公开(公告)号：US20240310406A1

公开(公告)日：2024-09-19

申请号：US18450747

申请日：2023-08-16

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei MASUNISHI ,  Etsuji OGAWA ,  Yasushi TOMIZAWA

IPC: G01P15/097 ,  G01P15/125

CPC classification number: G01P15/097 ,  G01P15/125 ,  G01P2015/0817

Abstract: According to one embodiment, a sensor includes an element section. The element section includes a first beam, a first beam electrode, a second beam, and a second beam electrode. The first beam includes a first portion, a first other portion, and a first intermediate portion between the first portion and the first other portion. The first beam electrode is connected to the first intermediate portion. The second beam includes a second portion, a second other portion, and a second intermediate portion between the second portion and the second other portion. The second beam electrode is connected to the second intermediate portion. The first and the second beam electrodes satisfy at least one of first to eighth conditions.

公开(公告)号：US20240060777A1

公开(公告)日：2024-02-22

申请号：US18172455

申请日：2023-02-22

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Fumito MIYAZAKI ,  Hiroki HIRAGA ,  Kengo UCHIDA ,  Shiori KAJI ,  Yasushi TOMIZAWA ,  Kei MASUNISHI ,  Daiki ONO ,  Ryunosuke GANDO

IPC: G01C19/56

CPC classification number: G01C19/56

Abstract: According to one embodiment, a sensor includes a base body, a support member, and a movable member. The base body includes a first face including a first base region. The support member is fixed to the first base region. The support member includes a support portion and an extending portion. The extending portion is connected to the support portion. The extending portion extends along a second direction crossing a first direction from the first base region to the support portion. A first width of the support portion in a third direction crossing a plane including the first direction and the second direction is wider than a second width of the extending portion in the third direction. The movable member is supported by the extending portion. A first gap is provided between the first face and the movable member.

公开(公告)号：US20230152099A1

公开(公告)日：2023-05-18

申请号：US17818095

申请日：2022-08-08

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Ryunosuke GANDO ,  Daiki ONO ,  Yasushi TOMIZAWA ,  Fumito MIYAZAKI ,  Shiori KAJI ,  Kei MASUNISHI ,  Hiroki HIRAGA ,  Etsuji OGAWA ,  Kengo UCHIDA

IPC: G01C19/5776

CPC classification number: G01C19/5776

Abstract: According to one embodiment, a sensor includes a sensor element, a housing provided around the sensor element, and a processor. The sensor element includes a base body including first and second base body regions, and first and second sensor parts. The first sensor part is provided in the first base body region, and includes a first sensor movable part. The second sensor part is provided in the second base body region and includes first and second beams. The processor can derive a rotation angle and an angular velocity based on a signal obtained from the first sensor movable part. The processor can detect acceleration and a temperature based on a first resonance frequency of the first beam and a second resonance frequency of the second beam. The processor can correct one of the rotation angle or the angular velocity based on one of the temperature or the acceleration.

公开(公告)号：US20210041311A1

公开(公告)日：2021-02-11

申请号：US16789748

申请日：2020-02-13

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei MASUNISHI ,  Naofumi Nakamura ,  Hiroaki Yamazaki ,  Tomohiro Saito ,  Fumitaka Ishibashi ,  Yoshihiko Kurui ,  Tomohiko Nagata

IPC: G01L1/14

Abstract: According to one embodiment, a pressure sensor includes a base body, a supporter, a film part, a first electrode, and a second electrode. The supporter is fixed to the base body. The film part is separated from the base body. The film part includes first, second, and third partial regions, and a rim portion. The rim portion is supported by the supporter. The second partial region is between the first partial region and the rim portion. The third partial region is between the second partial region and the rim portion. The first electrode is provided between the base body and the first partial region and between the base body and the second partial region. The first electrode is fixed to the base body. The second electrode is provided between the first electrode and the first partial region and between the first electrode and the second partial region.

公开(公告)号：US20150338300A1

公开(公告)日：2015-11-26

申请号：US14721523

申请日：2015-05-26

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei MASUNISHI ,  Hideaki Fukuzawa ,  Yoshihiko Fuji ,  Akiko Yuzawa ,  Kazuaki Okamoto

IPC: G01L9/00

CPC classification number: G01L9/16 ,  A61B5/02141 ,  A61B2562/0247 ,  A61B2562/028 ,  A61B2562/12

Abstract: According to an embodiment, a pressure sensor includes a support part, a flexible membrane part, and a magnetoresistive element. The flexible membrane part is supported by the support part, and includes a first region and a second region with rigidity lower than rigidity of the first region. The magnetoresistive element is provided on the membrane part, and includes a first magnetic layer, a second magnetic layer, and a spacer layer provided between the first magnetic layer and the second magnetic layer.

Abstract translation: 根据实施例，压力传感器包括支撑部分，柔性膜部分和磁阻元件。 柔性膜部分由支撑部分支撑，并且包括刚性低于第一区域刚度的第一区域和第二区域。 磁阻元件设置在膜部分上，并且包括第一磁性层，第二磁性层和设置在第一磁性层和第二磁性层之间的间隔层。

公开(公告)号：US20150068314A1

公开(公告)日：2015-03-12

申请号：US14188342

申请日：2014-02-24

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Naofumi NAKAMURA ,  Kei MASUNISHI ,  Yumi HAYASHI ,  Yusaku ASANO ,  Tamio IKEHASHI ,  Jun DEGUCHI ,  Daiki ONO

IPC: G01L9/12

CPC classification number: G01L19/04 ,  G01L9/0072 ,  G01L9/0075

Abstract: According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a first and second MEMS elements on the substrate. Each of the first and second MEMS elements includes a fixed electrode on the substrate, a movable electrode above the fixed electrode, a first insulating film, the first insulating film and the substrate defining a cavity in which the fixed and movable electrodes are contained, and a first anchor on a surface of the first insulating film inside the cavity and configured to connect the movable electrode to the first insulating film. The cavity of the first MEMS element is closed. The cavity of the second MEMS element is opened by a through hole.

