公开(公告)号：US20180172491A1

公开(公告)日：2018-06-21

申请号：US15380682

申请日：2016-12-15

Applicant: MKS Instruments, Inc.

Inventor： Junhua Ding ,  Michael L'Bassi ,  Wayne Cole

IPC: G01F1/34

CPC classification number: G01F1/34 ,  G01F15/005 ,  G01F25/0053 ,  G05D7/00

Abstract: A mass flow verifier (MFV) that is space-efficient and can verify flow rates for unknown fluids over a wide range of flow rates includes a chamber configured to receive a fluid, a critical flow nozzle connected to the chamber, and first and second pressure sensors that, respectively, detect fluid pressure in the chamber and upstream of the critical flow nozzle. A controller of the MFV is configured to verify flow rate of the fluid by, (i) at a first flow range, measuring a first flow rate based on a rate of rise in pressure of the fluid as detected by the first pressure sensor and determining a gas property function of the fluid based on pressures as detected by the first second pressure sensors, and (ii) at a second flow range, measuring a second flow rate based on pressure detected by the second pressure sensor and the determined gas property function.

公开(公告)号：US20170060143A1

公开(公告)日：2017-03-02

申请号：US15244264

申请日：2016-08-23

Applicant: MKS INSTRUMENTS, INC.

Inventor： Junhua Ding ,  Michael L'Bassi

IPC: G05D7/06 ,  G05B6/02 ,  G01F1/50 ,  G01F1/36 ,  G01F1/42

CPC classification number: G05D7/0635 ,  G01F1/363 ,  G01F1/50 ,  G01F15/005

Abstract: Methods, systems, and apparatus for pressure-based flow measurement are provided. A processor receives, from the pressure-based mass flow controller (MFC), an upstream pressure value Pu. The processor computes, for the pressure-based mass flow controller (MFC), a downstream pressure value Pd based on the received upstream pressure value Pu. The processor computes, for the pressure-based mass flow controller (MFC), a flow rate Q based on the received upstream pressure value Pu and the computed downstream pressure value Pd. The processor controls a flow through the pressure-based mass flow controller (MFC) based on the computed flow rate Q. The methods, systems, and apparatus can be used for flow measurement in non-critical or un-choked flow conditions.

Abstract translation: 提供了基于压力的流量测量的方法，系统和装置。 处理器从基于压力的质量流量控制器（MFC）接收上游压力值Pu。 基于压力质量流量控制器（MFC），处理器基于接收到的上游压力值Pu计算下游压力值Pd。 对于基于压力的质量流量控制器（MFC），处理器基于接收到的上游压力值Pu和计算出的下游压力值Pd来计算流量Q。 处理器基于计算的流量Q控制通过基于压力的质量流量控制器（MFC）的流量。方法，系统和装置可用于非关键或非扼流流量条件下的流量测量。