公开(公告)号：US20100182592A1

公开(公告)日：2010-07-22

申请号：US12668720

申请日：2008-07-18

申请人： Carlo Dall'Aglio

发明人： Carlo Dall'Aglio

IPC分类号： G01B11/06 ,  G01J5/00

CPC分类号： G01B11/06 ,  B24B7/228 ,  B24B49/12 ,  H01L22/26

摘要： An apparatus for checking thickness dimensions in a semiconductor wafer (1) during grinding operations includes an optical probe (3) which transmits infrared radiations on the surface (2) being machined of the wafer (1), and detects beams that are reflected by said surface, by an opposite surface (2′) of the wafer and/or by surfaces (2″, 2′″) separating different layers in the wafer. The beam of emitted and reflected radiations travels along a path (4) with known and constant discontinuities, in part through the air (15) and in part through a cushion (30) of low flow liquid, which flows with substantially laminar flow. A support and positioning element (7) for the optical probe includes hydraulic ducts (22,25) that generate the liquid cushion. A method for checking the thickness dimensions includes the generation of the liquid cushion at the path along which the beam of emitted and reflected radiations travels.

摘要翻译： 一种用于在研磨操作期间检查半导体晶片（1）中的厚度尺寸的装置，包括在被加工晶片（1）的表面（2）上透过红外辐射的光学探头（3），并且检测由所述 表面，由晶片的相对表面（2'）和/或通过分离晶片中的不同层的表面（2“，2”“）。 发射和反射辐射的光束沿着具有已知和恒定不连续性的路径（4）行进，部分地通过空气（15）并且部分地通过基本上层流流动的低流动液体的衬垫（30）。 用于光学探针的支撑和定位元件（7）包括产生液体垫的液压管道（22,25）。 用于检查厚度尺寸的方法包括在发射和反射辐射束行进的路径处产生液体缓冲垫。

公开(公告)号：US20090013551A1

公开(公告)日：2009-01-15

申请号：US12224090

申请日：2007-02-13

申请人： Carlo Dall'Aglio

发明人： Carlo Dall'Aglio

IPC分类号： G01B5/08

CPC分类号： B24B5/42 ,  B24B49/04 ,  B24B49/045

摘要： A gauge (1) for checking radial dimensions of a workpiece (60), e.g. the diameter of a crankpin orbitally rotating during grinding operations, includes a casing, a V-shaped reference device (4) and a rod that can move within the casing (2) with respect to the reference device, an end of the rod projecting from the casing and carrying a feeler (20) for touching the surface of the workpiece to be checked and transmitting the movements of the feeler to a transducer (22). A sealing system for preventing coolant, dust or other foreign matter from getting inside the casing includes a pneumatic conduit (6) for allowing compressed air to be blown from inside the casing to outside, and an internal seal that—in the non-operative condition—seals the opening through which the rod projects from the casing. According to an advantageous embodiment, the seal is fastened into a bushing guiding the rod and cooperates with a surface of the rod in order to get the tightness.

摘要翻译： 用于检查工件（60）的径向尺寸的量规（1），例如。 在研磨操作期间轨道旋转的曲柄销的直径包括壳体，V形参考装置（4）和可相对于参考装置在壳体（2）内移动的杆，杆的端部从 壳体并且携带用于接触待检查的工件的表面的探测器（20），并将探测器的运动传递到换能器（22）。 用于防止冷却剂，灰尘或其他异物进入壳体内的密封系统包括用于允许压缩空气从壳体内部吹送到外部的气动导管（6），以及在非操作状态下的内部密封 - 密封杆从套管突出的开口。 根据有利的实施例，将密封件紧固到引导杆的衬套中并且与杆的表面配合以获得紧密度。

公开(公告)号：US07310891B2

公开(公告)日：2007-12-25

申请号：US10577492

申请日：2004-11-16

申请人： Carlo Dall'Aglio

发明人： Carlo Dall'Aglio

IPC分类号： G01B5/00 ,  G01B7/00

CPC分类号： G01B7/001

摘要： A gauging head includes a substantially closed casing, a movable arm with a first portion, partly located inside the casing and associated with a position transducer, and a second portion, outside the casing, carrying a feeler for contacting a piece to be checked, and a zero-setting mechanism for adapting the head to check pieces with different nominal dimensions. The zero-setting mechanism, located outside the casing, includes a quick locking/unlocking device between the first and second portions of the arm and a movable mechanical reference coupled with the first portion of the arm and including a reference surface cooperating with a corresponding reference surface for holding the first portion of the arm in a preset position with respect to the casing. The quick locking/unlocking device and the movable mechanical reference are operated together for unlocking the coupling between the portions of the arm and concurrently hold the preset position, and for locking together the two portions and concurrently release the arm.