Abstract translation: 根据一个实施例，公开了一种MEMS器件。 该器件包括衬底，衬底上的第一和第二MEMS元件。 第一和第二MEMS元件中的每一个包括基板上的固定电极，固定电极上方的可动电极，第一绝缘膜，第一绝缘膜和基板，其限定了容纳固定和​​可移动电极的空腔，以及 在所述腔内的所述第一绝缘膜的表面上的第一锚定件，并且将所述可动电极连接到所述第一绝缘膜。 第一MEMS元件的空腔是封闭的。 第二MEMS元件的空腔由通孔打开。

公开(公告)号：US20250076054A1

公开(公告)日：2025-03-06

申请号：US18732146

申请日：2024-06-03

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Fumito MIYAZAKI ,  Hideaki MURASE ,  Kei MASUNISHI ,  Yasushi TOMIZAWA ,  Daiki ONO ,  Kengo UCHIDA ,  Etsuji OGAWA ,  Jumpei OGAWA ,  Fumitaka ISHIBASHI

IPC: G01C19/5783

Abstract: According to one embodiment, a sensor includes a first member, a first substrate, and a sensor section. A direction from the first member to the first substrate is along a first direction. A first member thickness of the first member is thicker than a first substrate thickness of the first substrate along the first direction. The sensor section is provided between the first member and the first substrate, and is fixed to the first member. The substrate is fixed to the sensor section. The sensor section includes a housing and a sensor element provided in the housing. The sensor element includes a sensor base, a fixed portion fixed to the sensor base, and a movable portion supported by the fixed portion. A direction from the fixed portion to the sensor base is along the first direction. A first gap is provided between the sensor base and the movable portion.

公开(公告)号：US20240401949A1

公开(公告)日：2024-12-05

申请号：US18424030

申请日：2024-01-26

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Hideaki MURASE ,  Yasushi TOMIZAWA ,  Daiki ONO ,  Fumito MIYAZAKI ,  Kengo UCHIDA ,  Kei MASUNISHI ,  Etsuji OGAWA ,  Jumpei OGAWA ,  Fumitaka ISHIBASHI

IPC: G01C19/5769

Abstract: According to one embodiment, a sensor includes an element section. The element section includes a base, a first fixed portion, a first intermediate connect portion, a first intermediate movable member, a first connect portion, a first movable member, and a first fixed electrode. The first fixed portion is fixed to the base. The first intermediate connect portion is supported by the first fixed portion. The first intermediate movable member is connected to the first intermediate connect portion. The first connect portion is connected to the first intermediate movable member. The first movable member is supported by the first connect portion. The first movable member includes a first movable electrode. The first fixed electrode is fixed to the base and faces the first movable electrode.

公开(公告)号：US20240310404A1

公开(公告)日：2024-09-19

申请号：US18365591

申请日：2023-08-04

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei MASUNISHI ,  Etsuji OGAWA ,  Yasushi TOMIZAWA ,  Fumito MIYAZAKI ,  Daiki ONO ,  Kengo UCHIDA ,  Jumpei OGAWA ,  Fumitaka ISHIBASHI ,  Hideaki MURASE

IPC: G01P15/08

CPC classification number: G01P15/08

Abstract: According to one embodiment, a sensor includes a first beam, a first opposing beam, a support portion, a first linking portion, and a first connecting portion. The first beam includes a first portion and a first other portion. A direction from the first portion to the first other portion is along a first direction. A second direction from the first opposing beam to the first beam crosses the first direction. The first opposing beam includes a first opposing portion and a first other opposing portion. The first linking portion is connected to the first other portion and the first other opposing portion. The first connecting portion is connected to the first linking portion. A first connecting portion width along the second direction of the first connecting portion is narrower than a first linking portion width along the second direction of the first linking portion.

公开(公告)号：US20230288445A1

公开(公告)日：2023-09-14

申请号：US17823054

申请日：2022-08-29

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Kei MASUNISHI ,  Yasushi TOMIZAWA ,  Etsuji OGAWA ,  Ryunosuke GANDO ,  Shiori KAJI ,  Hiroki HIRAGA ,  Fumito MIYAZAKI ,  Daiki ONO ,  Kengo UCHIDA

IPC: G01P15/093

CPC classification number: G01P15/093 ,  G01P2015/0865

Abstract: According to one embodiment, a sensor includes a stage, a driver, and a detector. The stage includes a first portion and a second portion. The driver is configured to rotate the stage. A rotation axis of the stage passes through the first portion and is along a first direction. A second direction from the first portion to the second portion crosses the first direction. The second portion is configured to rotate along a circumferential direction with the rotation axis as a center when the stage rotating. The detector is provided at the second portion. The detector includes a first detection element configured to detect a first acceleration including a component along the second direction, and a second detection element configured to detect a second acceleration including a component along the first direction.