a substrate having a main surface and a movable film structure located on, and including a portion thereof spaced from, the main surface of the substrate. The portion of the movable film structure located over and spaced from the substrate includes a first film formed of an insulating material, a patterned second film which deforms as a result of absorbing or adsorbing a predetermined gas, and a patterned third film comprising a resistive heater, at least a portion of the movable film structure spaced from the substrate being movable with respect to the substrate. From the perspective of a direction perpendicular to the main surface of the substrate, at least a portion of a pattern of the second film overlaps at least a portion of a pattern of the third film.
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公开(公告)号：US09914637B2
公开(公告)日：2018-03-13
申请号：US15250519
申请日：2016-08-29
发明人： Akira Fujimoto , Naofumi Nakamura , Tamio Ikehashi
CPC分类号： B81B3/0075 , B81B2201/0221 , B81B2201/0235 , B81B2203/0307 , B81B2203/0315 , B81B2207/015 , B81C1/00293 , B81C1/00674 , B81C2201/0123 , B81C2201/0132 , B81C2201/053 , B81C2203/0136 , B81C2203/0145
摘要： According to one embodiment, an electronic device includes a base region, an element portion located on the base region, the element portion including a movable portion, and a protective film overlying the element portion and forming a cavity on an inner side of the protective film. The protective film includes a first protective layer and a second protective layer located on the first protective layer. A hole extends in a direction parallel to a main surface of the base region, and the second protective layer covers the hole.
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公开(公告)号：US09493339B2
公开(公告)日：2016-11-15
申请号：US14644184
申请日：2015-03-10
发明人： Tamio Ikehashi
CPC分类号： B81B3/0021 , B81B2201/0235 , B81B2201/0242 , B81B2201/0264 , B81B2203/0127 , G01L9/0073
摘要： According to an embodiment, a MEMS includes a substrate; a substrate; a membrane arranged above the substrate; a first conductor with a first plane, the first conductor being connected to the membrane; and a second conductor with a second plane facing the first plane, the second conductor being arranged with a gap between the first conductor and the second conductor, wherein relative positions of the first conductor and the second conductor change in a direction in which an area of the first plane facing the second plane changes.
摘要翻译： 根据实施例，MEMS包括基板; 底物; 布置在所述基板上方的膜; 具有第一平面的第一导体，所述第一导体连接到所述膜; 以及具有面向所述第一平面的第二平面的第二导体，所述第二导体在所述第一导体和所述第二导体之间布置有间隙，其中所述第一导体和所述第二导体的相对位置沿着 面对第二架飞机的第一架飞机改变了。
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公开(公告)号：US10107626B2
公开(公告)日：2018-10-23
申请号：US14848344
申请日：2015-09-09
发明人： Tamio Ikehashi
IPC分类号： G01C19/56 , G01P9/04 , G01C19/5726 , G01C19/5762 , G01C19/5719
摘要： According to one embodiment, a method of acquiring rotational information of a gyro sensor includes sensing a predetermined physical quantity which depends upon an amplitude of a vibration in a second direction, the vibration in the second direction being based on Coriolis force that is applied to a movable body which is vibrating in a first direction, calculating rotational information of the movable body based on the sensed predetermined physical quantity, and stopping a vibration in the first direction of the movable body after the predetermined physical quantity is sensed.
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