摘要翻译： 测量头包括基本封闭的壳体，具有第一部分的可移动臂，其部分地位于壳体内并与位置传感器相关联;以及第二部分，在壳体外部，承载用于接触要检查的部件的探针，以及 用于调整头部以检查具有不同标称尺寸的件的零点设置机构。 位于壳体外部的调零机构包括在臂的第一和第二部分之间的快速锁定/解锁装置和与臂的第一部分联接的可移动机械参考，并且包括与相应参考相配合的参考表面 表面，用于将臂的第一部分相对于壳体保持在预设位置。 快速锁定/解锁装置和可移动机械基准件一起操作以解锁臂部分之间的联接并同时保持预设位置，并且用于将两部分锁定在一起并同时释放臂。

公开(公告)号：US20060151684A1

公开(公告)日：2006-07-13

申请号：US10563512

申请日：2004-07-15

申请人： Alberto Cozzari ,  Carlo Dall'Aglio

发明人： Alberto Cozzari ,  Carlo Dall'Aglio

IPC分类号： H01J40/14

CPC分类号： B23Q17/24 ,  B23Q17/22 ,  Y02E60/324

摘要： An apparatus for checking the integrity of tools includes an optoelectronic system (7) with a laser beam (21), a base (6) movable along a longitudinal direction (X) for enabling displacements between tool and optoelectronic system and a device for checking the mutual position including, for example, a transducer (9,10). A sensor (22) of the optoelectronic system detects the interruption of the beam and, on the basis of the transducer signal at said interruption and on the comparison with a known value, the integrity of the tool is determined. A coupling mechanism (24) of the optoelectronic system coupled at the base enables oscillations of the former along a transversal reference surface, that define a sensitive delimited area (33). The oscillations are controlled by means of a motor (26) and interruptions of the beam are detected and signalled by the sensor the moment that the end of the tool interferes with the sensitive delimited area.

摘要翻译： 用于检查工具完整性的装置包括具有激光束（21）的光电子系统（7），可沿着纵向方向（X）移动的基座（6），用于使工具和光电子系统之间能够移动， 相互位置包括例如换能器（9,10）。 光电系统的传感器（22）检测光束的中断，并且基于所述中断处的换能器信号和与已知值的比较，确定工具的完整性。 耦合在基座处的光电子系统的耦合机构（24）使得能够沿着横向参考表面的振荡器形成敏感的界定区域（33）。 通过电动机（26）来控制振荡，并且由传感器检测到信号，并在工具的末端与敏感的定界区域相干的瞬间发出信号。

公开(公告)号：US07047658B2

公开(公告)日：2006-05-23

申请号：US10220320

申请日：2001-01-19

申请人： Franco Danielli ,  Carlo Dall'Aglio

发明人： Franco Danielli ,  Carlo Dall'Aglio

IPC分类号： G01B3/00

CPC分类号： B24B49/04 ,  B24B5/42 ,  B24B49/10

摘要： An apparatus and a relevant method for checking a crankpin (18) of a crankshaft (34) positioned on a numerical control grinding machine where it is worked includes a gauging head (39) with a Vee-shaped reference device (20) and a feeler (17), axially movable along a translation direction, that touches the crankpin surface, and an articulated support device (5,9,12) connected to the grinding-wheel slide (1), carrying the guaging head and allowing the reference device (20) to keep contact with the crankpin during its orbital motion around the main rotation axis (0) of the crankshaft. Rough values corresponding to a transducer (41) signals provided at predetermined angular positions of the crankshaft are stored and are processed also to compensate alterations caused both by contact between the sides of the Vee-shaped reference device and the surface of the crankpin to be checked, and by variations of the angular arrangement of the Vee-shaped reference device in the course of orbital rotations of the pin.

