Fabrication of suspended structures using a sacrificial layer
    21.
    发明授权
    Fabrication of suspended structures using a sacrificial layer 失效
    使用牺牲层制造悬挂结构

    公开(公告)号:US06547973B2

    公开(公告)日:2003-04-15

    申请号:US08688337

    申请日:1996-07-30

    Inventor: Leslie A. Field

    CPC classification number: G01F1/6845 G01L9/0042

    Abstract: A method for fabricating a suspended structure including a layer of membrane material over a substrate. The suspended structure overlies a cavity in the substrate. The method starts by generating a sacrificial layer comprising a first material that can withstand temperatures typically encountered in subsequent conventional semiconductor processing steps. In the preferred embodiment of the present invention, the bond between sacrificial layer and the underlying substrate must be capable of withstanding temperatures greater than the Si—Al eutectic point. A layer of membrane material is then deposited over the sacrificial layer. The membrane material comprises a second material different from the first material. An opening is introduced in the layer of membrane material thereby exposing the sacrificial layer. A first etchant is applied to the sacrificial layer through the opening until the sacrificial layer is removed leaving a portion of the cavity. The first etchant is chosen such that the first etchant removes the first material more rapidly than the second material. Finally, a second etchant is introduced into the cavity to expand the cavity. The second etchant is chosen such that the second etchant removes the substrate more rapidly than the second material. The first material is preferably PSG, thermal silicon dioxide, low temperature oxide, or tungsten.

    Abstract translation: 一种在衬底上制造包括膜材料层的悬浮结构的方法。 悬浮结构覆盖在衬底中的空腔。 该方法开始于生成牺牲层,该牺牲层包括能够承受随后的常规半导体处理步骤中通常遇到的温度的第一材料。 在本发明的优选实施例中,牺牲层和底层衬底之间的接合必须能承受大于Si-Al共晶点的温度。 然后在牺牲层上沉积一层膜材料。 膜材料包括不同于第一材料的第二材料。 在膜材料层中引入开口,从而暴露牺牲层。 通过开口将第一蚀刻剂施加到牺牲层,直到消除牺牲层留下空腔的一部分。 选择第一蚀刻剂使得第一蚀刻剂比第二材料更快地去除第一材料。 最后,将第二蚀刻剂引入空腔中以扩大空腔。 选择第二蚀刻剂使得第二蚀刻剂比第二材料更快地除去衬底。 第一种材料优选为PSG,二氧化硅热,低温氧化物或钨。

    Gas extraction device for extracting gas from a microfluidics system
    22.
    发明授权
    Gas extraction device for extracting gas from a microfluidics system 失效
    用于从微流体系统中提取气体的气体提取装置

    公开(公告)号:US06299673B1

    公开(公告)日:2001-10-09

    申请号:US09221026

    申请日:1998-12-23

    CPC classification number: B41J2/19

    Abstract: A thermally-activated gas extraction device that comprises a bubble capture chamber, an exhaust manifold, a tapered extraction chamber and an extraction heater associated with the tapered extraction chamber. The tapered extraction chamber extends from the bubble capture chamber towards the exhaust manifold and has a cross-sectional area that increases towards the exhaust manifold. A gas removal method in which the gas extraction device is provided, a bubble of gas is accumulated in the bubble capture chamber, a portion of the liquid in the tapered extraction chamber heated to nucleate a bubble of vapor, and the bubble of vapor is heated to explosively expand the bubble of vapor into contact with the walls of the tapered extraction chamber and into contact with the bubble of gas to form a composite bubble. Contact with the walls of the tapered extraction moves the composite bubble towards the exhaust manifold. Finally, heating of the composite bubble is discontinued to condense the vapor in the composite bubble.

    Abstract translation: 一种热活化气体提取装置,其包括气泡捕获室,排气歧管,锥形抽出室和与锥形抽出室相关联的抽出加热器。 锥形抽出室从气泡捕获室朝向排气歧管延伸并且具有朝向排气歧管增加的横截面面积。 一种气体去除方法,其中提供气体提取装置,气体的气泡积聚在气泡捕获室中,锥形抽出室中的一部分液体被加热以使蒸汽的气泡成核,并且蒸气的气泡被加热 以将爆炸性地膨胀蒸汽气泡与锥形抽出室的壁接触并与气泡接触以形成复合气泡。 与锥形提取物的壁接触将复合气泡朝向排气歧管移动。 最后,中止复合气泡的加热以冷凝复合气泡中的蒸汽。

