Abstract:
A scale and an optical encoder capable of maintaining an accuracy of a reference position irrespective of an error in attaching a detection head are provided. The scale according to the present invention is a scale including main-signal scale gratings having grating patterns of a predetermined pitch, and a reference-signal pattern, in which the main-signal scale gratings are arranged in parallel in a direction perpendicular to a length measurement axis of the main-signal scale gratings and are different from each other in phase by ½, and the reference-signal pattern is formed on the length measurement axis of the main-signal scale gratings. The optical encoder according to the present invention includes a light source, main-signal light source gratings, reference-signal light source gratings, main-signal receiver gratings, and a reference-signal receiver element.
Abstract:
In a separate linear encoder, a scale is further provided with an ABS track that is arranged in parallel with an INC track and a detection head includes an ABS detection portion that reads the ABS track. The separate linear encoder includes a calculation portion that obtains a yaw angle of the detection head with respect to a scale based on a gap between an INC detection portion and an ABS detection portion and a difference amount between a position value of the INC track, which is detected by the INC detection portion, and a position of the ABS track, which is detected by the ABS detection portion. The calculation portion also obtains a signal strength based on two-phase sine wave signals that are output from the INC detection portion. The separate linear encoder further includes a display device that displays a plurality of yaw angles and the signal strengths corresponding to the respective yaw angles.
Abstract:
An encoder includes a light receiving part and a computing part. The light receiving part receives reflected light from a scale and outputs N-phase sinusoidal signals in which respective phases of fundamental waves differ by 2π/N (N is an integer more than or equal to 5). The computing part outputs a two-phase sinusoidal signal including an A phase and a B phase according to each of the N-phase sinusoidal signals. The A phase is expressed by a real part of sum of multiplier of N-phase sinusoidal waves and a member including the N. The B phase is expressed by an imaginary part of the sum of the multiplier of the N-phase sinusoidal waves and a member including the N.
Abstract:
There is provided a signal processing method, for a photoelectric encoder, capable of correctly determining a bright part and a dark part of a bright/dark pattern having distorted light intensity distribution by setting an appropriate threshold.A detector unit includes a light source, a light-receiving detector that receives transmitted light from a scale to acquire a bright/dark image, and a lens arranged between the light source and the light-receiving detector. The detector unit classifies the bright/dark image acquired by the light-receiving detector into an image-forming region corresponding to a center region of the lens and a non-image-forming region corresponding to a region except for the center region of the lens, calculates a representative value reflecting a light intensity of the image-forming region, and obtains a pre-processed bright/dark image in which the light intensity of the non-image-forming region is replaced with the representative value.
Abstract:
An encoder includes a scale having graduations arranged in a measurement direction, a head including a light receiving unit configured to receive, via the scale, light emitted from a light source, and being configured to detect a relative movement amount with respect to the scale by relatively moving in the measurement direction of the scale, and a control unit configured to control the head. The control unit includes a light amount control unit configured to perform control so as to keep a predetermined light receiving amount by increasing or decreasing a light amount of the light source, an error determination unit configured to determine an error based on light received by the light receiving unit, and a light amount suppression unit configured to suppress a light amount of the light source by stopping control performed by the light amount control unit, when the error determination unit determines as an error.
Abstract:
The photoelectric encoder 1 includes a scale 2, and a detection head 3 including a light emitting unit 4, an index 5, and a detection unit 6. The index 5 includes a first index portion 50 consisting of diffraction portions and non-diffraction portions alternately juxtaposed at a predetermined pitch along the longitudinal direction of the scale 2, and a second index portion 51 consisting of diffraction portions and non-diffraction portions alternately juxtaposed at twice the pitch of the first index portion 50. The scale 2 is configured to include a first pattern portion 20 consisting of diffraction portions and non-diffraction portions alternately juxtaposed at a predetermined pitch along the longitudinal direction of the scale 2, and a second pattern portion 21 consisting of diffraction portions and non-diffraction portions arranged in a checkered pattern.
Abstract:
An optical encoder according to the present invention includes a light source that emits light; a scale including scale gratings each having a predetermined pitch; a light source grating disposed between the light source and the scale and having a predetermined pitch; and an interference fringe detector that detects an interference fringe generated by the light source grating and the scale. The scale gratings are disposed side by side, and the adjacent scale gratings are displaced from each other by a ½ period.
Abstract:
A photoelectric encoder includes a light-emitting element, a scale, a lens, a PDA, and a signal processing circuit. The signal processing circuit includes a distortion table, a distortion compensation circuit, and a position analyzing circuit. The distortion table is calculated in advance on the basis of pieces of distortion information that were obtained by a distortion simulation using design values of the optical system such as the lens. The distortion compensation circuit corrects a light/dark signal of the PDA by eliminating distortion caused by the optical system by changing the positions of the respective PDs of the PDA virtually on the basis of the distortion table and the pieces of position information of the respective PDs. The position analyzing circuit analyzes a position of the scale on the basis of the corrected light/dark signal.
Abstract:
A photoelectric encoder includes an absolute scale provided with an absolute pattern based on pseudo-random data, and a detection head including a light source that emits light to the absolute pattern of the absolute scale, and a light receiving unit that receives light from the absolute pattern, and it detects an absolute position of the detection head with respect to the absolute scale. In the photoelectric encoder, the absolute pattern is composed of a grating part and a dark part arranged in a repetitive manner. The photoelectric encoder further includes an interference pattern generation means that generates an interference pattern in combination with the grating part, and an interference pattern signal processing unit that detects the pseudo-random data of the absolute pattern based on the interference pattern received by the light receiving unit.
Abstract:
A measurement method of a surface shape and a surface shape measurement device uses an interferometer optical head that acquires an interference fringe image generated by a light path difference between the reference light and the measurement light, acquires N interference fringe images by scanning from a start point to an end point in the Z-axis direction, and measures the surface shape of the measurement target surface based on the interference fringe images. For a common position in the N interference fringe images, regarding an interference signal including values of N points that indicates a change in the interference light intensity along the Z-axis direction, a phase of an interference fringe produced by the light of a predetermined analysis wavelength is determined, and the relative position in the Z-axis direction of the measurement target surface within the range of the analysis wavelength is determined based on the phase.---