摘要翻译： 一种用于检查定位在数控磨床上的曲轴（34）的曲柄销（18）的装置和相关方法，包括具有V形形状的参考装置（20）的测量头（39）和探针 （17），其沿着平移方向可轴向移动，其接触曲柄销表面;以及铰接支撑装置（5,9,12），其连接到砂轮滑块（1），承载调节头并允许参考装置 在曲轴的主旋转轴线（0）的轨道运动期间，与曲柄销保持接触。 对应于在曲轴的预定角度位置处提供的换能器（41）信号的粗糙值被存储并且被处理以补偿由Vee形参考装置的侧面与要检查的曲柄销的表面之间的接触而引起的变化 ，以及在销的轨道旋转过程中V形形参考装置的角度布置的变化。

公开(公告)号：US06430832B1

公开(公告)日：2002-08-13

申请号：US09678379

申请日：2000-10-03

申请人： Carlo Dall'Aglio ,  William Montanari

发明人： Carlo Dall'Aglio ,  William Montanari

IPC分类号： G01B300

CPC分类号： B24B49/045 ,  B24B5/42 ,  B24B49/04 ,  G01B5/08

摘要： An apparatus for checking the diameter of crankpins of a crankshaft in the course of the machining in a grinding machine includes a Vee-shaped reference device, a measuring device associated with the reference device and including a feeler axially movable along the bisecting line of the Vee-shaped reference device, and a support device with a first arm rotating with respect to a support arranged on the grinding-wheel slide and a second arm rotating with respect to the first and carrying the Vee-shaped reference device. A guiding mechanism includes a limiting device, with mutually abutting surfaces and coupled to the support device, that guides the displacement of the reference device along a trajectory substantially parallel to the profile of the grinding wheel, allows the engagement of the reference device on a crankpin to be checked while the latter is orbitally moving, and does not interfere with the displacements of the support device caused by the orbital motion of the crankpin in the checking condition.

摘要翻译： 一种用于在研磨机中加工过程中检查曲轴的曲柄销直径的装置包括V形形状的参考装置，与参考装置相关联的测量装置，包括沿着Vee的平分线可轴向运动的测头 形状的参考装置和支撑装置，其具有相对于布置在研磨轮滑块上的支撑件旋转的第一臂和相对于第一臂旋转的第二臂，并且承载V形形状的参考装置。引导机构包括： 限制装置具有相互邻接的表面并且联接到支撑装置，其沿着基本上平行于砂轮的轮廓的轨迹引导参考装置的位移，允许参考装置在曲轴销上的接合以被检查，同时 后者是轨道运动的，并且不会干扰由曲柄销的轨道运动引起的支撑装置的位移 检查条件。

公开(公告)号：US5157845A

公开(公告)日：1992-10-27

申请号：US466376

申请日：1990-03-15

申请人： Mario Possati ,  Carlo Dall'Aglio

发明人： Mario Possati ,  Carlo Dall'Aglio

IPC分类号： G01B5/12 ,  G01B7/13 ,  G01N21/64

CPC分类号： G01B7/13 ,  G01B5/12

摘要： Device comprising a support (21-23) with a seat (27, 27') housing a measuring cell (24, 24') having a feeler (6, 6') adapted to contact the part to be checked and with a strain gauge transducer (12-17) for detecting the feeler position. In order to obtain a device with very small overall dimensions and high accuracy and repeatability, the measuring cell (24, 24') comprises an integral element (1) having a support portion (2) fixed in the seat (27, 27'), a free portion (4, 4') carrying the feeler (6, 6') and an intermediate resiliently deformable portion (3, 3'), whereto there is fixed a strain gauge (13) of the transducer (12-17).