    Ink jet print head with flow control manifold shape
    23.
    发明授权
    Ink jet print head with flow control manifold shape 有权
    喷墨打印头具有流量控制歧管形状

    公开(公告)号:US06231168B1

    公开(公告)日:2001-05-15

    申请号:US09303250

    申请日:1999-04-30

    Abstract: An ink jet print head with a substrate defining an ink aperture. A number of ink energizing elements are located on the major surface of the substrate. A barrier layer is connected to the upper surface, and peripherally encloses an ink manifold. The barrier encompasses the ink aperture. An orifice plate is connected to the barrier layer, spaced apart from the substrate's major surface, enclosing the ink manifold. The plate defines a number of orifices, each associated with a respective ink energizing element. The ink manifold is an elongated chamber having opposed ends defined by end wall portions of the barrier layer. The barrier end wall portions each have an intermediate end wall portion protruding into the manifold.

    Abstract translation: 一种具有限定油墨孔的基板的喷墨打印头。 许多墨水激励元件位于基底的主表面上。 阻挡层连接到上表面,并且外围包围油墨歧管。 屏障包括油墨孔。 孔板连接到阻挡层,与衬底的主表面间隔开,包围油墨歧管。 板限定了多个孔,每个孔与相应的墨水激励元件相关联。 油墨歧管是具有由阻挡层的端壁部分限定的相对端的细长室。 阻挡端壁部分各自具有突出到歧管中的中间端壁部分。

    Total internal reflection optical switches employing thermal activation
    24.
    发明授权
    Total internal reflection optical switches employing thermal activation 失效
    全内反射光开关采用热激活

    公开(公告)号:US5699462A

    公开(公告)日:1997-12-16

    申请号:US663503

    申请日:1996-06-14

    Abstract: A switching element defines a transmitting state and a reflecting state for a pair of intersecting waveguides that have a gap at their intersection. In the preferred embodiment, the switching element exhibits total internal reflection at the gap sidewall from one waveguide to the other when not in the transmitting state. In the transmitting state, index-matching liquid fills the gap, enabling light to continue in the original waveguide direction. The switching element may use ink jet techniques or bubble techniques to displace index-matching liquid. The index-matching fluid may be projected from a gap between the waveguides by a jet mechanism, or a vapor or dissolved gas bubble may be formed to fill the gap between the waveguides to provide the reflecting state for the switching element. Using either of the techniques, heaters are employed to initiate the switching operation. In some embodiments, more than one heater is utilized. In the preferred embodiment, waveguides are formed on one substrate and heaters are formed on another. Then the substrates are aligned and bonded together to position the heaters in very close proximity to the intersection between the waveguides. Preferably, the switching element is one element in a matrix of such elements for routing signals between arrays of input and output waveguides.

    Abstract translation: 开关元件限定了在其交叉点处具有间隙的一对相交波导的发射状态和反射状态。 在优选实施例中,当不处于发送状态时,开关元件在从一个波导到另一个波导的间隙侧壁处呈现全内反射。 在透射状态下,折射率匹配液体填充间隙,使光能够沿原始波导方向继续。 开关元件可以使用喷墨技术或气泡技术来移位折射率匹配液体。 折射率匹配流体可以通过喷射机构从波导之间的间隙突出,或者可以形成蒸气或溶解的气泡以填充波导之间的间隙,以提供开关元件的反射状态。 使用这些技术之一,采用加热器来启动切换操作。 在一些实施例中,使用多于一个的加热器。 在优选实施例中,在一个基板上形成波导,另一个形成加热器。 然后将基板对准并结合在一起,以将加热器定位在非常接近波导之间的交叉点处。 优选地,开关元件是用于在输入和输出波导阵列之间路由信号的这种元件的矩阵中的一个元件。

    Sulfur removal systems for protection of reforming catalysts
    25.
    发明授权
    Sulfur removal systems for protection of reforming catalysts 失效
    用于保护重整催化剂的除硫系统

    公开(公告)号:US5518607A

    公开(公告)日:1996-05-21

    申请号:US450

    申请日:1993-01-04

    CPC classification number: C10G59/02 C10G69/08

    Abstract: A process is disclosed for removing residual sulfur from a hydrotreated naphtha feedstock. The feedstock is contacted with molecular hydrogen under reforming conditions in the presence of a less sulfur sensitive reforming catalyst to convert trace sulfur compounds to H.sub.2 S, and to form a first effluent. The first effluent is contacted with a solid sulfur sorbent to remove the H.sub.2 S and form a second effluent. The second effluent is then contacted with a highly selective reforming catalyst under severe reforming conditions. Also disclosed is a method using a potassium containing sulfur sorbent made from nitrogen-free potassium compounds.

