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公开(公告)号：US20130029113A1
公开(公告)日：2013-01-31
申请号：US13560016
申请日：2012-07-27
IPC分类号： C08F8/08 , B32B3/10 , C08F293/00
CPC分类号： C08F297/02 , B82Y10/00 , B82Y40/00 , C08C19/06 , C08F8/08 , C08F212/08 , C08F236/08 , C08F297/046 , C08F2438/02 , G03F7/0002 , G03F7/165 , Y10T428/24802 , C08F220/14 , C08F2220/325
摘要： Provided herein are methods of formulating and engineering block copolymer (BCP) systems for directed self-assembly (DSA) processes. In some embodiments, the methods involve engineering a BCP material based on the interaction parameter (χ) of the material and the surface and/or interaction energies of its constituent blocks. Also provided are novel block BCP materials that can be used in DSA techniques. In some embodiments, the BCP systems described herein have micro-phase separating blocks, with at least one block including multiple types of repeat units. Also provided are structures formed by DSA, including structures having a sub-20 nm dimension. Applications included nanolithography for semiconductor devices, fabrication of cell-based assays, nanoprinting, photovoltaic cells, and surface-conduction electron-emitter displays.
摘要翻译： 本文提供了配制和制备用于定向自组装（DSA）方法的嵌段共聚物（BCP）体系的方法。 在一些实施例中，所述方法涉及基于所述材料的相互作用参数（χ）和其组成块的表面和/或相互作用能量来工程化BCP材料。 还提供了可用于DSA技术的新型嵌段BCP材料。 在一些实施例中，本文所述的BCP系统具有微相分离块，其中至少一个块包括多种类型的重复单元。 还提供了由DSA形成的结构，包括具有次20nm尺寸的结构。 应用包括半导体器件的纳米光刻技术，基于细胞的测定法的制造，纳米印刷，光伏电池和表面传导电子发射显示器。
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公开(公告)号：US08133341B2
公开(公告)日：2012-03-13
申请号：US12416816
申请日：2009-04-01
CPC分类号： B82Y30/00 , G03F7/0002
摘要： Methods of creating and transferring chemical patterns and physical patterns of deposited materials or molecules using block copolymers are provided. The methods involve providing block copolymer materials blended with one or more transfer molecules or inks. The differences in chemistry of the blocks of the copolymer that result in micro-phase separation (e.g., self-assembly into nanoscale domains) also allow inks to be sequestered into specific blocks. By designing the ink molecules to react, adsorb, or otherwise interact with a second substrate, inks are transferred to the second substrate in a pattern dictated by the pattern of block copolymer domains present at the surface of the block copolymer film.
摘要翻译： 提供了使用嵌段共聚物产生和转移沉积材料或分子的化学图案和物理图案的方法。 所述方法涉及提供与一种或多种转移分子或油墨共混的嵌段共聚物材料。 导致微相分离（例如，自组装成纳米级域）的共聚物嵌段的化学差异也允许将油墨隔离成特定嵌段。 通过将油墨分子设计为与第二基材反应，吸附或以其它方式相互作用，油墨以嵌段共聚物膜表面上存在的嵌段共聚物结构图所示的图案转移到第二基材。
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公开(公告)号：US20090260750A1
公开(公告)日：2009-10-22
申请号：US12416816
申请日：2009-04-01
IPC分类号： B44C1/20
CPC分类号： B82Y30/00 , G03F7/0002
摘要： Methods of creating and transferring chemical patterns and physical patterns of deposited materials or molecules using block copolymers are provided. The methods involve providing block copolymer materials blended with one or more transfer molecules or inks. The differences in chemistry of the blocks of the copolymer that result in micro-phase separation (e.g., self-assembly into nanoscale domains) also allow inks to be sequestered into specific blocks. By designing the ink molecules to react, adsorb, or otherwise interact with a second substrate, inks are transferred to the second substrate in a pattern dictated by the pattern of block copolymer domains present at the surface of the block copolymer film.
摘要翻译： 提供了使用嵌段共聚物产生和转移沉积材料或分子的化学图案和物理图案的方法。 所述方法涉及提供与一种或多种转移分子或油墨共混的嵌段共聚物材料。 导致微相分离（例如，自组装成纳米级域）的共聚物嵌段的化学差异也允许将油墨隔离成特定嵌段。 通过将油墨分子设计为与第二基材反应，吸附或以其它方式相互作用，油墨以嵌段共聚物膜表面上存在的嵌段共聚物结构图所示的图案转移到第二基材。
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