公开(公告)号：US4625413A

公开(公告)日：1986-12-02

申请号：US784310

申请日：1985-10-04

申请人： Mario Possati ,  Carlo Dall'Aglio

发明人： Mario Possati ,  Carlo Dall'Aglio

IPC分类号： G01B5/08 ,  G01B5/00 ,  G01B7/12

CPC分类号： G01B7/12

摘要： A measuring head comprises an integral member defining a support portion, a plurality of fulcrums and a corresponding plurality of movable arms carrying feelers. The fulcrums are aligned for defining a single axis of rotation for the movable arms. Position transducers electrically detect the positions of the movable arms. Two measuring heads are employed for realizing a snap gauge for simultaneously checking a plurality of diameters.

摘要翻译： 测量头包括限定支撑部分的一体构件，多个支点和相应的多个携带探针的可移动臂。 对准支点以限定可动臂的单个旋转轴线。 位置传感器电检测可移动臂的位置。 采用两个测量头来实现同时检查多个直径的快速计。

公开(公告)号：US4524523A

公开(公告)日：1985-06-25

申请号：US513309

申请日：1983-07-13

申请人： Guido Golinelli ,  Carlo Dall'Aglio

发明人： Guido Golinelli ,  Carlo Dall'Aglio

IPC分类号： G01B5/02 ,  G01B3/00 ,  G01B5/08 ,  G01B5/14 ,  G01B21/00 ,  G01B21/02 ,  G01B21/10 ,  G01B7/02

CPC分类号： G01B3/002

摘要： A probe for checking linear dimensions of mechanical pieces comprises a support casing, an arm movable with respect to the casing and having a first element, a second element and an intermediate third element, a feeler fixed to the first element of the movable arm for contacting the piece to be checked, and detecting means for providing a signal depending on the position of the movable arm. The intermediate element is removably coupled to the first element and the second element and defines a section adapted to break as a consequence of blows against the feeler and the first element of the movable arm occurring along any direction.

摘要翻译： 用于检查机械件的线性尺寸的探针包括支撑壳体，相对于壳体可移动的臂，并具有第一元件，第二元件和中间第三元件，固定到可动臂的第一元件的触针，用于接触 要检查的件，以及根据可动臂的位置提供信号的检测装置。 中间元件可移除地联接到第一元件和第二元件，并且限定适于因沿着任何方向发生的触发器和可移动臂的第一元件的冲击而中断的部分。

公开(公告)号：US4417400A

公开(公告)日：1983-11-29

申请号：US283876

申请日：1981-07-16

申请人： Carlo Dall'Aglio

发明人： Carlo Dall'Aglio

IPC分类号： G01D5/02 ,  G01B5/012 ,  G01B5/20 ,  G01B7/00 ,  G01B7/28 ,  G01B21/00 ,  G01B7/02

CPC分类号： G01B7/001

摘要： A gauge for the dimensional checking of mechanical pieces comprises an outer casing, an armset fixed to the casing and having a gauging arm movable along two opposite directions, a feeler carried by the gauging arm for contacting the piece to be checked, a limiting device for adjustably limiting the displacements of the gauging arm along the directions, a spring cooperating with the gauging arm for urging the feeler against the piece, and a device for adjusting the force applied by the spring. The limiting device includes a member, fixed to the casing, which defines a first abutment surface for limiting the displacements of the gauging arm along one of the directions, and a screw passing through the hole of the gauging arm. The screw is coupled to the member and defines a second abutment surface, adjustable with respect to the first abutment surface. The device for adjusting the force applied by the spring has a movable element cooperating with the member for permitting adjustment of the force applied by the spring while preventing torsion of the spring.

摘要翻译： 用于机械件的尺寸检查的量规包括外壳，固定到壳体的臂组，并具有可沿两个相反方向移动的测量臂，由测量臂承载的用于接触被检查件的限位装置， 可调节地限制测量臂沿着方向的位移，与测量臂配合的弹簧，用于将触发器推向该部件;以及用于调节由弹簧施加的力的装置。 限制装置包括固定到壳体的构件，其限定用于限制测量臂沿着一个方向的位移的第一邻接表面和穿过测量臂的孔的螺钉。 螺钉联接到构件并且限定相对于第一邻接表面可调节的第二邻接表面。 用于调节由弹簧施加的力的装置具有与构件协作的可移动元件，用于允许调节由弹簧施加的力同时防止弹簧的扭转。