    Abstract translation: 公开了从加氢处理的石脑油原料中除去残余硫的方法。 在重硫条件下,在较少硫敏感的重整催化剂的存在下,原料与分子氢接触,以将痕量硫化合物转化为H 2 S,并形成第一流出物。 将第一流出物与固体硫吸附剂接触以除去H 2 S并形成第二流出物。 然后在严格的重整条件下将第二流出物与高度选择性的重整催化剂接触。 还公开了使用由无氮钾化合物制成的含钾硫吸附剂的方法。

    Reforming process having a high selectivity and activity for
dehydrocyclization, isomerization, and dehydroisomerization
    27.
    发明授权
    Reforming process having a high selectivity and activity for dehydrocyclization, isomerization, and dehydroisomerization 失效
    对脱氢环化,异构化和脱氢异构化具有高选择性和活性的重整方法

    公开(公告)号:US4627912A

    公开(公告)日:1986-12-09

    申请号:US550841

    申请日:1983-11-14

    Inventor: Leslie A. Field

    CPC classification number: C10G35/095 B01J29/62 B01J2229/26 B01J2229/42

    Abstract: A hydrocarbon conversion process is disclosed wherein a hydrocarbon feed is contacted with a reforming catalyst in the presence of a halogen at conditions which favor dehydrocyclization, isomerization, and dehydroisomerization of the hydrocarbon feed. The degree of the isomerization and dehydroisomerization is controlled by adjusting the amount of halogen present. The amount of halogen present can be adjusted on stream by the addition of halogen-containing gas or water. The reforming catalyst comprises a large-pore zeolite, containing at least one Group VIII metal. In one embodiment, the reforming catalyst comprises: (a) a large-pore zeolite containing barium and platinum; and (b) an acidic or acidifiable inorganic binder selected from the group consisting of silica-alumina, zirconia-silica and alumina.

    Abstract translation: 公开了烃转化方法,其中在有利于烃进料的脱氢环化,异构化和脱氢异构化的条件下,烃进料在卤素存在下与重整催化剂接触。 通过调节存在的卤素的量来控制异构化和脱氢异构化的程度。 存在的卤素的量可以通过加入含卤素的气体或水在流量上调节。 重整催化剂包含含有至少一种Ⅷ族金属的大孔沸石。 在一个实施方案中,重整催化剂包括:(a)含有钡和铂的大孔沸石; 和(b)选自二氧化硅 - 氧化铝,氧化锆 - 二氧化硅和氧化铝的酸性或可酸化的无机粘合剂。

    Hydrocarbon conversion process
    28.
    发明授权
    Hydrocarbon conversion process 失效
    烃转化过程

    公开(公告)号:US4456527A

    公开(公告)日:1984-06-26

    申请号:US477111

    申请日:1983-03-21

    CPC classification number: C10G35/095

    Abstract: A hydrocarbon conversion process is disclosed having a very high selectivity for dehydrocyclization. In one aspect of this process, a hydrocarbon feed is subjected to hydrotreating, then the hydrocarbon feed is passed through a sulfur removal system which reduces the sulfur concentration of the hydrocarbon feed to below 500 ppb, and then the hydrocarbon feed is reformed over a dehydrocyclization catalyst comprising a large pore zeolite containing at least one Group VIII metal to produce aromatics and hydrogen.

    Abstract translation: 公开了一种具有非常高的脱氢环化选择性的烃转化方法。 在该方法的一个方面,烃进料进行加氢处理,然后烃进料通过除硫系统,其将烃进料的硫浓度降低至低于500ppb,然后烃进料通过脱氢环化 催化剂包含含有至少一种VIII族金属的大孔沸石以产生芳烃和氢。

    WATER CONSERVATION USING FLOATING OPTICALLY-REFLECTIVE DEVICES

    公开(公告)号:US20170362800A1

    公开(公告)日:2017-12-21

    申请号:US15527134

    申请日:2015-11-18

    Inventor: Leslie A. Field

    CPC classification number: E03B3/03 A01G15/00

    Abstract: Embodiments generally relate to methods and apparatuses for conserving water in a reservoir. In one embodiment, the method comprises deploying onto the top surface of water in a reservoir a floatable device with a wettable lower surface. The device comprises a first element and a second element, the first element providing the device with a high albedo upper surface. In one embodiment the first element comprises a plurality of highly reflective particles and the second element comprises a binder configured to hold the reflective particles together.

Patent Agency Ranking